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2. 发明授权

KR100453777B1 반도체 제조 장치 및 그 동작 조건 파라미터의 관리 방법과, 컴퓨터 판독 가능한 기록 매체 失效
标题翻译： 반도체제조장치및그작작조건파라터터의관리방법과，컴퓨터판독가능한기록매록매매매
公开(公告)号：KR100453777B1
公开(公告)日：2004-10-20
申请号：KR1020017005297
申请日：2000-08-22
申请人： 도쿄엘렉트론가부시키가이샤
发明人： 나가타마사야 , 스가와라마사히로
IPC分类号： H01L21/02
CPC分类号： H01L21/67276 , G05B19/41835 , G05B19/41845 , G05B2219/36088 , G05B2219/36089 , G05B2219/36271 , G05B2219/45026 , G05B2219/45031 , Y02P90/12 , Y02P90/16 , Y02P90/28
摘要： A semiconductor manufacturing apparatus is improved so that apparatus operating condition parameters can be restored to setting values of various levels such as standard, apparatus delivery time or client oriented setting values even if the parameters are overwritten. The semiconductor manufacturing apparatus is constituted by a multi-chamber processing system 4, a transport system 8 of an object and an equipment control unit 210 having a memory apparatus 214 storing the apparatus operating condition parameters and providing the parameters to machine control units 150, 72. The machine control units 150, 72 controls the processing system 4 and the transport system 8 based on the apparatus operating condition parameters. The equipment control system 210 stores the apparatus operating condition parameters in the memory apparatus 214 for each level provided with a priority level from a standard level peculiar to the apparatus to a specific level peculiar to a user, and the equipment control system 210 develops the apparatus operating condition parameters stored in the memory apparatus on a memory 210 of the machine control units 150, 72 in an order of priority levels.
摘要翻译：改进了半导体制造设备，使得即使参数被重写，设备操作条件参数也可以恢复到诸如标准，设备交付时间或面向客户端的设置值等各种级别的设置值。半导体制造装置由多室处理系统4，物体的输送系统8和设备控制单元210构成，设备控制单元210具有存储设备操作条件参数并将参数提供给机器控制单元150,72的存储器设备214 机器控制单元150,72基于装置操作条件参数来控制处理系统4和传送系统8。设备控制系统210将设备操作条件参数存储在存储器设备214中，该设备操作条件参数用于从设备特有的标准级别到用户特有的特定级别提供优先级的每个级别，并且设备控制系统210将设备以机器控制单元150,72的存储器210中按照优先级的顺序存储在存储装置中的操作条件参数。＆lt;图像＆GT;

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