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1. 发明授权

KR101157878B1 검사용 치구의 유지보수방법 및 기판검사장치 有权
标题翻译：检验仪器的维护方法，其设备
公开(公告)号：KR101157878B1
公开(公告)日：2012-06-22
申请号：KR1020100097257
申请日：2010-10-06
申请人： 니혼덴산리드가부시키가이샤
发明人： 가리야도모카
IPC分类号： G01R31/02 , G01R31/306
摘要： PURPOSE: A method for maintenance of inspection fixture and an apparatus for inspection of a base board are provided to accurately detect maintaining/repairing timing for the inspection fixture. CONSTITUTION: A first calculation unit(51) outputs a first resistance value between inspection points from a current value of a power unit and a voltage value of a detection unit. The determining unit(61) determines goodness or badness by comparing the first resistance value with a reference resistance value. If determination result is badness, a moving unit(62) recontacts a pair of contactor contacted with the inspection points. A second calculation unit(52) produces a second resistance value between inspection points from the current value of the power unit and the voltage value of the detection unit.

2. 发明公开

KR1020110043446A 검사용 치구의 유지보수방법 및 기판검사장치 有权
标题翻译：检验仪器的维护方法，其设备
公开(公告)号：KR1020110043446A
公开(公告)日：2011-04-27
申请号：KR1020100097257
申请日：2010-10-06
申请人： 니혼덴산리드가부시키가이샤
发明人： 가리야도모카
IPC分类号： G01R31/02 , G01R31/306
摘要： PURPOSE: A method for maintenance of inspection fixture and an apparatus for inspection of a base board are provided to accurately detect maintaining/repairing timing for the inspection fixture. CONSTITUTION: A first calculation unit(51) outputs a first resistance value between inspection points from a current value of a power unit and a voltage value of a detection unit. The determining unit(61) determines goodness or badness by comparing the first resistance value with a reference resistance value. If determination result is badness, a moving unit(62) recontacts a pair of contactor contacted with the inspection points. A second calculation unit(52) produces a second resistance value between inspection points from the current value of the power unit and the voltage value of the detection unit.
摘要翻译：目的：提供检查夹具的维护方法和基板的检查装置，以准确地检测检查夹具的维修时间。构成：第一计算单元（51）从检查单元的当前值和检测单元的电压值之间输出检查点之间的第一电阻值。确定单元（61）通过将第一电阻值与参考电阻值进行比较来确定良好或不良。如果确定结果是不良，则移动单元（62）重合与检查点接触的一对接触器。第二计算单元（52）根据功率单元的当前值和检测单元的电压值在检查点之间产生第二电阻值。

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