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1. 发明授权

KR100426323B1 진폭분할 편광측정기를 사용한 초고속 타원계 失效
标题翻译： 진폭분할편광측정기를사용한초고속타원계
公开(公告)号：KR100426323B1
公开(公告)日：2004-04-08
申请号：KR1020010029365
申请日：2001-05-28
申请人： 김상열
发明人： 김상열 , 김상준
IPC分类号： G01B11/24
摘要： PURPOSE: An ultrahigh speed ellipsometer is provided to simultaneously measure optical amplitude and phase in a real time basis within a few nano-seconds. CONSTITUTION: An ultrahigh speed ellipsometer comprises a light generator and He-Ne laser source for permitting incidence of only the single pulse from among laser pulses emitted from Nd-YAG/OPO laser, at the repeating ratio of 10Hz, to a specimen; a polarizer for circularly polarizing the light generated from the He-Ne laser source, and linearly polarizing the light at the desired azimuth angle; a plurality of actinometers for measuring, through changes of light intensity, changes of refractivity caused when the light emitted from the He-Ne laser source passes through the polarizer and is reflected at the surface of the specimen; an oscilloscope for showing, in waveforms, the intensity of light measured by actinometers; a light divider for transmitting part of the light generated from the light generator, to the actinometer connected to an external trigger signal terminal of the oscilloscope; and a reading unit for reading data obtained from the measurement of actinometers and gathered by the oscilloscope.
摘要翻译：目的：提供超高速椭偏仪，可在几纳秒内实时同时测量光学幅度和相位。构成：一种超高速椭偏仪包括一个光发生器和He-Ne激光源，允许从Nd-YAG / OPO激光器发射的激光脉冲中的单个脉冲以10Hz的重复频率入射到样品; 偏振器，用于使从He-Ne激光源产生的光圆偏振，并以期望的方位角线性地偏振该光; 多个光度计，用于通过光强度的改变来测量当从He-Ne激光源发射的光穿过偏振器并且在样品表面处反射时引起的折射率的变化; 示波器，用波形显示由光度计测得的光强度; 分光器，用于将从光发生器产生的光的一部分传输到连接到示波器的外部触发信号端子的光度计; 以及读取单元，用于读取由示波器测量并由示波器收集的数据。

2. 发明公开

KR1020020090500A 진폭분할 편광측정기를 사용한 초고속 타원계 失效
标题翻译：超高速偏光仪使用AMPLITUDE DIVIED PHOTO POLARIMETER
公开(公告)号：KR1020020090500A
公开(公告)日：2002-12-05
申请号：KR1020010029365
申请日：2001-05-28
申请人： 김상열
发明人： 김상열 , 김상준
IPC分类号： G01B11/24
摘要： PURPOSE: An ultrahigh speed ellipsometer is provided to simultaneously measure optical amplitude and phase in a real time basis within a few nano-seconds. CONSTITUTION: An ultrahigh speed ellipsometer comprises a light generator and He-Ne laser source for permitting incidence of only the single pulse from among laser pulses emitted from Nd-YAG/OPO laser, at the repeating ratio of 10Hz, to a specimen; a polarizer for circularly polarizing the light generated from the He-Ne laser source, and linearly polarizing the light at the desired azimuth angle; a plurality of actinometers for measuring, through changes of light intensity, changes of refractivity caused when the light emitted from the He-Ne laser source passes through the polarizer and is reflected at the surface of the specimen; an oscilloscope for showing, in waveforms, the intensity of light measured by actinometers; a light divider for transmitting part of the light generated from the light generator, to the actinometer connected to an external trigger signal terminal of the oscilloscope; and a reading unit for reading data obtained from the measurement of actinometers and gathered by the oscilloscope.
摘要翻译：目的：提供超高速椭偏仪，可在几秒内同时测量光学幅度和相位。构成：超高速椭偏仪包括光发生器和He-Ne激光源，用于允许从Nd-YAG / OPO激光器以10Hz的重复比率发射的激光脉冲中的单个脉冲的入射到样品; 偏振器，用于使从He-Ne激光源产生的光圆偏振，并以所需的方位角线性地偏振光; 多个调光计，用于通过光强度的变化测量当从He-Ne激光源发射的光通过偏振器并在样品的表面反射时引起的折射率变化; 示波器，以波形显示由光瞳仪测量的光强度; 用于将从所述光发生器产生的光的一部分发射到与所述示波器的外部触发信号端子连接的所述光谱仪的光分配器; 以及读取单元，用于读取由测量的测量并由示波器收集的数据。

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