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    • 2. 发明公开
    • 수소센서 및 수소가스 검지장치
    • 氢传感器和氢气检测器
    • KR1020090082900A
    • 2009-07-31
    • KR1020097010282
    • 2007-07-10
    • 가부시키가이샤 아쯔미테크고쿠리츠켄큐카이하츠호진 상교기쥬츠 소고켄큐쇼
    • 우치야마나오키마쯔다나오키요시무라가즈키가토겐지
    • G01N21/77G01N21/78
    • G01N21/7703G01N21/783G01N2021/7773Y10T436/22
    • A thin film layer is formed on the surface of a planar light transmission path in a hydrogen sensor, and a catalyst layer is formed on the surface of the thin film layer. A first boundary surface is formed between the planar light transmission path and the thin film layer, and a second boundary surface is formed between the planar light transmission path and a substrate when the substrate is bonded to the backside of the planar light transmission path. Light from a light source is allowed to enter from the incident portion while being diffused to the first end side of the planar light transmission path, and then the light is reflected alternately off the first and second boundary surfaces and transmitted to the second end side of the planar light transmission path. That light exiting the second end side is transmitted to a photosensor by an exiting/condensing portion. When the thin film layer is hydrogenated by the catalyst layer touching hydrogen, the quantity of light reflecting off the first boundary surface decreases. Decrease in quantity of light is detected by the photosensor to thereby detect hydrogen.
    • 在氢传感器的平面光传输路径的表面上形成薄膜层,并且在薄膜层的表面上形成催化剂层。 在平面光传输路径和薄膜层之间形成第一边界面,并且当基板接合到平面光传输路径的背面时,在平面光传输路径和基板之间形成第二边界面。 允许来自光源的光从入射部分进入,同时扩散到平面光传输路径的第一端侧,然后光从第一和第二边界面交替地反射并被传输到第二端侧 平面光传输路径。 离开第二端侧的光通过出射/冷凝部分传输到光电传感器。 当薄膜层被接触氢的催化剂层氢化时,从第一边界表面反射的光量减少。 光传感器检测到光的减少,从而检测氢。