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    • 3. 发明公开
    • 직선구동장치, 그 제어방법 및 XY테이블
    • 直线驱动装置,其中包括相邻磁极板之间的绕组,其控制方法和XY表
    • KR1020040071575A
    • 2004-08-12
    • KR1020030057261
    • 2003-08-19
    • 가부시끼가이샤 히다치 세이사꾸쇼
    • 마키고지김홍중모로오카야스오사카이게이지로시바타히토시시마네히데키다도코로히사오고바야시다카시
    • H02K41/03
    • H02K41/03H02K21/02H02K55/00Y02E40/62
    • PURPOSE: A straight line driving apparatus, a control method thereof and an XY table are provided to increase thrust forces of the apparatus by reducing leakage flux between magnetic pole teeth. CONSTITUTION: A straight line driving apparatus comprises a primary member(10) and a secondary member(20). The primary member includes a first core(11a) having a first opposed portion where magnetic pole teeth(13a,13b) are opposed each other, and a second core having a second opposed portion where magnetic pole teeth(14a,14b) are opposed each other. The secondary member is arranged between the magnetic pole teeth of the first opposed portion and between the magnetic pole teeth of the second opposed portion, such that the secondary member is relatively movable with respect to the primary member. The magnetic flux passing the first opposed portion is different from the magnetic flux passing the second opposed portion. The straight line driving apparatus further includes a winding(12) between adjacent magnetic pole teeth(13a,14a) arranged in the vicinity of the movement direction of the secondary member.
    • 目的:提供直线驱动装置,其控制方法和XY工作台,以通过减小磁极齿之间的漏磁通量来增加装置的推力。 构成:直线驱动装置包括主构件(10)和次构件(20)。 主构件包括具有第一相对部分的第一铁心(11a),其中磁极齿(13a,13b)彼此相对,第二铁芯具有第二相对部分,其中磁极齿(14a,14b)各自相对 其他。 第二构件布置在第一相对部分的磁极齿之间和第二相对部分的磁极齿之间,使得次构件相对于主构件相对移动。 通过第一相对部分的磁通量不同于通过第二相对部分的磁通量。 直线驱动装置还包括在相邻的磁极齿(13a,14a)之间布置在次级构件的移动方向附近的绕组(12)。