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1. 发明授权

KR101146617B1 초임계 용매를 이용한 추출 장치 有权
标题翻译：超临界流体提取装置
公开(公告)号：KR101146617B1
公开(公告)日：2012-05-16
申请号：KR1020110113407
申请日：2011-11-02
申请人： (주)일신오토클레이브
发明人： 지성화 , 김현효
IPC分类号： B01D11/04 , C02F1/26
摘要： PURPOSE: An extracting apparatus using supercritical fluid is provided to easily extract plenty of samples and to prevent the overflowing phenomenon of the samples by increasing the diameter of an extracting unit and controlling an internal pressure. CONSTITUTION: An extracting apparatus using supercritical fluid(1000) includes an extracting unit, a solvent storage(200), a first connecting line(310), a second connecting line(320), a first converting unit(400), a second converting unit(500), a first valve(311), a second valve(321), a bypass line(330), and a third valve(331). The connecting lines connect the solvent storage and the extracting unit. The first converting unit is arranged on the first connecting line and converts fluid into supercritical fluid. The second converting unit is arranged on the second connecting line and converts the supercritical fluid into a liquid solvent. The valves control the flow of the supercritical solvent. The bypass line connects the connecting lines. The third valve is formed on the bypass line and controls the flow of the supercritical solvent.

2. 发明授权

KR101103010B1 마그네드라이브와 초임계 유체를 사용하는 기판 처리장치 有权
标题翻译： WAFER加工设备
公开(公告)号：KR101103010B1
公开(公告)日：2012-01-05
申请号：KR1020110034932
申请日：2011-04-15
申请人： (주)일신오토클레이브
发明人： 지성화
IPC分类号： H01L21/304
CPC分类号： H01L21/02101 , H01L21/67017
摘要： PURPOSE: A substrate processing apparatus which uses a magnet drive and supercritical fluid is provided to rotate a substrate placed within a substrate processing space using the magnet drive, thereby rapidly performing a substrate processing process. CONSTITUTION: A base body(100) arranges a substrate processing space(101) which includes a pressure maintaining structure. A rotator(110) is located in the inside of the base body in order to be able to rotate. A magnet drive comprises an outer magnet and an inner rotor magnet combined in the rotator. A pressure maintaining device discharges foreign materials together with a supercritical fluid within the substrate processing space to a pressure discharge hole. A rotator vertical movement device(130) transfers the rotator in up and down directions of the substrate processing space.
摘要翻译：目的：提供使用磁驱动和超临界流体的基板处理装置，以使用磁驱动器旋转放置在基板处理空间内的基板，由此快速进行基板处理工序。构成：基体（100）布置包括压力保持结构的基板处理空间（101）。旋转器（110）位于基体的内部以便能够旋转。磁驱动器包括组合在旋转器中的外磁体和内转子磁体。压力保持装置将超临界流体的外来物质与基板处理空间内的排出孔排出。旋转器垂直移动装置（130）在基板处理空间的上下方向上转动旋转体。

3. 发明授权

KR101073379B1 기판안치부의 상, 하 이동이 가능한 초임계 유체를 사용하는 기판 처리장치 有权
标题翻译： WAFER加工设备
公开(公告)号：KR101073379B1
公开(公告)日：2011-10-13
申请号：KR1020110034943
申请日：2011-04-15
申请人： (주)일신오토클레이브
发明人： 지성화
IPC分类号： H01L21/302
摘要： 본 발명은 초임계 이산화탄소 등의 초임계 유체를 사용하여 반도체소자 제조의 재료인 웨이퍼(wafer) 등의 기판을 처리하는 장치에 관한 것이다.
본 발명의 기판 처리장치는, 기판이 삽입되어 위치될 수 있고 초임계 유체가 공급되고 배출되며, 공급되는 초임계 유체가 초임계 상태를 유지할 수 있도록 압력유지구조를 갖는 기판처리공간을 형성하는 베이스몸체; 및 상기 베이스몸체의 하부에 위치되어 있고, 기판처리공간 내로 공급된 기판이 안치되는 기판안치부를 기판처리공간의 상, 하로 이동시킬 수 있도록 되어 있되 유체나 가스를 피스톤의 상부나 하부로 공급하여 피스톤을 상, 하로 움직여주는 실린더 구조를 통해 기판안치부를 상, 하로 이동시킬 수 있도록 되어 있는 기파안치부이동수단(150);를 갖는다.
본 발명에 의하면, 기판안치부에 기판을 신속하고 용이하게 안치시킬 수 있고, 기판을 로봇암 등을 통해 자동으로 공급하는 것도 가능하도록 구현할 수 있는 특징이 있다.

4. 发明公开

KR1020100134891A 초임계 용매를 이용한 추출 방법 有权
标题翻译：萃取装置和使用超临界流体的方法
公开(公告)号：KR1020100134891A
公开(公告)日：2010-12-24
申请号：KR1020090053242
申请日：2009-06-16
申请人： (주)일신오토클레이브
发明人： 김현효 , 지성화
IPC分类号： B01D11/04 , C02F1/26
摘要： PURPOSE: An extractor using a supercritical solvent which easily extracts the high capacity sample with the enlargement of the diameter of the extractor is provided to supply the supercritical solvent with the flow of each valve to the lower and upper of the extractor. CONSTITUTION: An extraction unit(100) includes inlet and outlet. A solvent storage unit(200) stores solvent. A converting unit(400) converts the solvent into the supercritical solvent. A second converting unit(500) changes the supercritical solvent into the solvent of the liquid state. A first valve controls the flow of the supercritical solvent of the inward of the extractor. A second valve controls the flow of the supercritical solvent to the outside of the extractor.
摘要翻译：目的：提供使用超临界溶剂的提取器，其随着提取器直径的增大而容易地提取高容量样品，以将超临界溶剂提供给提取器的下部和上部的每个阀的流动。构成：提取单元（100）包括入口和出口。溶剂储存单元（200）存储溶剂。 A转化单元（400）将溶剂转化为超临界溶剂。第二转化单元（500）将超临界溶剂改变为液态溶剂。第一阀控制提取器内部的超临界溶剂的流动。第二阀门控制超临界溶剂向萃取器外部的流动。

5. 发明公开

KR1020120113971A 초임계 이산화탄소의 순환장치 및 순환방법 有权
标题翻译：超临界二氧化碳循环装置
公开(公告)号：KR1020120113971A
公开(公告)日：2012-10-16
申请号：KR1020110031679
申请日：2011-04-06
申请人： (주)일신오토클레이브
发明人： 지성화
IPC分类号： H01L21/302 , H01L21/02
CPC分类号： H01L21/67017
摘要： PURPOSE: An apparatus and method for circulating supercritical carbon dioxide are provided to smoothly supply carbon dioxide to a supercritical forming unit with a high pressure pump by improving the compression efficiency of liquefied carbon dioxide. CONSTITUTION: A heating unit(10) heats carbon dioxide used with a supercritical state. A filter(20) removes foreign materials from the carbon dioxide passing through the heating unit. A cooling unit(30) cools carbon dioxide gas passing through the filter. A damper(40) stores the carbon dioxide supplied to the heating unit. A high pressure pump(50) supplies liquefied carbon dioxide to a supercritical forming unit(100).
摘要翻译：目的：提供一种用于循环超临界二氧化碳的设备和方法，通过提高液化二氧化碳的压缩效率，通过高压泵将二氧化碳平稳地提供给超临界形成单元。构成：加热单元（10）加热超临界状态下使用的二氧化碳。过滤器（20）从通过加热单元的二氧化碳中除去异物。冷却单元（30）冷却通过过滤器的二氧化碳气体。阻尼器（40）存储供应到加热单元的二氧化碳。高压泵（50）向超临界形成单元（100）供应液化的二氧化碳。

6. 发明授权

KR101146614B1 초임계 용매를 이용한 추출 방법 有权
标题翻译：超临界流体萃取法
公开(公告)号：KR101146614B1
公开(公告)日：2012-05-16
申请号：KR1020090053242
申请日：2009-06-16
申请人： (주)일신오토클레이브
发明人： 김현효 , 지성화
IPC分类号： B01D11/04 , C02F1/26
摘要： 본 발명은 초임계 용매를 이용한 추출 장치 및 방법에 관한 것으로서, 더욱 상세하게 추출수단 내부에 시료를 장입한 후, 초임계 용매를 이용하여 추출수단 내부의 압력을 적절히 조절하도록 함으로써 대형화가 가능하며 추출 효율을 보다 향상할 수 있는 초임계 용매를 이용한 추출 장치 및 방법에 관한 것이다.
초임계, 이산화탄소, 추출, 용매

7. 发明公开

KR1020110124746A 초임계 용매를 이용한 추출 장치 有权
标题翻译：超临界流体萃取装置
公开(公告)号：KR1020110124746A
公开(公告)日：2011-11-17
申请号：KR1020110113407
申请日：2011-11-02
申请人： (주)일신오토클레이브
发明人： 지성화 , 김현효
IPC分类号： B01D11/04 , C02F1/26
CPC分类号： B01D11/0407
摘要： PURPOSE: An extracting apparatus using supercritical fluid is provided to easily extract plenty of samples and to prevent the overflowing phenomenon of the samples by increasing the diameter of an extracting unit and controlling an internal pressure. CONSTITUTION: An extracting apparatus using supercritical fluid(1000) includes an extracting unit, a solvent storage(200), a first connecting line(310), a second connecting line(320), a first converting unit(400), a second converting unit(500), a first valve(311), a second valve(321), a bypass line(330), and a third valve(331). The connecting lines connect the solvent storage and the extracting unit. The first converting unit is arranged on the first connecting line and converts fluid into supercritical fluid. The second converting unit is arranged on the second connecting line and converts the supercritical fluid into a liquid solvent. The valves control the flow of the supercritical solvent. The bypass line connects the connecting lines. The third valve is formed on the bypass line and controls the flow of the supercritical solvent.
摘要翻译：目的：提供使用超临界流体的提取装置，以便通过增加提取单元的直径和控制内部压力来容易地提取大量样品并防止样品溢出现象。构成：使用超临界流体（1000）的提取装置包括提取单元，溶剂储存器（200），第一连接线（310），第二连接线（320），第一转换单元（400），第二转换单元（500），第一阀（311），第二阀（321），旁通管路（330）和第三阀（331）。连接线连接溶剂储存器和提取单元。第一转换单元布置在第一连接线上并将流体转换成超临界流体。第二转换单元布置在第二连接线上，并将超临界流体转化为液体溶剂。阀控制超临界溶剂的流动。旁路线连接连接线。第三阀形成在旁通管路上并控制超临界溶剂的流动。

8. 发明授权

KR101777713B1 래그 레이어 내에서 유용물질을 획득하기 위한 래그 레이어 처리장치 有权
标题翻译：一种滞后层处理装置，用于获得滞后层中的有用物质
公开(公告)号：KR101777713B1
公开(公告)日：2017-09-12
申请号：KR1020170052645
申请日：2017-04-25
申请人： (주)일신오토클레이브
发明人： 지성화 , 김현효
IPC分类号： C10G21/06 , C10G31/06
CPC分类号： C10G21/06 , C10G31/06 , C10G2300/201 , C10G2300/4006 , C10G2300/4012
摘要： 본발명은석유화학정제시설(Refinery)에설치된제염기(desalter)에서발생되는에멀젼상태의래그레이어(rag layer)를처리하는장치에관한것으로, 상세하게는래그레이어(rag layer) 내에서유분및 유용물질을획득할수 있도록불순물제거를위한래그레이어처리장치에관한것이다. 래그레이어내에서유용물질을획득하기위한래그레이어처리장치는, 유동성을향상시키고, 고압펌핑할수 있도록이루어진래그레이어공급장치와; 상기고압의보조용매를공급하는보조용매공급장치와; 상기래그레이어공급장치와보조용매공급장치로부터래그레이어와보조용매를공급받아초임계반응을시키는초임계반응장치와; 상기초임계반응장치에서걸린초임계상태를풀어주는초임계해제장치와; 상기초임계해제장치를통해초임계상태가해제된래그레이어에서상분리를통하여유용물질을분리하도록이루어진상분리장치를포함한다.
摘要翻译：油在本发明中是石化炼油厂涉及（炼油厂）的基部（脱盐）装置，用于处理在提供在，特别是，滞后层（油水中间层）中产生的乳液的拖动层（油水中间层），和以及用于去除杂质以获得有用材料的滞后层处理设备。在滞后层获得有用物质抹布层处理单元，以及改善流动性和，油水中间层由供给的是一个高压泵送装置; 一种用于供应高压辅助溶剂的辅助溶剂供应装置; 一种超临界反应装置，用于从滞后层供应装置和共溶剂供应装置供应滞后层和共溶剂以进行超临界反应; 一种用于在基于相的临界反应器中释放超临界状态的超临界释放装置; 以及相分离装置，用于通过基于相位的阈值释放装置释放超临界状态的抹布层中的相分离来分离有用物质。

9. 发明授权

KR101623722B1 고압 슬러리 펌프용 체크 밸브 有权
标题翻译：检查阀用于高压浆液泵
公开(公告)号：KR101623722B1
公开(公告)日：2016-05-24
申请号：KR1020150133321
申请日：2015-09-21
申请人： (주)일신오토클레이브
发明人： 지성화
IPC分类号： F04B53/10 , F04B19/04 , F16K15/04 , F16K1/14 , F16K1/42
摘要： 본발명은유동하는물질의역류를방지하는체크밸브에관한것으로, 더욱상세하게는저압의유체를고압으로압축하여후단구성품의압력을형성하는고압슬러리펌프에사용되는체크밸브에관한것이다.
摘要翻译：本发明涉及一种防止流动物质向后流动的止回阀。更具体地，止回阀用于在高压下压缩低压流体的高压浆料泵以形成后端部件的压力。本发明包括：具有上侧开口单元（110b）和下侧开口单元（110a）的壳体（110）; 插入下侧开口单元（110a）中的主帽（120）; 插入所述下侧开口单元（110a）并且位于所述主帽（120）的下侧上的盖帽（130）; 以及插入下侧开口单元（110a）并且位于主帽（120）的上侧的子帽（140）。

10. 发明公开

KR1020120113960A 초임계 유체와 약액의 혼합장치 및 그것을 사용하여 초임계유체 혼합물을 공급하는 방법 有权
标题翻译：超临界流体和液体化学混合装置
公开(公告)号：KR1020120113960A
公开(公告)日：2012-10-16
申请号：KR1020110031666
申请日：2011-04-06
申请人： (주)일신오토클레이브
发明人： 지성화
IPC分类号： B01F5/00 , B01F3/04
摘要： PURPOSE: An apparatus for mixing supercritical fluid and chemicals and a method for supplying a supercritical fluid mixture using the same are provided to quantitatively mix the supercritical fluid and the chemicals by repeating the supercritical fluid and the chemicals using circulating pumps and circulating pipes. CONSTITUTION: An apparatus for mixing supercritical fluid and chemicals includes a plurality of mixing and storing tanks(10), circulating pipes(20), circulating pumps(30), first line mixers(40), tank supply controlling valves(50), and external supply controlling valves(60). The mixing and storing tanks store supercritical fluid and chemicals. The circulating pipes form paths through which the supercritical fluid and the chemicals circulate. The circulating pumps circulate the supercritical fluid and the chemicals through the circulating pipes. The first line mixers are installed on the circulating pipes and mix the supercritical fluid and the chemicals. The tank supply controlling valve supplies the supercritical fluid and the chemicals to one mixing and storing tank of the mixing and storing tanks. The external supply controlling valve supplies the mixture of the supercritical fluid and the chemicals from the mixing and storing tank to the external side of the apparatus.
摘要翻译：目的：提供一种用于混合超临界流体和化学品的装置以及使用其的超临界流体混合物的供给方法，以通过使用循环泵和循环管重复超临界流体和化学品来定量混合超临界流体和化学品。构成：用于混合超临界流体和化学品的装置包括多个混合和储存罐（10），循环管道（20），循环泵（30），第一管线混合器（40），罐供应控制阀（50）和外部供给控制阀（60）。混合储存罐储存超临界流体和化学物质。循环管道形成超临界流体和化学品通过的路径。循环泵通过循环管道循环超临界流体和化学品。第一线混合器安装在循环管道上，混合超临界流体和化学品。储罐供应控制阀将超临界流体和化学品供应给混合和储存罐的一个混合和储存罐。外部供应控制阀将超临界流体和化学品的混合物从混合储存罐提供给设备的外部。

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