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    • 3. 发明公开
    • The highly sensitive pre-patterned micro array chip for bio-molecules detection with hydrophobic and hydrophilic surface and fabrication method thereof
    • 用于疏水性和亲水表面的生物分子检测的高敏感性预扫描微阵列及其制备方法
    • KR20100114238A
    • 2010-10-25
    • KR20090032667
    • 2009-04-15
    • LIM HYUN WOO
    • LIM HYUN WOOLEE MOON KWONLEE JUNG WHANPARK JIN GOOCHOO JAE BUM
    • G01N33/48G01N33/52G01N33/553G01N33/68
    • PURPOSE: An array chip of high sensitivity for bio molecule analysis using hydrophobic and hydrophilic surfaces and a method for manufacturing the same are provided to intensively arrange inside a microwell. CONSTITUTION: An array chip(10) of high sensitivity comprises a plurality of microwells(3) on a substrate(1). The microwell has metal thin film(5) and hydrophobic(7) in laminated multilayer thin film. The metal thin film has Ti, Cr, Al, Cu, Au, Ag, Pt, Si, Rh, Ru, V, Ta or mixture thereof. A method for manufacturing the microarray comprises: a step of depositing the metal thin film on the substrate; a depositing hydrophobic thin film on the metal thin film; a step of patterning the metal thin film and hydrophobic thin film by picture process; a step of etching the metal thin film and hydrophobic thin film to form a plurality of microwells; and a step of forming hydrophilic thin film with hydrophilic functional group.
    • 目的:提供用于使用疏水和亲水表面的生物分子分析的高灵敏度的阵列芯片及其制造方法,以集中布置在微孔内。 构成:高灵敏度的阵列芯片(10)包括在基板(1)上的多个微孔(3)。 微孔在层压多层薄膜中具有金属薄膜(5)和疏水性(7)。 金属薄膜具有Ti,Cr,Al,Cu,Au,Ag,Pt,Si,Rh,Ru,V,Ta或其混合物。 一种制造微阵列的方法,包括:将金属薄膜沉积在基底上的步骤; 在金属薄膜上沉积疏水性薄膜; 通过图像处理图案化金属薄膜和疏水性薄膜的步骤; 蚀刻金属薄膜和疏水性薄膜以形成多个微孔的步骤; 以及形成具有亲水性官能团的亲水性薄膜的工序。