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    • 4. 发明公开
    • 연마용 패드
    • 磨砂垫
    • KR1020030017429A
    • 2003-03-03
    • KR1020020050191
    • 2002-08-23
    • 로저스 이노악 코포레이션
    • 히시키,세이고
    • C08J5/14
    • B24B37/26B24B37/24B24D3/26
    • PURPOSE: To provide an abrasive pad of high quality, which is preferably used for chemical mechanical polishing (CMP) of a semiconductor wafer or the like, for example, not affected by change of polishing condition during polishing, and assures a superior polishing rate, elimination of steps, and uniformity on a surface. CONSTITUTION: A raw material of polyurethane or polyurea and various kinds of auxiliary materials are mixed, and a gas dissolved material which is obtained by dissolving an inert gas under a pressurized condition is formed into a polyurethane group foam 12 through a reactive injection forming method. The polyurethane group foam 12 which is provided with fine and uniform cells 20 suitable for polishing semiconductor materials or the like, is used for the abrasive pad.
    • 目的:提供优选用于半导体晶片等的化学机械抛光(CMP)的研磨垫,例如不受抛光过程中抛光条件变化的影响,并且确保优异的抛光速率, 消除台阶和表面上的均匀性。 构成:将聚氨酯或聚脲及各种辅助材料的原料混合,通过反应性注射成型法将通过将惰性气体溶解在加压条件下得到的气体溶解材料形成为聚氨酯组泡沫体12。 用于研磨垫的聚氨酯组泡沫12用于研磨半导体材料等,该细小均匀的电池20被提供。
    • 7. 发明公开
    • 시트 모양 탄성체
    • SHEET ELASTOMER
    • KR1020090098785A
    • 2009-09-17
    • KR1020097008789
    • 2006-10-16
    • 이노악 코포레이션로저스 이노악 코포레이션
    • 사토다다시
    • B29C67/20C08J9/42F16J15/10
    • B32B5/18G02F2001/133311
    • A sheet elastomer that is capable of simultaneously exhibiting scratch resistance and sealing capability by good flexibility and elasticity. There is provided a sheet elastomer comprised of sheetlike elastic foam substrate (12) as required, wherein the entirety of one surface (12a) along the thickness of the sheetlike elastic foam substrate (12) is covered with resin composition (R) as required, and wherein in a surface layer portion of the surface (12a), the resin composition (R) is present in cells (28) partitioned by foam skeleton (13) constituting the sheetlike elastic foam substrate (12), and wherein in the surface layer portion of the surface (12a), there is created resin composition presence region (14) resulting from integration of the sheetlike elastic foam substrate (12) and the resin composition (R).
    • 能够以良好的柔软性和弹性同时显示耐划伤性和密封性的片状弹性体。 根据需要提供由片状弹性泡沫基材(12)构成的片状弹性体,其中沿着片状弹性泡沫基材(12)的厚度的一个表面(12a)的整体根据需要被树脂组合物(R)覆盖, 并且其中在所述表面(12a)的表层部分中,所述树脂组合物(R)存在于由构成所述片状弹性泡沫基材(12)的泡沫骨架(13)分隔的泡孔(28)中,并且其中在所述表面层 表面(12a)的一部分,形成由片状弹性泡沫基材(12)和树脂组合物(R)整合产生的树脂组合物存在区域(14)。