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    • 46. 发明公开
    • 음극 증착에 의해 얻어지는 비-증발성 게터 다층 증착물및 그 제조 방법
    • 不可蒸发的入口多层沉积物包含具有低活性温度的层和具有通过阴极沉积获得的大面积区域的层和用于制造其的方法
    • KR1020040106234A
    • 2004-12-17
    • KR1020040042555
    • 2004-06-10
    • 사에스 게터스 에스.페.아.
    • 콘테,안드레아모라자,마르코
    • C23C14/16
    • B32B15/01H01J7/183Y10T428/12479Y10T428/12493Y10T428/12611Y10T428/12806Y10T428/12812Y10T428/12819Y10T428/12875Y10T428/12986Y10T428/12993
    • PURPOSE: To provide NEG(non-evaporable getter) materials which are obtained by cathodic deposition and characterized by low activation temperature and a large surface area, and to provide a process for their manufacturing. CONSTITUTION: In a multilayer deposit of non-evaporable getter having low activation temperature and a large surface area, the multilayer deposit comprises at least two layers formed on a support(10), the at least two layers comprise a first layer(11) of a non-evaporable getter material having a surface area equivalent to at least 20 times its geometrical area, and directly contacting an upper part of the support, and a second layer(12), having a thickness not greater than 1 μm, of a non-evaporable getter alloy having a low activation temperature on an upper part of the first layer, wherein the foregoing arbitrary layers are obtained by cathodic deposition without material of the first layer not exposed to reactive gases generated between depositions of the first layer and the second layer.
    • 目的:提供通过阴极沉积获得的NEG(非蒸发性吸气剂)材料,其特征在于低活化温度和较大的表面积,并提供其制造方法。 构成:在具有低活化温度和大表面积的非蒸发性吸气剂的多层沉积物中,所述多层沉积物包含形成在载体(10)上的至少两层,所述至少两层包括第一层(11) 不可蒸发的吸气剂材料,其表面积相当于其几何面积的至少20倍,并且直接接触支撑体的上部,以及厚度不大于1μm的第二层(12) 在第一层的上部具有低活化温度的可蒸发的吸气剂合金,其中上述任意层通过阴极沉积获得,没有第一层的材料没有暴露于在第一层和第二层的沉积之间产生的反应性气体 。