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    • 37. 发明授权
    • 플렉서블 기판 또는 인플렉서블 기판을 포함하는 광기전력 장치의 제조 방법
    • 用于制造包括柔性或无损基板的光伏器件的方法
    • KR101043219B1
    • 2011-06-22
    • KR1020100030837
    • 2010-04-05
    • 한국철강 주식회사
    • 명승엽
    • H01L31/04H01L31/18
    • H01L31/03926H01L31/03921Y02E10/50
    • PURPOSE: A flexible substrate and a method for manufacturing a photovoltaic device including the same are provided to improve the quality of an intermediate reflective film by changing raw gas and the frequency of a voltage applied to a processing chamber according to the movement of the substrate. CONSTITUTION: A first electrode(110) and a first unit cell(120) are formed on a substrate(100). The first unit cell includes a first conductive semiconductor layer(121), a intrinsic semiconductor layer(123), and a second conductive semiconductor layer(125) which are successively stacked from the first electrode. The first conductive semiconductor layer and the second conductive semiconductor layer include the third family and the fifth family-based impurities. An intermediate reflective film(130) includes a first sub-layer and a second sub-layer.
    • 目的:提供一种柔性基板及其制造方法,用于通过根据基板的运动改变原料气体和施加到处理室的电压的频率来提高中间反射膜的质量。 构成:在基板(100)上形成第一电极(110)和第一单电池(120)。 第一单位电池包括从第一电极依次层叠的第一导电半导体层(121),本征半导体层(123)和第二导电半导体层(125)。 第一导电半导体层和第二导电半导体层包括第三族和第五族系杂质。 中间反射膜(130)包括第一子层和第二子层。