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    • 21. 发明公开
    • 엑시머 방전 램프 장치
    • EXCIMER放电灯装置
    • KR1020160062704A
    • 2016-06-02
    • KR1020150164105
    • 2015-11-23
    • 우시오덴키 가부시키가이샤
    • 시모나카마사토시
    • H01J65/04H01J61/34H01J61/33H01J9/24H01J61/50H01J61/36
    • (과제)외부로부터가해지는진동충격에대해서높은내성을가짐과함께, 엑시머방전램프의위치가정확하게규제되고, 따라서, 높은균일성으로광을조사할수 있는엑시머방전램프장치를제공하는것. (해결수단)엑시머방전램프장치는, 막대형의엑시머방전램프와, 이엑시머방전램프를내부에봉입하는, 상기엑시머방전램프의축방향으로신장하는막대형의보호관을구비하고있고, 상기보호관에는, 한쪽의단부의내면에오목부가형성되어있고, 상기엑시머방전램프는, 한쪽의단부에, 상기보호관의오목부에삽입된피지지부를갖는것을특징으로한다.
    • (待解决的问题)本发明提供一种能够对从外部施加的振动冲击具有高耐久性的准分子放电灯装置,可以精确地调节准分子放电灯的位置,并且可以高度均匀地照射光。 (溶液)准分子放电灯装置包括棒型准分子放电灯和棒状保护管,其在准分子放电灯的轴向上延伸以密封准分子放电灯。 在保护管的一端的内表面上形成凹部,准分子放电灯的一端插入保护管的凹部中的支撑部。
    • 22. 发明公开
    • 이중 방전관을 적용한 조명 장치
    • 照明设备
    • KR1020130077149A
    • 2013-07-09
    • KR1020110145706
    • 2011-12-29
    • 주식회사 카이젠
    • 정풍기
    • H01J61/56H01J61/34H01J61/54H01J61/36
    • PURPOSE: A lighting device is provided to stably ignite a plurality of discharge tubes by using a stabilizer including a plurality of igniting units and switching units. CONSTITUTION: Two or more outer tubes (110) are separated in a predetermined distance. A discharge tube (120) is included in the outer tubes. An inner tube (130) is extended in a longitudinal direction of the outer tubes. A first discharge metal (141) and a second discharge metal (142) are included in the inner tube. A support unit (150) is formed in the outer tubes. The support unit is electrically connected with the first discharge metal.
    • 目的:提供照明装置,通过使用包括多个点火单元和开关单元的稳定器来稳定地点燃多个放电管。 构成:两个或多个外管(110)以预定距离分开。 排出管(120)包括在外管中。 内管(130)沿外管的纵向方向延伸。 第一放电金属(141)和第二放电金属(142)包括在内管中。 支撑单元(150)形成在外管中。 支撑单元与第一放电金属电连接。
    • 28. 发明公开
    • 엑시머 램프
    • EXCIMER灯
    • KR1020090100229A
    • 2009-09-23
    • KR1020090004597
    • 2009-01-20
    • 우시오덴키 가부시키가이샤
    • 후지사와시게키모리모토유키히로히시누마노부유키
    • H01J61/34H01J65/00
    • PURPOSE: An excimer lamp is provided to suppress the deterioration of a discharge vessel and to prevent a vacuum ultraviolet ray from being irradiated to an inner side. CONSTITUTION: An excimer lamp(1) includes a discharge vessel(2), and a pair of electrodes(5,6). The discharge vessel is made of the quartz glass of a dual tube structure in which an inner tube(4) and an outer tube(3) are arranged to a coaxial direction. The pair of electrodes are installed while interposing the quartz glass. A xenon gas is sealed in a discharge space. The excimer discharge is generated in the discharge space of the discharge vessel. The inner tube is made of the melting quartz glass. The outer pipe is made of the synthetic quartz glass.
    • 目的:提供准分子灯来抑制放电容器的劣化并防止真空紫外线照射到内侧。 构成:准分子灯(1)包括放电容器(2)和一对电极(5,6)。 放电容器由双管结构的石英玻璃制成,其中内管(4)和外管(3)沿同轴方向排列。 一对电极安装在插入石英玻璃。 氙气被密封在放电空间中。 在放电容器的放电空间产生准分子放电。 内管由熔融石英玻璃制成。 外管由合成石英玻璃制成。
    • 29. 发明公开
    • 자외선 조사용 광원
    • 用于超紫外线辐照的光源
    • KR1020090094746A
    • 2009-09-08
    • KR1020090013889
    • 2009-02-19
    • 우시오덴키 가부시키가이샤
    • 다지카노조무
    • H01J61/52H01J61/34
    • H01J61/33H01J61/52
    • A light source for ultraviolet irradiation is provided to dispose the tip of the arc tube of the discharge lamp in the gravity direction in the cooling jacket. The cooling jacket(20) comprises the outer tube(21) and the inner tube(22) of the quartz glass, the jacket holder(23A,23B) and the O ring(24A,24B,25A,25B). The jacket holder is made of the aluminum. The jacket holder contacts with the cross section of the inner tube and the outer tube of the quartz glass. The feedthrough(26) and vent(27) of the fluid for cooling(H) are formed in the jacket holder. The bridge member(201A,201B) is adhered to the jacket holder. The water cooling jacket is fixed to the base plate or the frame of the violet exposing apparatus by the bridge member. The part having the tip(T) of the arc tube(11) inside the cooling jacket is arranged in the gravity direction.
    • 提供用于紫外线照射的光源,用于将散热灯的电弧管的尖端沿重力方向设置在冷却套中。 冷却套(20)包括石英玻璃的外管(21)和内管(22),护套保持器(23A,23B)和O形环(24A,24B,25A,25B)。 外套支架由铝制成。 护套支架与内管的截面和石英玻璃的外管接触。 用于冷却的流体(H)的馈通(26)和通气孔(27)形成在护套支架中。 桥构件(201A,201B)粘附到护套保持器。 水冷套通过桥构件固定在紫外线曝光装置的基板或框架上。 在冷却套内部具有电弧管(11)的尖端(T)的部分配置在重力方向。