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21. 发明授权

KR101207855B1 나비밸브 개폐장치 有权
公开(公告)号：KR101207855B1
公开(公告)日：2012-12-04
申请号：KR1020100063732
申请日：2010-07-02
申请人： 프리시스 주식회사
发明人： 김배진 , 최기선 , 김강현 , 김상민 , 이형곤
IPC分类号： F16K1/22 , F16K51/02
摘要： 본발명은나비밸브개폐장치에관한것으로서, 본발명에따른나비밸브개폐장치는, 유체가통과되는유체통로(101)가상하로형성되며, 내부에상하구동부(110)가구비되는하우징(100);과, 상기하우징(100)의일측부를관통하여타측부까지연장형성되는메인샤프트(200);와, 상기메인샤프트(200)를회전시키는회전구동부(300);와, 상기메인샤프트(200)의외주면에결합되되, 상기회전구동부(300)에의해회전되어상기유체통로(101)를개폐하는블레이드(400);와, 상기블레이드(400)의유체통로밀폐시상기블레이드(400)의상면이밀폐되도록상기상하구동부(110)와연결되어상하로작동되는밀폐부재(500);를포함하는것을특징으로한다. 상기와같은본 발명에의하면, 블레이드와하우징사이에설치된오링의쓸림현상이발생되지않도록블레이드는회전만허용하고, 이렇게회전되는블레이드의상면을상하로작동되는밀폐부재로밀폐하여종래와같이메인샤프트의상하방향회전에따른오링의쓸림현상이전혀없는장점이있다.

22. 发明授权

KR101207847B1 2스텝 모션 게이트밸브 有权
公开(公告)号：KR101207847B1
公开(公告)日：2012-12-04
申请号：KR1020100113585
申请日：2010-11-15
申请人： 프리시스 주식회사
发明人： 김배진 , 최기선 , 김강현 , 이형곤 , 김상민
IPC分类号： F16K3/28 , F16K51/02 , F16K37/00
摘要： 본발명은 2스텝모션게이트밸브에관한것으로서, 본발명에따른 2스텝모션게이트밸브는, 공정챔버및 진공펌프와각각연결되는포트(101, 102)가구비된하우징(100);과, 상기하우징(100)의내벽에형성된분할홈(110);과, 중앙에관통공(210)이형성되며, 상기하우징(100)의내부가상부실린더(103)와하부실린더(104)로분리되도록상기분할홈(110)에결합되는시일플레이트(200);와, 상기상부실린더(103)의내부에설치되어외부로부터공급되는에어에의해승하강되는제1피스톤(310):과, 이제1피스톤(310)에설치되는제1샤프트(320):가포함되는제1액츄에이터(300);와, 상기하부실린더(104)의내부에설치되어외부로부터공급되는에어에의해상기제1피스톤(310)과는별개또는동시에승하강되는제2피스톤(410):과, 이제2피스톤(410)에설치되며, 상기제1샤프트(320)의하부와결합되되, 상기제1샤프트(320)의하부가이탈되는것이방지되도록형성되는제2샤프트(420);가포함되는제2액츄에이터(400); 및상기제2샤프트(420)의하단에결합되어상기포트(101, 102)들중 어느하나를개폐하는개폐부재(500);를포함하는것을특징으로한다. 이상상술한바와같은본 발명에의하면, 하우징의내부에포트를일부개방하는상부실린더와전부개방하는하부실린더가구비되어포트의개방정도를선택적으로구동할수 있어포트의급격한개방에따른와류를방지할수 있는장점이있다.

23. 发明公开

KR1020120052113A 진공 밸브 有权
标题翻译：真空阀
公开(公告)号：KR1020120052113A
公开(公告)日：2012-05-23
申请号：KR1020100113587
申请日：2010-11-15
申请人： 프리시스 주식회사
发明人： 김배진 , 최기선 , 김강현 , 이형곤 , 김상민
IPC分类号： F16K51/02 , F16K37/00
摘要： PURPOSE: A vacuum valve is provided to prevent contamination of process gas due to reaction product of lubricant like the process gas and grease by fundamentally secluding contact of the lubricant like the process gas and the grease. CONSTITUTION: A vacuum valve(100) comprises a body(110), a sealing plate(120), a valve shaft, and a valve blade(140). An inlet part(111), an outlet part(112), a space part(113), and a through-hole(114) are formed in the body. The sealing plate is installed in the space part and a valve shaft hole(121) is formed in the center of the sealing plate. The valve shaft is inserted in the valve shaft hole and is operated upward/downward by a valve operating unit(150). The valve blade is coupled at the bottom of the valve shaft. An opening vacuum sealing(143) is installed at the top of the valve blade. An closing vacuum sealing(142) for closing the inlet part is installed at the bottom of the valve blade.
摘要翻译：目的：提供真空阀，以防止润滑剂反应产物（如工艺气体和润滑脂）由于润滑剂与工艺气体和润滑脂的根本性接触而被污染。构成：真空阀（100）包括主体（110），密封板（120），阀轴和阀叶片（140）。在本体中形成入口部分（111），出口部分（112），空间部分（113）和通孔（114）。密封板安装在空间部分中，并且在密封板的中心形成有阀轴孔（121）。阀轴插入阀轴孔中，并通过阀操作单元（150）向上/向下操作。阀叶片联接在阀轴的底部。在阀叶片的顶部安装开口真空密封件（143）。用于关闭入口部分的闭合真空密封件（142）安装在阀叶片的底部。

24. 发明公开

KR1020120052111A 2스텝 모션 게이트밸브 有权
标题翻译：省略
公开(公告)号：KR1020120052111A
公开(公告)日：2012-05-23
申请号：KR1020100113585
申请日：2010-11-15
申请人： 프리시스 주식회사
发明人： 김배진 , 최기선 , 김강현 , 이형곤 , 김상민
IPC分类号： F16K3/28 , F16K51/02 , F16K37/00
摘要： PURPOSE: A two step motion gate valve is provided to minutely adjust exhaust amount from a processing chamber to a vacuum chamber in partial opening by installing an adjusting member to a housing to adjust the top dead center of a first piston which is driven upward and downward inside an upper cylinder. CONSTITUTION: A two step motion gate valve comprises a housing(100), a partition groove(110), a seal plate(200), a first actuator(300), a second actuator(400), and an opening/closing member(500). The housing comprises ports(101) for respectively connecting with a processing chamber and a vacuum chamber. The partition groove is formed in an inner wall of the housing. A through-hole is formed in the center of the seal plate. The first actuator comprises a first piston(310) and a first shaft(320). The second actuator comprises a second piston(410) and a second shaft(420). The opening/closing member is coupled to the lower end of the second shaft to open and close one of the ports.
摘要翻译：目的：提供两级运动闸阀，通过将调节构件安装到壳体上以调节上下驱动的第一活塞的上止点，从而将处理室中的排气量部分地调节到真空室中在上部气缸内。构成：两步运动闸阀包括壳体（100），分隔槽（110），密封板（200），第一致动器（300），第二致动器（400）和开/关构件 500）。壳体包括用于分别与处理室和真空室连接的端口（101）。分隔槽形成在壳体的内壁中。在密封板的中心形成有通孔。第一致动器包括第一活塞（310）和第一轴（320）。第二致动器包括第二活塞（410）和第二轴（420）。打开/关闭构件联接到第二轴的下端以打开和关闭其中一个端口。

25. 发明公开

KR1020120003080A 나비밸브 개폐장치 有权
标题翻译：蝶阀
公开(公告)号：KR1020120003080A
公开(公告)日：2012-01-10
申请号：KR1020100063732
申请日：2010-07-02
申请人： 프리시스 주식회사
发明人： 김배진 , 최기선 , 김강현 , 김상민 , 이형곤
IPC分类号： F16K1/22 , F16K51/02
摘要： PURPOSE: An opening and closing device of a butterfly valve is provided to prevent the sweeping of an O-ring when a main shaft is vertically rotated by sealing the top surface of a blade using a sealing member. CONSTITUTION: An opening and closing device of a butterfly valve comprises a housing(100), a main shaft, a rotating unit(300), a blade(400), and a sealing member(500). The housing comprises a fluid passage(101) and vertically moving units(110). The main shaft is formed from one side to the other side of the housing. The rotating unit rotates the main shaft. The blade is coupled to the outer surface of the main shaft and opens and closes the fluid passage. The sealing member is connected to the vertically moving unit and is vertically moved. When the fluid passage is closed, the sealing member seals the top of the blade.
摘要翻译：目的：提供一种蝶阀的打开和关闭装置，用于通过使用密封件密封叶片的顶表面来防止主轴垂直旋转时O形环的清扫。构成：蝶阀的打开和关闭装置包括壳体（100），主轴，旋转单元（300），叶片（400）和密封构件（500）。壳体包括流体通道（101）和垂直移动单元（110）。主轴由壳体的一侧到另一侧形成。旋转单元旋转主轴。叶片联接到主轴的外表面并打开和关闭流体通道。密封构件连接到垂直移动单元并且垂直移动。当流体通道关闭时，密封构件密封叶片的顶部。

26. 发明公开

KR1020100085880A 나비밸브 개폐장치 无效
标题翻译：蝶阀
公开(公告)号：KR1020100085880A
公开(公告)日：2010-07-29
申请号：KR1020100005451
申请日：2010-01-21
申请人： 프리시스 주식회사
发明人： 김배진 , 최기선
IPC分类号： F16K31/528 , F16K31/52 , F16K31/16 , F16K1/22
摘要： PURPOSE: A fly valve opening/closing device is provided to prevent the contact stress and abrasion of O-ring by forming a guide groove. CONSTITUTION: A fly valve opening/closing device comprises an actuator(100), a piston(200), a guide unit(300), a main shaft(400), a blade(500) and a housing(600). The actuator is sealed by a guide cover and a lower cover and forms a drive chamber in the inside. The piston forwards and reverses with the actuator. The guide unit comprises the guide groove spirally formed according to the longitudinal direction. The main shaft comprises a first guide protrusion and a coupling block. The main shaft rotates or moves up and down according to the forward and backward of the piston. The housing is combined in one side of the actuator.
摘要翻译：目的：提供一个飞阀开闭装置，通过形成导向槽来防止O形圈的接触应力和磨损。构成：飞阀打开/关闭装置包括致动器（100），活塞（200），引导单元（300），主轴（400），叶片（500）和壳体（600）。致动器由导向盖和下盖密封，并在内部形成驱动室。活塞向前并与执行机构反向。引导单元包括根据纵向方向螺旋地形成的引导槽。主轴包括第一引导突起和联接块。主轴根据活塞的前后方向旋转或上下移动。壳体在致动器的一侧组合。

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