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    • 21. 发明公开
    • 대면적 포토마스크
    • 灰色面膜
    • KR1020120081660A
    • 2012-07-20
    • KR1020100130412
    • 2010-12-20
    • 엘지이노텍 주식회사
    • 구찬규이용인강현욱신준식
    • G03F1/38H01L21/027
    • H01L21/0274G03F1/38G03F7/2063H01L21/0337
    • PURPOSE: A photo-mask is provided to overcome the critical dimension deviation of a large pattern and a small pattern on a large sized photo-mask by balancing the exposure dose to the pattern. CONSTITUTION: A photo-mask includes at least one light shielding pattern(20), a first transmitting part, a second transmitting part, and at least one compensating pattern. The light shielding pattern is formed on a transparent substrate(10). The first transmitting part is formed between light shielding patterns. The width of the second transmitting part is relatively narrower than the width of the first transmitting part. The compensating part is applied to the first transmitting part. The line width of the compensating pattern is in a range between 0.5 and 5um. The compensating pattern is based on Cr, Ni, Ti, Al, Ta, and a material obtained by combining O, N, CO_x, NO_x with one selected from Cr, Ni, Ti, Al, and Ta.
    • 目的:通过平衡曝光剂量与图案相比,提供了一种照片掩模,以克服大尺寸照相掩模上的大图案和小图案的临界尺寸偏差。 构成:光掩模包括至少一个遮光图案(20),第一透射部分,第二透射部分和至少一个补偿图案。 遮光图案形成在透明基板(10)上。 第一透光部分形成在遮光图案之间。 第二发送部的宽度比第一发送部的宽度窄。 补偿部件被应用于第一发送部件。 补偿图案的线宽在0.5和5μm之间的范围内。 补偿图案基于Cr,Ni,Ti,Al,Ta以及通过将O,N,CO_x,NO_x与选自Cr,Ni,Ti,Al和Ta中的一种组合而获得的材料。
    • 23. 发明公开
    • 펠리클이 부착된 마스크 및 펠리클과 마스크의 부착 방법
    • 一个掩蔽连接的细节和连接到屏幕的方法
    • KR1020100132582A
    • 2010-12-20
    • KR1020090051248
    • 2009-06-10
    • 엘지이노텍 주식회사
    • 강현욱박재우
    • H01L21/027
    • G03F1/62G03F1/142G03F7/70983
    • PURPOSE: A mask attached with pellicle and a method of attaching the pellicle to the mask are provided to attach a pellicle frame and a mask without detaching by controlling the shape of the adhesive using a support guide before spreading the adhesive on a pellicle frame. CONSTITUTION: A pellicle film(122) is formed in the form of a thin film so that the light be transmitted. A pellicle frame(120) supports the pellicle layer. The pellicle frame is attached by a mask(100) and the adhesive(110). A support guide(120) is used in order to improve the adhesive force between the mask and the pellicle frame.
    • 目的:提供与防护薄膜组件相连接的面罩和将防护薄膜组件附着到面罩上的方法,以在将粘合剂铺展在防护薄膜组件框架上之前通过使用支撑引导件控制粘合剂的形状来附接防护薄膜组件框架和面罩。 构成:防护薄膜(122)以薄膜的形式形成,使得光被透射。 防护薄膜组件框架(120)支撑防护薄膜组件。 防护薄膜组件框架通过掩模(100)和粘合剂(110)附接。 使用支撑引导件(120)以改善掩模和防护薄膜组件框架之间的粘合力。
    • 26. 发明授权
    • 인쇄판 및 그 제조방법
    • 印版及其制造方法
    • KR101279470B1
    • 2013-06-27
    • KR1020100069851
    • 2010-07-20
    • 엘지이노텍 주식회사
    • 홍범선강현욱신준식구찬규이용인
    • G03F7/20B41C1/00
    • 본 발명에 따른 인쇄판의 제조공정은 기판상에 제1감광성수지를 도포하고 노광하여 제1패턴의 하부패턴을 형성하는 단계와 상기 제1감광성수지상에 제2감광성수지를 도포하고 노광하여 상기 제1패턴의 상부패턴 및 제2패턴을 형성하는 단계, 그리고 상기 제1 및 제2감광성 수지를 동시에 현상하여 상기 제1및 제2패턴을 형성하는 단계를 포함하여 이루어지는 것을 특징으로 한다.
      본 발명에 따르면, 감광성수지의 패터닝공정을 통해 인쇄패턴을 형성하여 미세패턴을 효율적으로 구현이 가능하며, 공정수를 단축할 수 있어 제조비용을 절감할 수 있는 장점이 구현되며, 나아가 패턴의 선폭에 따라 깊이의 비의 조절이 용이하며 깊이에 대한 균일도를 높일 수 있으며, 이에 따라 미세패턴영역에서 인쇄판의 무너지는 현상을 제거할 수 있어 내구성이 향상되는 인쇄판을 제공하는 효과가 있다.
    • 根据本发明通过首先施加光敏树脂,并通过对所述第一光敏树脂涂覆第二感光性树脂,并形成所述第一图案的所述第一的基板上的下部图案和曝光曝光的印刷版的制造过程 形成图案的上图案和第二图案,并同时显影第一和第二光敏树脂以形成第一和第二图案。
    • 28. 发明公开
    • 액정표시장치용 고정밀 인쇄판 및 그의 제조 방법
    • 液晶显示器的高定义印刷版及其制造方法
    • KR1020120072736A
    • 2012-07-04
    • KR1020100134616
    • 2010-12-24
    • 엘지이노텍 주식회사
    • 신준식구찬규홍범선이용인강현욱
    • G02F1/1333G02F1/13G03F7/004
    • G02F1/133305G02F1/13G02F1/1303G02F1/1333G03F7/004G03F7/0042G03F7/0045
    • PURPOSE: A highly precise printing board for a liquid crystal display device and a manufacturing method thereof are provided to form a micro pattern, drastically increase pattern resolution, and drastically enhance transfer features. CONSTITUTION: A contact layer(310) is formed on an insulating material(300). An underlying layer(320) is formed on the contact layer. A first metal pattern layer(331) is formed on the underlying layer. A photoresist film is formed on the first metal pattern layer. A first PR pattern layer is formed. The first PR pattern layer is eliminated after the first metal pattern layer is etched. A second metal pattern layer(360) is formed on the first metal pattern layer after the second PR pattern layer is formed. A final printing board pattern is formed by eliminating the second PR pattern layer.
    • 目的:提供用于液晶显示装置的高精度印刷板及其制造方法,以形成微图案,大大提高图案分辨率,并显着增强转印特征。 构成:在绝缘材料(300)上形成接触层(310)。 在接触层上形成下层(320)。 第一金属图案层(331)形成在下层上。 在第一金属图案层上形成光致抗蚀剂膜。 形成第一PR图形层。 在蚀刻第一金属图案层之后,消除第一PR图案层。 在形成第二PR图案层之后,在第一金属图案层上形成第二金属图案层(360)。 通过消除第二PR图案层来形成最终印刷板图案。
    • 30. 发明公开
    • 인쇄판 및 그 제조방법
    • 一种用于印刷墨水的方法及其制造方法
    • KR1020120007759A
    • 2012-01-25
    • KR1020100068450
    • 2010-07-15
    • 엘지이노텍 주식회사
    • 강현욱구찬규홍범선신준식이용인
    • H05K3/12H05K1/02
    • PURPOSE: A printing plate and a manufacturing method thereof are provided to reduce manufacturing costs by performing fine pattern formation on the printing plate which prints various patterns and circuits of electronic components with an indirect printing method. CONSTITUTION: A photosensitive resin layer(121,131) is laminated on a substrate(110). Two or more photosensitive resin layers are laminated as the photosensitive resin layer. A printed pattern is formed by patterning the photosensitive resin layer. The printed pattern is arranged with a plurality of patterns with different depths and widths from each other. The printed pattern includes a second pattern(133) which is a minimum pattern and a first pattern(123) which is a reference pattern.
    • 目的:提供一种印版及其制造方法,通过在印刷版上进行精细图案形成来降低制造成本,印刷版利用间接印刷法打印电子部件的各种图形和电路。 构成:将感光性树脂层(121,131)层叠在基板(110)上。 层叠两层以上的感光性树脂层作为感光性树脂层。 通过图案化感光性树脂层形成印刷图案。 印刷图案被布置有彼此具有不同深度和宽度的多个图案。 印刷图案包括作为最小图案的第二图案(133)和作为参考图案的第一图案(123)。