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    • 21. 发明公开
    • 반도체 소자의 알루미늄 배선 형성방법
    • 形成用于限制相邻铝线之间的桥的半导体器件的线的方法
    • KR1020050015807A
    • 2005-02-21
    • KR1020030054774
    • 2003-08-07
    • 삼성전자주식회사
    • 서정훈박영욱한재종최길현한성호이종명
    • H01L21/28
    • PURPOSE: A method of forming Al line of semiconductor device is provided to restrict a bridge between adjacent aluminum lines by preventing degradation of morphology characteristics due to the grooving on a PVD aluminum layer though exposing an aluminum seed layer formed on a target substrate. CONSTITUTION: An interlayer dielectric is formed on a semiconductor substrate having a conductive pattern. A contact hole is formed by patterning the interlayer dielectric. A barrier metal layer is formed on the interlayer dielectric and the conductive pattern along a step of a resultant structure. An aluminum seed layer is formed by using a CVD method on the barrier metal layer(S23). The aluminum seed layer is cleaned. An aluminum layer is formed on the aluminum seed layer by using a PVD method(S25). A reflow process for the PVD aluminum layer is performed(S26).
    • 目的:提供一种形成半导体器件的Al线的方法,以通过暴露形成在目标衬底上的铝晶种层来防止PVD铝层上的开槽导致的形态特征的劣化来限制相邻铝线之间的桥。 构成:在具有导电图案的半导体衬底上形成层间电介质。 通过图案化层间电介质形成接触孔。 沿着所得到的结构的步骤,在层间电介质和导电图案上形成阻挡金属层。 通过在阻挡金属层上使用CVD法形成铝籽晶层(S23)。 铝种子层被清洁。 通过使用PVD法在铝籽晶层上形成铝层(S25)。 对PVD铝层进行回流处理(S26)。
    • 22. 发明公开
    • 공기조화기
    • 冷气机
    • KR1020040024678A
    • 2004-03-22
    • KR1020020056090
    • 2002-09-16
    • 삼성전자주식회사
    • 서정훈
    • F24F1/46
    • PURPOSE: An air conditioner is provided to allow various color and design for a cabinet by placing an outlet opening and closing unit for opening and closing a cleaned air outlet as a separate member on a front side of the cabinet. CONSTITUTION: A heat exchanger(26) and a chilled air generating fan(25) are installed on an upper part and a lower part of a cabinet, respectively. An air suction port(21a) and a chilled air outlet(22a) are placed on the lower part and the upper part of the cabinet, respectively. An air cleaner(30) is installed between the air suction port and the chilled air outlet on a front inside of the cabinet so as not to generate flowing resistance of air flowing in an air inlet(33), the heat exchanger, the chilled air generating fan and the chilled air outlet. An upper end of the heat exchanger is placed on a rear side of an upper end of the cabinet, and a lower end of the heat exchanger is put on a drainage tray(26a) placed on an upper part of the air cleaner so as to allow air to pass all over a surface of the heat exchanger. The air inlet is formed on the air cleaner to be connected with the air suction port. An outlet opening and closing unit(40) is installed on an upper part of the air cleaner to face the front side of the cabinet, and has a cleaned air outlet(34) formed thereon.
    • 目的:提供一种空调,用于通过放置一个出口打开和关闭单元,用于打开和关闭清洁的空气出口作为机柜前侧上的单独构件,从而为柜子提供各种颜色和设计。 构成:机壳的上部和下部分别安装有热交换器(26)和冷冻空气发生风扇(25)。 分别在机壳的下部和上部设置有空气吸入口(21a)和冷气出口(22a)。 空气滤清器(30)安装在机壳前部的空气吸入口与冷气出口之间,不会产生流入空气入口(33),热交换器,冷冻空气 产生风扇和冷气出口。 热交换器的上端设置在机柜的上端的后侧,并且热交换器的下端被放置在放置在空气净化器的上部的排水盘(26a)上,以便 允许空气通过热交换器的整个表面。 进气口形成在空气净化器上,与空气吸入口连接。 出口开闭单元(40)安装在空气净化器的上部面对机柜的前侧,并具有形成在其上的清洁空气出口(34)。
    • 23. 发明公开
    • 공기조화기
    • 冷气机
    • KR1020040024677A
    • 2004-03-22
    • KR1020020056089
    • 2002-09-16
    • 삼성전자주식회사
    • 서정훈
    • F24F1/00
    • PURPOSE: An air conditioner is provided to clean indoor air without operating a chilled air generating fan by installing an air cleaning fan in an air cleaner. CONSTITUTION: An air suction port(21a) and a chilled air outlet(22a) are formed on a lower part and an upper part of a cabinet to introduce indoor air and discharge chilled air, respectively. An air cleaner(30) is installed between the air suction port and the chilled air outlet to clean indoor air. An air inlet(33) is formed on a lower part of the air cleaner to be connected with the air suction port, and a cleaned air outlet(34) is formed on an upper part of the air cleaner to face a front side of the cabinet so that an air cleaning channel is formed to clean air by the air inlet and the cleaned air outlet separately from a chilled air channel connected with the air suction port and the chilled air outlet. An air cleaning fan(32) and an air cleaning unit(31) are installed in the air cleaner to introduce air into the air cleaner through the air inlet and discharge, and to clean air introduced by the air cleaning fan, respectively, so that indoor air is independently introduced, cleaned and discharged into a room by the air cleaning fan and the air cleaning unit.
    • 目的:在空气净化器中安装空气净化风扇,提供空调来清洁室内空气,而无需操作冷气发生风扇。 构成:在机柜的下部和上部分别形成有吸气口(21a)和冷气出口(22a),以分别引入室内空气和排出冷冻空气。 空气滤清器(30)安装在吸气口和冷气出口之间,以清洁室内空气。 在空气滤清器的下部形成有与空气吸入口连接的空气入口(33),并且在空气净化器的上部形成有清洁空气出口(34) 由此形成空气净化通道,以与从空气吸入口和冷气出口连接的冷冻空气通道分开地通过空气入口和净化空气出口清洁空气。 空气净化风扇(32)和空气净化单元(31)安装在空气净化器中,通过进气和排放将空气引入空气净化器,并分别清洁由空气净化扇引入的空气,使得 独立地引入室内空气,通过空气净化风扇和空气净化单元清洁并排出到室内。
    • 24. 发明公开
    • CVD 알루미늄막 형성용 소스
    • CVD铝的形成原理
    • KR1020040001018A
    • 2004-01-07
    • KR1020020036074
    • 2002-06-26
    • 삼성전자주식회사
    • 윤주영최길현김병희박성건서정훈
    • H01L21/205
    • PURPOSE: A source for forming CVD(Chemical Vapor Deposition) aluminium layer is provided to increase deposition rate of the aluminium layer by increasing vapor pressure of MPA(Methyl-Pyrroridine-Alane) source. CONSTITUTION: A CVD aluminium formation source comprises an MPA and an additive of chemical material including unshared electron pair such as nitrogen or phosphorous. The additive is tribenzyl-phosphine, tricyclohexyl-phosphine, diphenyl-isopropyl-phosphine, methyl-diphenyl-phosphine, ethyl-diphenyl-phosphine, propyl-diphenyl-phosphine,diphenyl-cyclohexyl-phoshpine, phenyl-dicyclohexyl-phosphine, tris-diethyl-amido-phosphine, tribenzyl phosphine, tri-(t-butyl)-phosphine, or tri-(i-butyl)-phosphine.
    • 目的:提供用于形成CVD(化学气相沉积)铝层的源,以通过增加MPA(甲基 - 吡咯烷 - 丙烷)源的蒸气压来提高铝层的沉积速率。 构成:CVD铝形成源包括MPA和包括非共享电子对(如氮或磷)的化学材料的添加剂。 添加剂是三苄基膦,三环己基膦,二苯基 - 异丙基膦,甲基 - 二苯基膦,乙基 - 二苯基膦,丙基 - 二苯基膦,二苯基 - 环己基 - 膦酸,苯基 - 二环己基膦,三 酰胺,三苄基膦,三(叔丁基)膦,或三(异丁基)膦。
    • 25. 发明公开
    • 천정형 에어컨의 벨 마우스장치
    • 天花板空调系统
    • KR1020010011436A
    • 2001-02-15
    • KR1019990030813
    • 1999-07-28
    • 삼성전자주식회사
    • 장경석문제명서정훈
    • F24F13/00
    • F24F7/007F04D25/088F04D29/4213F24F1/0007F24F1/0029F24F2001/0037
    • PURPOSE: A bell mouth of ceiling air conditioner is provided to allow the bell mouth to be commonly used regardless of the capacity of product while correctly compensating the distance between the bell mouth and the fan by simplifying the structure of the bell mouth. CONSTITUTION: A bell mouth unit(70) includes a first bell mouth(100) which maintains a predetermined spacing from a fan of an air conditioner, and a second bell mouth(110) which is coupled to the first bell mouth and installed to be adjacent to the fan, so as to compensate the distance between the fan and the first bell mouth when the height of product increases due to the large capacity of the product. The first bell mouth has a plurality of bosses(103) protruded from the outer periphery of the first bell mouth and which permit the second bell mouth to be coupled to the first bell mouth by a plurality of coupling members(120). The second bell mouth is provided with a flange(113) arranged integrally with the second bell mouth. The flange has a plurality of coupling holes(114) to be coupled with bosses of the first bell mouth, with a plurality of coupling members penetrating coupling holes of the flange.
    • 目的:提供天花板空调的喇叭口,无论产品容量如何,都可以通用喇叭口,同时通过简化喇叭口的结构,正确补偿喇叭口与风扇之间的距离。 构成:喇叭单元(70)包括与空调器的风扇保持预定间隔的第一喇叭口(100)和耦合到第一喇叭口的第二喇叭口(110),并安装成 与风扇相邻,以便由于产品的大容量而使产品的高度增加时,补偿风扇与第一钟形口之间的距离。 第一喇叭口具有从第一喇叭口的外周突出的多个凸起(103),并且允许第二喇叭口通过多个联接构件(120)联接到第一喇叭口。 第二喇叭口设置有与第二喇叭口一体设置的凸缘(113)。 凸缘具有多个与第一喇叭口的凸起部联接的联接孔(114),多个联接构件穿过凸缘的联接孔。
    • 26. 发明公开
    • 공기조화기용세라믹히터의난방능력가변장치
    • 改变空调器陶瓷加热器加热能力的装置
    • KR1020000032974A
    • 2000-06-15
    • KR1019980049612
    • 1998-11-18
    • 삼성전자주식회사
    • 장명학서정훈김재훈이기호
    • F24F1/00F24F13/00F24F3/16
    • PURPOSE: An apparatus is provided to change heating capacity of a ceramic heater as well as to show high heating capacity by combining plural ceramic heaters to an air conditioner. CONSTITUTION: Fifteen ceramic heaters(70) are arranged on a left heater assay(200), and the other fifteen ceramic heaters are arranged on a right heater assay(300) by two steps. Electric power is fed to each ceramic heater, and the ceramic heaters are tied into three to constitute a connecting line of a three-phase Y form. External power is fed to the thirty ceramic heaters to generate heat from a PTC(positive temperature coefficient) resistance. Air is heated by the ceramic heaters through the rotational force of a ventilating fan to show the heating capacity of 50KW. However, the PTC resistance shows the heating capacity of 24KW if nine ceramic heaters are arranged by two steps on the left heater assay and six ceramic heaters on the right heater assay by a single step.
    • 目的:提供一种通过将多个陶瓷加热器组合到空调器来改变陶瓷加热器的加热能力以及显示高加热能力的装置。 构成:在左加热器测定(200)上布置了十五个陶瓷加热器(70),另外十五个陶瓷加热器通过两个步骤排列在右侧加热器测定(300)上。 将电力馈送到每个陶瓷加热器,并将陶瓷加热器连接成三个以构成三相Y形式的连接线。 外部功率被馈送到三十个陶瓷加热器以从PTC(正温度系数)电阻产生热量。 空气由陶瓷加热器通过通风扇的旋转力加热,显示出50KW的加热能力。 然而,如果九个陶瓷加热器在左侧加热器测定中通过两个步骤排列,六个陶瓷加热器通过单步进行右侧加热器测试,PTC电阻显示出24KW的加热能力。