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    • 5. 发明公开
    • 태양전지용 유리 기판의 제조 방법 및 스퍼터링 장치
    • 制造太阳能电池和溅射器的玻璃基板的方法
    • KR1020130048938A
    • 2013-05-13
    • KR1020110113873
    • 2011-11-03
    • 성균관대학교산학협력단
    • 이준신박형식신종훈박진주백승신장주연정준희김민범
    • H01L31/04H01L31/18
    • H01L31/02366H01L31/0392Y02E10/50
    • PURPOSE: A method for manufacturing a glass substrate for a solar cell and a sputtering apparatus are provided to improve the photoelectric conversion efficiency of a solar cell including a transparent conduction layer by controlling the angle of a target. CONSTITUTION: A target is mounted on a target support part positioned in a chamber(S110). A substrate is mounted on a susceptor positioned in the chamber(S130). A target angle between the target and the substrate is controlled(S150). A target material is deposited on the substrate to form a metal oxide layer having a texture(S170). [Reference numerals] (AA) Start; (BB) End; (S110) Mount a target; (S130) Mount a substrate on a susceptor; (S150) Control a target angle between the target and the substrate; (S170) Form a metal oxide layer having a texture
    • 目的:提供一种太阳能电池用玻璃基板的制造方法和溅射装置,通过控制靶的角度来提高包含透明导电层的太阳能电池的光电转换效率。 构成:将目标安装在位于腔室中的目标支撑部件上(S110)。 衬底安装在位于腔室中的基座上(S130)。 控制靶与基板之间的目标角度(S150)。 靶材料沉积在衬底上以形成具有纹理的金属氧化物层(S170)。 (附图标记)(AA)开始; (BB)结束; (S110)安装目标; (S130)将基板安装在基座上; (S150)控制目标和基板之间的目标角度; (S170)形成具有纹理的金属氧化物层