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    • 7. 发明公开
    • 유기-무기 하이브리드 박막 증착 장치 및 이를 이용한 유기-무기 하이브리드 박막 제조 방법
    • 用于有机无机混合薄膜的沉积装置及使用其制造有机无机混合薄膜的方法
    • KR1020140112633A
    • 2014-09-24
    • KR1020130026189
    • 2013-03-12
    • 한국화학연구원
    • 임종선안기석이선숙박보근정석종명성김성준
    • C23C16/44C23C14/24C23C16/06
    • The present invention relates to a deposition device for an organic-inorganic hybrid thin film and a method for manufacturing an organic-inorganic hybrid thin film using the same. In the deposition device for an organic-inorganic hybrid thin film, an atomic layer deposition chamber for the deposition of inorganic matters and a thermal deposition chamber for the depositing of organic matters are vertically connected. A gate valve is arranged in a connection path connecting the chambers. An injection port for supplying an inorganic deposition source is arranged in the atomic layer deposition chamber. A unit for heating an organic deposition source is arranged in the thermal deposition chamber. In the formation of a molecular organic-inorganic thin film, the present invention can form the multi-layered physical thin film of the organic and inorganic layers using a thermal deposition method and an atomic layer deposition method and the multi-layered thin film of the organic and inorganic layers through a chemical combination on the interface of the organic and inorganic layers.
    • 本发明涉及一种有机 - 无机混合薄膜的沉积装置及其制造方法。 在有机 - 无机混合薄膜的沉积装置中,垂直连接用于沉积无机物质的原子层沉积室和用于沉积有机物的热沉积室。 闸阀布置在连接腔室的连接路径中。 用于提供无机沉积源的注入口布置在原子层沉积室中。 用于加热有机沉积源的单元布置在热沉积室中。 在分子有机 - 无机薄膜的形成中,本发明可以使用热沉积法和原子层沉积法形成有机和无机层的多层物理薄膜,并且可以形成多层薄膜 有机和无机层通过化学组合在有机和无机层的界面上。