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    • 6. 发明专利
    • MANUFACTURE OF GALLIUM ARSENIDE SERIES SOLAR BATTERY
    • JPS59220980A
    • 1984-12-12
    • JP9769883
    • 1983-05-31
    • SHARP KK
    • SUGAWARA KAZUSHI
    • H01L31/04H01L31/06H01L31/065H01L31/068H01L31/0693H01L31/0735H01L31/18
    • PURPOSE:To improve the conversion efficiency by obtaining a large internal electric field by a method wherein, when a P type or N type GaAs layer is epitaxially grown in liquid phase with Ga fused liquid into the titled solar battery, the fused liquid is doped with two or more kind of P type or N type impurities of a large difference of diffusion coefficients, and a diffused layer of a large gradient of impurity concentration is generated by simultaneous diffusion. CONSTITUTION:An N type GaAs substrate shown by the layer III is doped with Al and As, and the fused liquid doped with Zn and Ge, the P type impurity, is put in contact with the substrate under the condition of high temperature, and thereafter the temperature is decreased. A P type GaAlAs shown by the layer I is grown in such a manner, and at the same time the Zn and Ge in the fused liquid are diffused into the layer III, resulting in the generation of a P type GaAs layer shown by the layer IV. At this time, the Zn easily diffuses to the substrate, while the Ge does not easily diffuse because of a low diffusion rate. Accordingly, the large gradient of concentration caused by the Zn and Ge generates in the layer IV. Thus, the photoelectric conversion efficiency is enhanced by allowing the layer IV to have a large internal electric field.