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    • 7. 发明专利
    • Positive resist composition and resist pattern forming method
    • 积极抵抗组合和阻力图形成方法
    • JP2010210835A
    • 2010-09-24
    • JP2009055745
    • 2009-03-09
    • Tokyo Ohka Kogyo Co Ltd東京応化工業株式会社
    • KUROSAWA TSUYOSHISHIMIZU HIROAKI
    • G03F7/039C08F120/22C08F220/38G03F7/004H01L21/027
    • G03F7/0046G03F7/0397
    • PROBLEM TO BE SOLVED: To provide a positive resist composition capable of forming a resist film having a surface having high hydrophobicity, and to provide a resist pattern forming method by use of the positive resist composition. SOLUTION: The positive resist composition contains a high molecular compound (A1) having a constituent unit (aO) containing "cyclic group including -SO 2 -" at a terminal of side chain and a constituent unit (a1) induced from an acrylic ester including an acid dissociative dissolution inhibition group, an acid generator component (B), and a fluorine containing resin component having a group containing the acid dissociative dissolution inhibition group which may have fluorine atoms and a constituent unit (f1) including at least one fluorine atom. COPYRIGHT: (C)2010,JPO&INPIT
    • 解决的问题:提供能够形成具有高疏水性表面的抗蚀剂膜的正性抗蚀剂组合物,并且通过使用正性抗蚀剂组合物提供抗蚀剂图案形成方法。 解决方案:正性抗蚀剂组合物含有在侧链末端含有“包含-SO 2 SB 2的环状基团”的构成单元(aO)的高分子化合物(A1) 由包含酸解离抑制基团的丙烯酸酯,酸产生剂组分(B)和含有可以具有氟原子的酸解离抑制基团的基团的含氟树脂组分诱导的单元(a1)和构成单元 (f1),包含至少一个氟原子。 版权所有(C)2010,JPO&INPIT
    • 8. 发明专利
    • Fluorine-containing polymeric compound, positive resist composition for use in liquid immersion exposure and method for forming resist pattern
    • 含氟聚合物,用于液体浸渍曝光的正极性组合物和形成耐蚀图案的方法
    • JP2008274143A
    • 2008-11-13
    • JP2007120320
    • 2007-04-27
    • Tokyo Ohka Kogyo Co Ltd東京応化工業株式会社
    • IRIE MAKIKO
    • C08F120/22G03F7/004G03F7/039H01L21/027
    • G03F7/2041C08F220/22C08F220/26G03F7/0046G03F7/0392G03F7/0397
    • PROBLEM TO BE SOLVED: To provide a fluorine-containing polymeric compound suitable for a positive resist composition which is hydrophobic and becomes hydrophilic after exposure and heating, and thus, is suitable for use in liquid immersion exposure, and has good lithographic property, as well as to provide the resist composition including the fluorine-containing polymeric compound, and a method for forming a resist pattern. SOLUTION: This fluorine-containing polymeric compound is prepared by polymerizing ethyl(meth)acrylate only, in which an R 2 O group is substituted on the first position of an ethyl alcohol residue and R 2 is an aliphatic hydrocarbon group substituted by a fluorine atom, or a group in which a plurality of the aliphatic hydrocarbon groups which may be substituted by the fluorine atom are bound via a linking group having a heteroatom. As for R 2 , when a plurality of the aliphatic hydrocarbon groups which may be substituted by the fluorine atom are bound via the linking group having the heteroatom, at least one of the aliphatic hydrocarbon groups which may be substituted by the fluorine atom is an aliphatic hydrocarbon group substituted by the fluorine atom. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供一种适用于在曝光和加热之后是疏水性并变得亲水的正性抗蚀剂组合物的含氟聚合物,因此适用于浸液曝光,并具有良好的平版印刷性能 以及提供包含含氟聚合物的抗蚀剂组合物和形成抗蚀剂图案的方法。 解决方案:该含氟聚合物通过仅在乙醇残基的第一位置上聚合(甲基)丙烯酸乙酯,其中R 2 SP 2 O基团被取代, SP> 2 是被氟原子取代的脂肪族烃基,或者可以被氟原子取代的多个脂肪族烃基经由具有杂原子的连接基团结合的基团。 对于R 2 ,当可以被氟原子取代的多个脂族烃基通过具有杂原子的连接基团连接时,可以被取代的至少一个脂族烃基 氟原子是被氟原子取代的脂肪族烃基。 版权所有(C)2009,JPO&INPIT