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    • 2. 发明专利
    • Memory device having nanocrystal, and its manufacturing method
    • 具有纳米晶体的存储器件及其制造方法
    • JP2007235141A
    • 2007-09-13
    • JP2007050617
    • 2007-02-28
    • Samsung Electronics Co Ltd三星電子株式会社Samsung Electronics Co.,Ltd.
    • SETSU KOSHUSAI SEISAICHOI JAI-YOUNGMIN YO-SEPCHO GINSHUYI DONG KEE
    • H01L27/10H01L21/316H01L21/8247H01L27/115H01L27/28H01L29/06H01L29/788H01L29/792H01L51/05
    • H01L29/42332B82Y10/00H01L21/28273H01L29/51H01L29/513H01L29/7881Y10S977/721Y10S977/785Y10S977/943
    • PROBLEM TO BE SOLVED: To provide a memory device having nanocrystals, and to provide its manufacturing method. SOLUTION: The memory device comprises: a substrate; a source region and a drain region formed inside the substrate and located separately from each other; a memory cell formed on the substrate surface, connecting the source region and the drain region and having a plurality of nanocrystals, and a control gate formed on the memory cell, wherein the memory cell is equipped with a first tunneling oxide layer formed on the substrate; a second tunneling oxide layer formed on the first tunneling oxide layer; and a control oxide layer formed on the second tunneling oxide layer and having the plurality of nanocrystals. Thereby and by providing the second tunneling oxide layer having hydrophilicity which can incorporate an aminosilane group to impart an electrostatic attractive force, a monolayer arrangement of the nanocrystals becomes possible, control of device characteristics becomes possible, and the memory device exhibiting more improved device characteristics can be provided. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种具有纳米晶体的存储器件,并提供其制造方法。 存储器件包括:衬底; 源极区域和漏极区域,其形成在所述衬底内并且彼此分离定位; 存储单元,其形成在所述基板表面上,连接所述源极区域和所述漏极区域并具有多个纳米晶体;以及控制栅极,形成在所述存储单元上,其中,所述存储单元配备有形成在所述基板上的第一隧穿氧化物层 ; 形成在第一隧道氧化物层上的第二隧穿氧化物层; 以及形成在第二隧道氧化物层上并具有多个纳米晶体的控制氧化物层。 由此,通过提供具有亲水性的第二隧道氧化物层,其可以结合氨基硅烷基团以赋予静电吸引力,纳米晶体的单层布置成为可能,器件特性的控制变得可能,并且显示出更好的器件特性的存储器件可以 提供。 版权所有(C)2007,JPO&INPIT