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    • 4. 发明专利
    • Manufacture of superconducting circuit device
    • 超导电路设备的制造
    • JPS61125093A
    • 1986-06-12
    • JP24463984
    • 1984-11-21
    • Agency Of Ind Science & Technol
    • ISHIDA ICHIRO
    • H01L39/24
    • H01L39/2403
    • PURPOSE:To make it possible to convert a superconductor layer or a normal conductor layer into an insulating film, whose uniformity of thickness is excellent, or to convert the entire layer into an insulating layer, by using the second layer, which has conductivity when the first layer is converted into an insulator and has high resistance property or insulating property when a superconducting circuit is operated, and supplying a current to the first layer. CONSTITUTION:An auxiliary electrode layer 2 is arranged in contact with a substrate 1, which is coated by an insulating layer having electric insulating property. A part of a superconductor layer 3, which is formed on the layer 2, is converted into an insulating film by using, e.g., an anodic oxidation method and the like. At the time of the anodic oxidation, an electrolytic current is supplied to the superconductor layer 3 through the auxiliary electrode layer 2. Therefore, uniformity of the electrolytic current is improved throughout the superconducting circuit device. An insulating layer 4 having no dispersion in film thickness is obtained. A sufficient current is supplied to the thin region of the superconductor layer 3, which is not oxidized, and to the superconductor region, whose all periphery is converted into the oxidized film 4, through the auxiliary electrode layer 2. Then the entire superconductor layer 3 in the required region can be converted into the insulating layer 4.
    • 目的:通过使用具有导电性的第二层,可以将超导体层或普通导体层转换为厚度均匀性优异的绝缘膜,或将整个层转换为绝缘层 第一层被转换为绝缘体,并且当超导电路工作时具有高电阻特性或绝缘性能,并向第一层提供电流。 构成:辅助电极层2与被电绝缘性的绝缘层涂覆的基板1接触地配置。 通过使用例如阳极氧化法等将形成在层2上的超导体层3的一部分转换为绝缘膜。 在阳极氧化时,通过辅助电极层2向超导体层3提供电解电流。因此,在整个超导电路器件中电解电流的均匀性得到改善。 获得没有膜厚分散的绝缘层4。 通过辅助电极层2将足够的电流供给到未被氧化的超导体层3的薄区域以及其全周变为氧化膜4的超导体区域。然后,整个超导体层3 在所需区域可以转换成绝缘层4。