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    • 4. 发明专利
    • Semiconductor device
    • 半导体器件
    • JPS6159862A
    • 1986-03-27
    • JP18197284
    • 1984-08-31
    • Fujitsu Ltd
    • SAKURAI JUNJIMUKAI RYOICHIIZAWA TETSUO
    • H01L25/18H01L25/065H01L25/07
    • H01L25/0657H01L24/63H01L2224/32145H01L2224/48091H01L2224/48227H01L2225/06527H01L2225/06551H01L2225/06555H01L2225/06575H01L2225/06582H01L2924/16195H01L2924/00014
    • PURPOSE:To improve the integration by laminating a plurality of chips formed with wirings having peripheral end at the outer periphery, contacting the side walls of the chips with the inner surface of a package when containing the laminated chips in the package, and forming wirings contacted with the wirings of the chips in the package. CONSTITUTION:Wirings 4 made of metal layer are formed by connecting electrodes and wirings 2 on chips 1 to extend to the side walls 3 of the chips 1. Then, the chips 1 and insulating plates 5 are alternately laminated and bonded. A package 9 which has wirings 7 of a buried metal layer having an exposure 6 at the position corresponding to the wirings 4 and a cavity 8 is formed. The package 9 is heated to expand the length of one side of the cavity 8, the laminate is inserted into the cavity 8, the wirings 4 are contacted with the exposure 6 of the wirings 7, and the package 9 is gradually cooled. Thus, a semiconductor device of chip-on-chip structure which can sufficiently perform its functions with high integration can be manufactured.
    • 目的:为了通过在外周层叠形成有具有外周端的布线的多个芯片来改进整合,当将封装中的层叠芯片收纳时,将芯片的侧壁与封装的内表面接触,并且形成接触的布线 包装中的芯片布线。 构成:通过将芯片1上的电极和布线2连接到芯片1的侧壁3而形成由金属层制成的布线4。然后,芯片1和绝缘板5交替层压并结合。 形成具有在与布线4对应的位置处具有曝光6的掩埋金属层的配线7和空腔8的封装9。 包装9被加热以扩大空腔8的一侧的长度,将层压体插入空腔8中,布线4与布线7的曝光6接触,并且包装9逐渐冷却。 因此,可以制造能够充分发挥其高集成度功能的芯片上芯片结构的半导体器件。