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    • 4. 发明专利
    • Inspecting device for conductive film
    • 检查导电装置
    • JPS61120960A
    • 1986-06-09
    • JP24252084
    • 1984-11-19
    • Teijin Ltd
    • YAMAUCHI TETSUOSHINGUU AKIRA
    • G01R27/02G01N27/02G01N27/72
    • G01N27/023
    • PURPOSE:To achieve a higher measuring accuracy, by moving a conductive film intermittently at a specified pitch to measure the area resistance thereof at stationary state with an eddy current detector and a data processing means of processing output signal of the detector. CONSTITUTION:A conductive film 3 wound on an unwinding roll 5 is transferred intermittently at a specified pitch with a winding motor 7 for driving a winding roll 6 being supported with a transfer roll 4 and wound with a winding roll 6. As the eddy current of the conductive film 3 is almost proportional to the area resistance, the area resistance can be learned from the output of the eddy current detector 1. The conductive film 3 may have a conductive thin film either the upper or lower surface of the film on the substrate. The smaller the distance between the eddy current detector 1 and the conductive film 3, the higher the measuring accuracy. The output signal of the eddy current detector 1 is switched sequentially with a multiplexer, output signal of which is amplified and computed with a data processing section and the area resistance is recorded on a recording section.
    • 目的:为了实现更高的测量精度,通过以规定间距间歇地移动导电膜,用涡流检测器和处理检测器的输出信号的数据处理装置在静止状态下测量其面积电阻。 构成:卷绕在退绕辊5上的导电膜3以规定的间距间歇地以卷绕电动机7进行转印,该卷绕马达7用于驱动卷绕辊6,该卷绕辊6由转印辊4支撑并缠绕在卷绕辊6上。作为涡流 导电膜3几乎与面积电阻成比例,可以从涡电流检测器1的输出中获知面积电阻。导电膜3可以具有导电薄膜,即基板上的膜的上表面或下表面 。 涡电流检测器1和导电膜3之间的距离越小,测量精度越高。 涡流检测器1的输出信号用多路复用器顺序切换,多路复用器的输出信号被数据处理部分放大和计算,并且面积电阻被记录在记录部分上。