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    • 5. 发明专利
    • Improved linear variable differential transformer for high precision position measurement
    • 改进的线性可变差分变压器,用于高精度位置测量
    • JP2008102144A
    • 2008-05-01
    • JP2007295457
    • 2007-11-14
    • Asylum Research Corpアサイラム リサーチ コーポレーション
    • PROKSCH ROGERCLEVELAND JASONBOCEK DAN
    • G01D5/22G01B7/14G01B7/34H01F5/00H01F21/04
    • G01Q10/04G01D5/2066G01D5/2291H01F21/04
    • PROBLEM TO BE SOLVED: To provide a transducer reducing noise and increasing sensitiveness for improving a time response of a linear variable differential transformer (LVDT). SOLUTION: In this transducer, a primary coil and a high permeability ferromagnetic core of conventional LVDTs are replaced with a primary coil 15 wound around a non-ferromagnetic core 14. In addition to reducing or eliminating Barkhausen noise, this approach reduces or eliminates other undesirable effects in conventional LVDTs including excessive eddy current heating in the core, non-linearities associated with high permeability materials and the length scale of a flux circuit. These improvements are coupled with improved LVDT signal conditioning circuitry. The device also serves as an actuator and may be used to convert differential voltages into force. Devices with these improvements have numerous applications, including molecular force measurements, atomic force microscopy and manipulation technology, lithographic manufacturing, nanometer scale surface profiling and other aspects of nanotechnology. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供一种降低噪音的传感器,并提高灵敏度,以改善线性可变差动变压器(LVDT)的时间响应。 解决方案:在该传感器中,常规LVDT的初级线圈和高磁导率铁磁芯被缠绕在非铁磁芯14上的初级线圈15替代。除了减少或消除巴克豪森噪声之外,该方法可以减少或 消除了常规LVDT中的其他不良影响,包括芯中过度的涡流加热,与高磁导率材料相关的非线性以及磁通电路的长度尺度。 这些改进与改进的LVDT信号调理电路相结合。 该装置还用作致动器,并且可以用于将差分电压转换为有效。 具有这些改进的器件有许多应用,包括分子力测量,原子力显微镜和操作技术,平版印刷制造,纳米级表面分析和纳米技术的其他方面。 版权所有(C)2008,JPO&INPIT