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    • 7. 发明专利
    • Liquid processing apparatus and liquid processing method
    • 液体加工设备和液体加工方法
    • JP2013093361A
    • 2013-05-16
    • JP2011232862
    • 2011-10-24
    • Tokyo Electron Ltd東京エレクトロン株式会社
    • ITO KIKOAIURA KAZUHIRO
    • H01L21/027H01L21/304
    • H01L21/67051B05B3/18B05B15/1203B05C9/06B05C11/1039B05C11/1044B05D1/02B08B3/04B60B17/00B60B17/0068B60B2900/325B61H5/00G01B11/306G01B21/20H01L21/02057H01L21/6715
    • PROBLEM TO BE SOLVED: To prevent cross contamination while preventing or suppressing diffusion of an atmosphere derived from a process liquid on the periphery of a substrate during each liquid processing, when different types of liquid processing are carried out in one liquid processing apparatus.SOLUTION: The substrate processing apparatus comprises a substrate holding section for rotating a substrate (W) while holding horizontally, a first process liquid supply nozzle and a second process liquid supply nozzle supplying first process liquid and second process liquid, respectively, to the substrate, liquid receiving cups (40, 42, 44) for receiving the process liquid after it is supplied to the substrate, a first cylindrical cup outer peripheral cylinder (50A) having an upper opening (50n) and a second cup outer peripheral cylinder (50B) on the outside thereof, disposed around the liquid receiving cups and having an upper end that can ascend and descend freely between an ascent position above the liquid receiving cups and a descent position below the ascent position, The cup outer peripheral cylinders (50A, 50B) are used selectively according to the process liquid used.
    • 要解决的问题:为了防止在每个液体处理期间防止或抑制来自处理液的气氛在基板周边上的交叉污染,当在一个液体处理装置中执行不同类型的液体处理时 。 解决方案:基板处理装置包括:用于在水平地保持的同时使基板(W)旋转的基板保持部,分别供给第一处理液和第二处理液的第一处理液供给喷嘴和第二处理液供给喷嘴, 用于在处理液体被供应到基板之后接收处理液体的液体接收杯(40,42,44);具有上开口(50n)的第一圆筒杯外周筒(50A)和第二杯外周筒 (50B),设置在液体接收杯周围,并且具有可在液体接收杯上方的上升位置和上升位置下方的下降位置之间自由上升和下降的上端。杯外周圆筒(50A ,50B)根据所使用的工艺液体选择性地使用。 版权所有(C)2013,JPO&INPIT
    • 10. 发明专利
    • Liquid fixed quantity dispensing apparatus, coating apparatus using the same, and liquid fixed quantity dispensing method
    • 液体固定数量分配装置,使用其的涂装装置和液体固定数量分配方法
    • JP2013184116A
    • 2013-09-19
    • JP2012051281
    • 2012-03-08
    • Musashi Eng Co Ltd武蔵エンジニアリング株式会社
    • IKUSHIMA KAZUMASA
    • B05C11/10B05C5/00
    • B05B9/0409B05B3/18B05C5/0212B05C5/0225B05C5/0229B05C11/1002B05C11/1047B65D83/0022F04B7/0023F04B9/10F04B13/02F04B35/04G01F11/021G01F11/029
    • PROBLEM TO BE SOLVED: To provide a liquid fixed quantity dispensing apparatus capable of reducing time and labor of performing work of disassembly, cleaning and assembly, substantially reducing the use amount of liquid, reducing pressure loss further and improving responsiveness, a dispensing method and a coating apparatus using the same.SOLUTION: A liquid fixed quantity dispensing apparatus includes: a liquid contact member having first and second gauge holes; a first piston that slides in the first gauge hole in close contact therewith and a second piston that slides in the second gauge hole in close contact therewith; a supply channel that communicates with a storage unit; a discharge channel that communicates with a nozzle; a switching valve that is disposed in a space in the liquid contact member, and has a first position and a second position; a valve driving mechanism that operates the switching valve; and a piston driving mechanism that operates an arm connected to the first and second pistons, wherein the first and second gauge holes are arranged so as to oppose each other across the switching valve, and the supply channel and the discharge channel are arranged in the vicinity of the switching valve. There are provided a coating apparatus, and a liquid fixed quantity dispensing method using the same.
    • 要解决的问题:提供一种液体固定量分配装置,其能够减少拆卸,清洁和组装的工作的时间和人力,大大减少液体的使用量,进一步减少压力损失并提高响应性,分配方法和 一种液体固定量分配装置,包括:具有第一和第二计量孔的液体接触构件; 第一活塞,其在与第一量规孔紧密接触的状态下滑动;以及第二活塞,其在第二量规孔中与其紧密接触而滑动; 与存储单元通信的供应通道; 与喷嘴连通的排出通道; 切换阀,其设置在所述液接触构件的空间中,并具有第一位置和第二位置; 操作切换阀的阀驱动机构; 以及活塞驱动机构,其操作连接到所述第一和第二活塞的臂,其中所述第一和第二计量孔布置成跨越所述切换阀彼此相对,并且所述供给通道和所述排出通道布置在附近 的切换阀。 提供一种涂布装置和使用其的液体固定量分配方法。