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1. 发明专利

JP2006351435A PLASMA GENERATING APPARATUS 审中-公开
公开(公告)号：JP2006351435A
公开(公告)日：2006-12-28
申请号：JP2005178230
申请日：2005-06-17
申请人： USHIO ELECTRIC INC
发明人： YAMATANI DAIKI , NIIMI KOTA
IPC分类号： H05H1/24 , G21K5/08 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To provide a plasma generating apparatus, wherein a worker can touch a gas inlet device in operation of the apparatus without being concerned regarding electric shocks, and the energy that should used for generation of a high-density and high-temperature plasma is not lost. SOLUTION: The plasma generating apparatus has a gas-introducing metal-made gas pipe 5, connected between the gas inlet device 2 and an annular discharge voltage impressing electrode 9, to introduce a discharge gas from the gas inlet device 2 into a vacuum vessel 13; and generates a high-density and high-temperature plasma of the discharge gas between the discharge voltage impressing electrode 9 and a grounding electrode 11, by impressing high-voltage pulses between the discharge voltage impressing electrode 9 and the grounding electrode 11 by a high-voltage pulse generator 7. An insulating pipe 6 is inserted in a part of the metal-made gas pipe 5, and the gas inlet device 2 is grounded. COPYRIGHT: (C)2007,JPO&INPIT

2. 发明专利

JP2006324173A ELECTRODE OF EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS 审中-公开
公开(公告)号：JP2006324173A
公开(公告)日：2006-11-30
申请号：JP2005147782
申请日：2005-05-20
申请人： USHIO ELECTRIC INC
发明人： NIIMI KOTA
IPC分类号： H05G2/00 , G21K5/02 , H01L21/027 , H05G1/02 , H05H1/24
摘要： PROBLEM TO BE SOLVED: To provide an electrode structure of an extreme ultraviolet light generating apparatus which uses a high melting point material for a part whose temperature becomes high, and also has easiness of workability for cooling. SOLUTION: A discharge electrode 11 and a ground electrode 12 are constituted of two parts of dischargers 1, 4 directly exposed to plasma and coolers 2, 5, respectively. The electrodes 11, 12 are configured by fixing them closely on both sides of an insulating material 13. For the coolers 2, 5, a material is used such as copper or aluminum, having both of an easy workability and a high heat conductivity. A passage for a cooling liquid to pass through is formed inside the each electrode. The cooling liquid is made to flow through the passage. The dischargers 1, 4 are formed of tungsten, tantalum, rhenium or an alloy composed mainly thereof of a high melting point material. The dischargers 1, 4 are installed on the sides facing a high-temperature high-density plasma generator. The outer walls thereof are closely fixed to the inner walls of the coolers 2, 5. COPYRIGHT: (C)2007,JPO&INPIT

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