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    • 8. 发明专利
    • METHOD FOR DETECTING BREAK THROUGH OF GAS ADSORBING DEVICE BY GASEOUS CHLORINE
    • JPS61239162A
    • 1986-10-24
    • JP7919985
    • 1985-04-16
    • UBE INDUSTRIES
    • MIYAMOTO MAMORUNISHIMURA YOSHIOMIURA MASAO
    • G01N31/00G01N31/22
    • PURPOSE:To make the exact detection of the break through by gaseous chlorine possible by packing a break through detecting agent prepd. by depositing potassium iodide on a carrier and subjecting the carrier to coating into a gas discharge port of a gas adsorbing device and detecting the break through from the coloration of the detecting agent. CONSTITUTION:An adsorbent 4 is packed into a vessel 3 which constitutes the gas adsorbing device and has a gas introducing port 1 and the gas discharge port 2. A detecting part 6 for the break through of the gaseous chlorine which consists of a vessel to permit the viewing through of the inside is provided near the port 2. The gaseous chlorine break through detecting agent 5 prepd. by depositing the potassium iodide on the carrier consisting of, for example, alpha-alumina and subjecting the carrier to coating by using, for example, polymethacrylate and drying the same is packed into the vessel of the detecting part 6. When the waste gas of dry etching using the gaseous chlorine flows out of the port 2, the agent 5 colors immediately yellowish brown and does not exhibit color fading and therefore the exact detection of the break through of the gaseous chlorine is made possible.