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1. 发明专利

JPH11214390A MANUFACTURE OF SEMICONDUCTOR DEVICE 失效
公开(公告)号：JPH11214390A
公开(公告)日：1999-08-06
申请号：JP1433398
申请日：1998-01-27
申请人： TOSHIBA CORP
发明人： OBARA TAKASHI , HAYASHI TOSHIHARU
IPC分类号： H01L21/3205 , H01L21/268 , H01L23/52 , H01S3/00
摘要： PROBLEM TO BE SOLVED: To achieve efficient laser beam irradiation by carrying out the laser beam irradiation on a Cu film with a pulse laser beam having a particular half-amplitude in the process wherein a hole and a groove are filled up. SOLUTION: A wiring groove is formed in an insulating film formed on a silicon substrates 1, and then a Cu film is formed on the insulating film through sputtering. Then, the wiring groove is filled up with Cu by irradiating and fusing a part of the Cu film with an Xe-Cl excimert laser. At that time, the melting point of Cu is 1083 deg.C and the irradiation temperature of the laser beam is about 1100 deg.C. Here, the fusing time can be made longer than hitherto when the Cu film is irradiated with laser energy to bring the Cu to the same highest attainable temperature as hitherto by carrying out the Xe-Cl excimer laser irradiation with a laser pulse waveform of not less than 50 ns, e.g. 100 ns, so that a smaller and deeper hole and groove can be filled up.

2. 发明专利

JPH04167483A SOLID LASER OSCILLATION DEVICE 失效
公开(公告)号：JPH04167483A
公开(公告)日：1992-06-15
申请号：JP29390290
申请日：1990-10-31
申请人： TOSHIBA CORP
发明人： HAYASHI TOSHIHARU
IPC分类号： H01S3/042 , H01S3/0915
摘要： PURPOSE:To prevent reduction in insulation resistance due to contamination of cooling water when replacing an excitation lamp by retaining a laser rod with a case main body and by retaining the excitation lamp with a cover body which blanks off an opening on an upper surface of the case main body. CONSTITUTION:A laser rod 13 is retained within a case body. A cover body 3 is provided at an opening on an upper surface of the case body so that it can be inserted and extracted freely and an excitation lamp 31 which blanks off the opening on the upper surface densely is retained at a cover body, thus opposing a direction of a side of a laser rod while the cover body is mounted to the case main body. A light resonator which is not shown is installed through a light-transmission part 9 of a case 1 with the laser rod in-between. Then, a supply part and a flow-out part 19 which allow cooling water which is a pure water to be circulated within the case main body is installed at the case main body and stop supply of the cooling water. When the cover body is removed from the case main body, the excitation lamp is separated from the case main body along with the cover body, thus preventing hands from touching the cooling water which remains within the case main body and enabling the excitation lamp to be replaced.

3. 发明专利

JPS61198791A GAS LASER APPARATUS 失效
公开(公告)号：JPS61198791A
公开(公告)日：1986-09-03
申请号：JP3749285
申请日：1985-02-28
申请人： TOSHIBA CORP
发明人： HAYASHI TOSHIHARU , GOTO TATSUMI
IPC分类号： H01S3/03 , H01S3/032
摘要： PURPOSE:To make the apparatus compact and simple and to improve the rise-up characteristic of the laser output and the output stability, by providing a magnetic path comprising a low magnetic resistance material between permanent magnets, which are arranged so as to hold a laser tube. CONSTITUTION:A gas laser apparatus is composed of a gas laser tube 1 in which a laser medium is sealed, an output mirror 2 and a total reflection mirror 3 constituting a light resonator, large-diameter tube parts 5 and 6, an cathode 7 and an anode 8 which are provided in the tube parts 5 and 6, a pair of permanent magnets 9a and 9b, which are arranged so as to hold a thin discharge tube part 4, and a magnetic path part 10. Since a magnetic circuit is formed between the permanent magnets 9a and 9b by the magnetic path part 10, the intensity of the magnetic field in the gap between the magnets 9a and 9b is increased. The apparatus becomes compact by the amount of said increase. Since the apparatus is forcibly cooled in the same direction as the axis of the tube, bending and the like due to thermal strain at the thin tube part 4 become less, and the rise-up characteristic and the output stability of the laser are improved.

4. 发明专利

JPH0983042A PULSE GAS LASER TUBE 失效
公开(公告)号：JPH0983042A
公开(公告)日：1997-03-28
申请号：JP23541195
申请日：1995-09-13
申请人： TOSHIBA CORP
发明人： JITSUNO TAKAHISA , GOTO TATSUMI , HAYASHI TOSHIHARU
IPC分类号： H01S3/034
摘要： PROBLEM TO BE SOLVED: To enhance the availability of ultraviolet ray drastically while making uniform the irradiation. SOLUTION: A thin discharge tube 10 is provided, at the opposite ends thereof, with cathode 11 and anode 13. The cathode 11 is provided, at the end part thereof, with an ultraviolet reflector 14 having high reflectance at least in the ultraviolet range and reflecting the ultraviolet rays discharged from the tube 10 at the time of corona discharge toward the inside of the tube 10. Ultraviolet rays discharged from the tube 10 at the time of corona discharge are reflected, at high efficiency, on the ultraviolet reflector 14 provided at the end part of cathode 11 and returned back to the discharge region in the thin discharge tube 10.

5. 发明专利

JPH08195516A GAS LASER TUBE 失效
公开(公告)号：JPH08195516A
公开(公告)日：1996-07-30
申请号：JP597395
申请日：1995-01-18
申请人： TOSHIBA CORP
发明人： HAYASHI TOSHIHARU , MATSUOKA YASUKAZU
IPC分类号： H01S3/038 , H01S3/032 , H01S3/036
摘要： PURPOSE: To lower a cathode voltage drop, to improve thereby the efficiency of a laser tube and to enable absorption of distortion of the laser tube or the like due to discharge heating, by a method wherein a cathode disposed opposite to an anode in formed to be cylindrical and this cathode is fitted along the direction of the tube axis of a thin tube part. CONSTITUTION: An indirectly heated cathode 30 is formed to be hollow and cylindrical out of a material prepared by impregnated pores of a porous tungsten sintered compact with a barium compound. This cathode 30 is so formed that the inside diameter is within the range of 1 to 10 times larger than that of a thin tube part 2, e.g. identical with it. The cathode 30 is fitted in proximity to the thin tube part 2 and along the direction of the tube axis of this part. When a voltage being equal to or higher than a discharge maintaining voltage is impressed between this cathode 30 and an anode 6, an arc discharge is generated between these cathode 30 and anode 6, optical resonance is generated between Brewster windows 3 and 4 by the arc discharge and a laser light is outputted.

6. 发明专利

JPS62275592A LASER BEAM MACHINE 失效
公开(公告)号：JPS62275592A
公开(公告)日：1987-11-30
申请号：JP11716486
申请日：1986-05-23
申请人： TOSHIBA CORP
发明人： HAYASHI TOSHIHARU , GOTO TATSUMI
IPC分类号： B23K26/00 , B23K26/064 , H01S3/134
摘要： PURPOSE:To prevent the damage of a part where irradiation is not required by combining optical fibers for irradiation and reflection, executing scanning and adjusting the output of laser light by the comparison with a reference reflectivity. CONSTITUTION:The optical fiber 4 for irradiation and the optical fiber 16 for transmitting the incident reflected light thereon are combined and the scanning is executed by a robot 10. The reflectivity in an abnormal part 6 such as macula of a body 7 to be irradiated and the reflectivity in the part of the ordinary skin, etc. are assumed to be 10% and 25%. The reflected light from the non- abnormal part is inputted via a photodetector 21 to a control signal generating part 22. The laser output is decreased when the reflectivity is >=25%. The laser output is increased up to the output at which the abnormal material is evaporated when the reflectivity is decreased by the irradiation of the abnormal part 6. The damage in the part where the irradiation is not required is thereby prevented.

7. 发明专利

JPS61128584A Gas laser device 失效
标题翻译：气体激光器件
公开(公告)号：JPS61128584A
公开(公告)日：1986-06-16
申请号：JP24967284
申请日：1984-11-28
申请人： Toshiba Corp
发明人： HAYASHI TOSHIHARU , GOTO TATSUMI
IPC分类号： H01S3/03 , H01S3/08
CPC分类号： H01S3/08
摘要： PURPOSE:To form a gas laser device having excellent rise characteristics of a laser output and stability by shaping a Littrow prism to a shape that a projection to the surface vertical to an optical axis takes a circle. CONSTITUTION:A Littrow prism 20 is formed to a triangular columnar shape, a longitudinal section thereof has an obtuse angle, arranged onto an optical axis 5 so that an end surface 21 opposite to the obtuse angle is directd toward the laser tube 4 side and a circumferential surface 22 runs parallel with the optical axis 5, and shaped so that a projection to the surface vertical to the optical axis 5 takes a circle 23. The Littrow prism 20 can be manufactured simply with hgih precisionf by obliquely cutting a material such as a glass round bar having a required diameter at a predetermined angle. Accordingly, asymmetry to the optical axis 5 is made smaller than conventional Littrow prisms, and a gas laser device is hardly affected by the temperature change of the periphery, thus manufacturing the gas laser device, which has excellent rise characteristics of a laser output and from which the stable laser output is acquired.
摘要翻译：目的：通过将Littrow棱镜成形为与垂直于光轴的表面的投影为圆形的形状，形成具有优异的激光输出上升特性和稳定性的气体激光装置。构成：将Litrow棱镜20形成为三角柱状，其长度方向具有钝角，布置在光轴5上，使得与钝角相反的端面21朝向激光管4侧，并且圆周表面22与光轴5平行地延伸，并且成形为使得垂直于光轴5的表面的突出部分呈圆23.Litrow棱镜20可以通过倾斜切割诸如具有预定角度所需直径的玻璃圆棒。因此，使光轴5的不对称性比常规的Littrow棱镜小，气体激光装置几乎不受周围温度变化的影响，因此制造了具有优异的激光输出上升特性和获得稳定的激光输出。

8. 发明专利

JPH0983043A ION LASER TUBE AND PULSE ION LASER UNIT 失效
公开(公告)号：JPH0983043A
公开(公告)日：1997-03-28
申请号：JP24026695
申请日：1995-09-19
申请人： TOSHIBA CORP
发明人： GOTO TATSUMI , HAYASHI TOSHIHARU
IPC分类号： H01S3/036
摘要： PROBLEM TO BE SOLVED: To enhance the laser oscillation efficiency significantly by offsetting the gradient of gas pressure in a thin tube. SOLUTION: An ion laser tube is coupled, at the opposite ends of thin tube part thereof 20, with hermetic enclosures 21, 22 and an ion laser medium is encapsulated. Cathode and anode electrodes 23, 24 are disposed, respectively, in the hermetic enclosures 21, 22 and the direction of discharge current is switched the electrode 23, 24 serves alternately as cathode or anode.

9. 发明专利

JPH08335735A ULTRAVIOLET LASER AND ITS MANUFACTURE 失效
公开(公告)号：JPH08335735A
公开(公告)日：1996-12-17
申请号：JP5951796
申请日：1996-03-15
申请人： TOSHIBA ELECTRONIC ENG , TOSHIBA CORP
发明人： HAYASHI TOSHIHARU , URAKATA HIROTO , NAKAMUTA HIRONORI , OTSUKI EIICHIRO , INAMOTO KOUJI
IPC分类号： C03C17/23 , C03C3/091 , C03C4/00 , C03C27/04 , H01S3/034 , H01S3/08
摘要： PURPOSE: To provide a compact ultraviolet laser, and a manufacturing method, in which highly reliable operational characteristics can be maintained for a long term. CONSTITUTION: A glass substrate 32 for output mirror is made of such glass material as the transmittance of laser light having wavelength of 337nm is in the range of 80-96% at the thickness of 5mm and the coefficient of thermal expansion is in the range of 44×10 -55×10 / deg.C at 0-300 deg.C. The ultraviolet laser is encased in a vacuum case 31 having an opening fitted hermetically with a metal seal ring 39 wherein the glass substrate for output mirror and the metal seal ring are sealed hermetically through a low melting point solder glass 41.

10. 发明专利

JPH08293636A GAS LASER TUBE 失效
公开(公告)号：JPH08293636A
公开(公告)日：1996-11-05
申请号：JP10093395
申请日：1995-04-25
申请人： TOSHIBA CORP
发明人： HAYASHI TOSHIHARU , INAMOTO KOUJI
IPC分类号： H01S3/03
摘要： PURPOSE: To provide a gas laser tube, which is small-sized and has a long operating life, by a method wherein a discharge tube is provided with a gas reservoir. CONSTITUTION: A gas laser tube is provided with a discharge tube 1, which has a discharge passageway 2 formed penetratingly along the central axis part of the tube 1, and an anode 4 and a cathode 5, which are respectively provided on both sides of this discharge tube, and at least one piece of a gas reservoir 11 is formed around the discharge passageway and along the axial direction from the side of one end of the tube to the middle of the tube.

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