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1. 发明专利

JP2012216670A Compound semiconductor thin film evaluation device, compound semiconductor thin film evaluation method and solar cell manufacturing method 有权
标题翻译：化合物半导体薄膜评估装置，化合物半导体薄膜评估方法和太阳能电池制造方法
公开(公告)号：JP2012216670A
公开(公告)日：2012-11-08
申请号：JP2011080657
申请日：2011-03-31
申请人： Tdk Corp , Tdk株式会社
发明人： KURIHARA MASAHITO , PHILLIP DALE
IPC分类号： H01L31/04
CPC分类号： Y02E10/541 , Y02P70/521
摘要： PROBLEM TO BE SOLVED: To provide a compound semiconductor thin film evaluation device which can detect a partial defect in a compound semiconductor thin film and inspect the whole of the compound semiconductor thin film.SOLUTION: A compound semiconductor thin film evaluation device 2 of the present invention comprises a light transmissive exterior package 4 on which an opening is formed, a light transmissive polymer gel electrolyte layer 6 disposed on inside the opening to close the opening, an electrolytic solution 12 infiltrating the polymer gel electrolyte layer 6, a light source 18 disposed on inside the exterior package 4 for irradiating a surface of the polymer gel electrolyte layer 6 facing inward of the exterior package 4 with light, a counter electrode 8 contacting with a part of the surface of the polymer gel electrolyte layer 6 facing inward of the exterior package 4, a reference electrode 10 contacting with a part of the surface of the polymer gel electrolyte layer 6 facing inward of the exterior package 4, and a potentiostat 60 to which the counter electrode 8 and the reference electrode 10 are electrically connected.
摘要翻译：解决的问题：提供一种可以检测化合物半导体薄膜的部分缺陷并检查整个化合物半导体薄膜的化合物半导体薄膜评估装置。解决方案：本发明的化合物半导体薄膜评估装置2包括其上形成开口的透光外包装4，设置在开口内部以封闭开口的透光聚合物凝胶电解质层6，浸渍聚合物凝胶电解质层6的电解液12，设置在外包装4内部的光源18，用于用聚合物凝胶电解质层6的表面照射外部包装4的内部，与电极8接触的对置电极8 聚合物凝胶电解质层6的面向外部封装4的内表面的一部分，与面向外部封装4内部的聚合物凝胶电解质层6的表面的一部分接触的参考电极10以及恒电位仪60 对电极8和参比电极10电连接。版权所有（C）2013，JPO＆INPIT

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