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1. 发明专利

JP2015055594A 赤外線温度センサ有权
标题翻译：红外温度传感器
公开(公告)号：JP2015055594A
公开(公告)日：2015-03-23
申请号：JP2013190380
申请日：2013-09-13
申请人： Tdk株式会社 , Tdk Corp , Tdk株式会社
发明人： HIRABAYASHI JUN , MATSUO YUTAKA , USHIODA KENTARO
IPC分类号： G01J5/10 , G01J1/02
摘要：【課題】初期応答時のオーバーシュート量が低減された赤外線温度センサを提供する。【解決手段】第1感熱素子によって形成された赤外線検知用素子21と、第2感熱素子によって形成された温度補償用素子22と、赤外線検知用素子及び温度補償用素子とを支持する基板1とで構成され、第1のキャビティ上に形成された赤外線検知用素子上の検知領域では赤外線反射膜30A、赤外線吸収膜40Aの順に積層され、第2のキャビティ上に形成された温度補償用素子上には第1の感熱素子と同じ面積の赤外線吸収膜40Bが形成され、さらにその上に赤外線反射膜30Bが第1感熱素子の構成と同一材料にて形成されており、第1のキャビティ上の第1の赤外線反射膜の面積と膜厚の積と、第2のキャビティ上の第2の赤外線反射膜の面積と膜厚の積とがおおむね等しい赤外線温度センサ100である。【選択図】図3
摘要翻译：要解决的问题：提供一种红外温度传感器，其中初始响应时间的过冲量减小。解决方案：红外温度传感器100包括形成有第一热敏元件的红外线检测元件21，温度补偿元件22 形成有第二热敏元件，以及用于支撑红外线检测元件和温度补偿元件的基板1。红外线反射膜30A和红外线吸收膜40A依次形成在形成于第一空腔的红外线检测元件的检测区域中。在形成在第二腔体上的温度补偿元件上形成与第一感温元件相同面积的红外线吸收膜40B，并且使用与第一腔体的构造相同的材料在其顶部形成红外线反射膜30B 热敏元件。第一腔上的第一红外线反射膜的面积和膜厚的乘积与第二腔上的第二红外线反射膜的面积和膜厚的乘积大致相等。

2. 发明专利

JP2012119389A Thermistor, temperature sensor and gas sensor 有权
标题翻译：热敏电阻，温度传感器和气体传感器
公开(公告)号：JP2012119389A
公开(公告)日：2012-06-21
申请号：JP2010265498
申请日：2010-11-29
申请人： Tdk Corp , Tdk株式会社
发明人： MATSUO YUTAKA , HIRABAYASHI JUN , USUDA MASATO
IPC分类号： H01C7/04
摘要： PROBLEM TO BE SOLVED: To provide a thermistor that improves product reliability by increasing the mechanical strength of the thermistor and preventing warping of the thermistor.SOLUTION: A thin film thermistor 1 includes a substrate 2 and a thermistor film 5 disposed on the substrate 2. The substrate 2 has a thin portion TH1 thinner than a maximum thickness ΔT3 of the substrate 2, and the thermistor film 5 is provided with a recessed portion 52 or provided with a bored portion 52 by local removal of the thermistor film 5. This increases elemental strength of the thin film thermistor 1 and prevents warping of the thin film thermistor 1 due to film stress.
摘要翻译：要解决的问题：提供一种通过增加热敏电阻的机械强度并防止热敏电阻翘曲来提高产品可靠性的热敏电阻。解决方案：薄膜热敏电阻1包括设置在基板2上的基板2和热敏电阻膜5.基板2具有比基板2的最大厚度ΔT3薄的薄部分TH1，并且热敏电阻膜5是设置有凹部52或通过局部去除热敏电阻膜5而设置有钻孔部分52.这增加了薄膜热敏电阻1的元素强度，并且防止薄膜热敏电阻1由于膜应力引起的翘曲。版权所有（C）2012，JPO＆INPIT

3. 发明专利

JP2009225232A Resonator filter 审中-公开
标题翻译：谐振滤波器
公开(公告)号：JP2009225232A
公开(公告)日：2009-10-01
申请号：JP2008068990
申请日：2008-03-18
申请人： Tdk Corp , Tdk株式会社
发明人： MATSUO YUTAKA , HIRABAYASHI JUN , KUROKI KOJI , INUBUSHI KAZUMI
IPC分类号： H03H9/54 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/29 , H03H9/17
摘要： PROBLEM TO BE SOLVED: To provide a resonator filter which includes a cavity that provides a resonance space common for a plurality of resonators, the resonator filter having a resonator structure wherein a structural strength is ensured and an insertion loss is reduced. SOLUTION: The resonator filter includes the cavity 21 that provides the resonance space for a plurality of laminated resonating objects 81, 82, 83, 84, 85, 86. A wiring electrode 90 that electrically connects the laminated resonating objects 82, 83, has a wiring structure linearly connecting a maximum diameter L1 of upper electrodes in the laminated resonating object 82 and a maximum diameter L2 of upper electrodes in the laminated resonating object 82. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种谐振器滤波器，其包括提供多个谐振器共同的共振空间的谐振器，谐振器滤波器具有谐振器结构，其中确保结构强度并降低插入损耗。谐振滤波器包括为多个层叠谐振物体81,82,83,84,85,86提供谐振空间的空腔21.布线电极90，电连接层叠的谐振对象82,83 具有线性连接叠层谐振对象82中的上电极的最大直径L1和层叠谐振对象82中的上电极的最大直径L2的布线结构。（C）2010，JPO和INPIT

4. 发明专利

JP2010062642A Thin film bulk wave resonator 有权
标题翻译：薄膜大容积波形谐振器
公开(公告)号：JP2010062642A
公开(公告)日：2010-03-18
申请号：JP2008223602
申请日：2008-09-01
申请人： Tdk Corp , Tdk株式会社
发明人： HIRABAYASHI JUN , KUROKI KOJI , MATSUO YUTAKA , INUBUSHI KAZUMI , AOYANAGI TAKESHI
IPC分类号： H03H9/17 , H01L41/09 , H01L41/18 , H01L41/22 , H01L41/23 , H01L41/39 , H03H3/02
摘要： PROBLEM TO BE SOLVED: To provide a thin film bulk wave resonator which can reduce atmospheric pressure difference between a cavity space and open air at a time of sealing without reducing reliability of a stacked resonating body. SOLUTION: The thin film bulk wave resonator 10 is provided with: the stacked resonating body 30; an element substrate 20 with a cavity 22 which offers a space in which the stacked resonating body 30 can freely vibrate in the thickness direction; a cover substrate 60 which is the cover substrate 60 to close an aperture part of the cavity 22, and has a gas passage 63 so as to pass the gas between the cavity 22 and the open air; and a sealing member 80 to seal the stacked resonating body 30, the element substrate 20, and the cover substrate 60. Since the cavity 22 passes to the open air through the gas passage 63, the atmospheric pressure difference does not occur between the cavity space and the open air for all time before and after the sealing process using the sealing member 80. Therefore, break down of the stacked resonating body 30 and deterioration of frequency characteristics by the atmospheric pressure difference between the cavity space and the open air can be suppressed. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种薄膜体波谐振器，其可以在不降低堆叠谐振体的可靠性的情况下降低密封时的腔空间和露天空气之间的大气压差。
解决方案：薄膜体波谐振器10设置有：堆叠谐振体30; 具有空腔22的元件基板20，其提供堆叠谐振体30可以在厚度方向上自由振动的空间; 覆盖基板60，其是用于封闭空腔22的开口部的盖基板60，并且具有气体通道63，以使气体在空腔22和露天之间通过; 以及用于密封堆叠的谐振体30，元件基板20和盖基板60的密封构件80.由于空腔22通过气体通道63通向露天空气，所以空腔空间之间不会发生大气压差以及使用密封构件80进行密封处理之前和之后的所有时间的开放空气。因此，可以抑制堆积谐振体30的分解，并且可以抑制空腔与露天之间的大气压差的频率特性的劣化。版权所有（C）2010，JPO＆INPIT

5. 发明专利

JP2008244943A Film bulk acoustic resonator and its manufacturing method 审中-公开
标题翻译：电影胶卷声谐振器及其制造方法
公开(公告)号：JP2008244943A
公开(公告)日：2008-10-09
申请号：JP2007083470
申请日：2007-03-28
申请人： Tdk Corp , Tdk株式会社
发明人： INUBUSHI KAZUMI , HIRABAYASHI JUN , KUROKI KOJI , MATSUO YUTAKA
IPC分类号： H03H9/17 , H01L41/09 , H01L41/18 , H01L41/22 , H01L41/253 , H01L41/39 , H03H3/02 , H03H9/02
摘要： PROBLEM TO BE SOLVED: To provide a film bulk acoustic resonator which adjusts an antiresonant frequency using a simple constitution, without causing spurious oscillations and is superior in a work controllability. SOLUTION: The film bulk acoustic resonator 50 is provided with a lamination resonator 51, which vibrates longitudinally in a thickness direction and an impedance adjusting portion 52, which adjusts the antiresonant frequency of the lamination resonator 51 by changing an impedance of the laminated resonator 51. The antiresonant frequency of the lamination resonator 51 is adjusted, by forming a capacity element connected in parallel to the lamination resonator 51 as the impedance adjusting portion 52. A lower electrode 20A of the laminated resonator 51 and a lower electrode 20B of the impedance adjusting portion 52 are isolated physically and control the generation of the spurious oscillations, caused by propagating a transversal wave generated in the lamination resonator 51 to the impedance adjusting portion 52. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种使用简单结构调节反谐振频率的薄膜体声波谐振器，而不会引起杂散振荡并且在工作控制性方面是优异的。解决方案：薄膜体声波谐振器50设置有沿厚度方向纵向振动的层叠谐振器51和阻抗调节部52，阻抗调节部52通过改变层叠的阻抗来调整层叠谐振器51的反谐振频率谐振器51.通过形成与作为阻抗调节部分52的层叠谐振器51并联连接的电容元件来调节层叠谐振器51的反谐振频率。层叠谐振器51的下电极20A和阻抗调整部分52在物理上是隔离的，并且通过将叠层谐振器51中产生的横向波传播到阻抗调节部分52来控制寄生振荡的产生。版权所有：（C）2009，JPO＆INPIT

6. 发明专利

JP2014190894A Infrared sensor 有权
标题翻译：红外传感器
公开(公告)号：JP2014190894A
公开(公告)日：2014-10-06
申请号：JP2013067855
申请日：2013-03-28
申请人： Tdk Corp , Tdk株式会社
发明人： KUROKI KOJI , KOMURO EIJU , MATSUO YUTAKA , KAGAYA YASUNAGA
IPC分类号： G01J1/02 , G01J5/02
摘要： PROBLEM TO BE SOLVED: To provide an infrared sensor capable of maintaining high sensitivity and reducing deterioration of an infrared absorption film.SOLUTION: An infrared sensor includes: a substrate; a cavity that is formed inside the substrate; an absorption film absorption layer 9 that is in a membrane region corresponding to the cavity and in which a base material formed on the upper part of a heat sensitive element is a first organic material; and an absorption film protective layer 10 that is formed on the absorption film absorption layer and is a second organic material for coating the absorption film absorption layer. In a direction orthogonal to the lamination direction of the absorption film absorption layer and absorption film protective layer, the end part of the absorption film protective layer is formed inside the membrane region.
摘要翻译：要解决的问题：提供能够保持高灵敏度并减少红外吸收膜的劣化的红外传感器。解决方案：一种红外传感器，包括：基板; 形成在基板内的空腔; 吸收膜吸收层9，其位于与空腔对应的膜区域中，形成在热敏元件的上部的基材为第一有机材料; 以及吸收膜保护层10，其形成在吸收膜吸收层上，并且是用于涂覆吸收膜吸收层的第二有机材料。在与吸收膜吸收层和吸收膜保护层的层叠方向正交的方向上，在膜区域内形成吸收膜保护层的端部。

7. 发明专利

JP2011232294A Temperature sensor 有权
标题翻译：温度感应器
公开(公告)号：JP2011232294A
公开(公告)日：2011-11-17
申请号：JP2010105358
申请日：2010-04-30
申请人： Tdk Corp , Tdk株式会社
发明人： USHIODA KENTARO , MATSUO YUTAKA , KOBAYASHI HIROSHI
IPC分类号： G01J1/02 , G01J5/20
摘要： PROBLEM TO BE SOLVED: To provide a temperature sensor which can measure a temperature of a heat source with accuracy and good responsiveness.SOLUTION: A temperature sensor 100 includes an infrared-ray absorption film 20 which absorbs infrared-ray radiated from a heat source to generate heat, a temperature-sensitive element 10 which outputs an electric signal corresponding to a temperature of the heat source by detecting a heat quantity of the infrared-ray absorption film 20, lead patterns 31 and 32 for outputting the electric signal from the temperature-sensitive element 10, and a heat collection pattern 40 by which the heat quantity distributed over the infrared-ray absorption film 20 is collected in the temperature-sensitive element 10.
摘要翻译：要解决的问题：提供一种温度传感器，其可以精确和高响应度测量热源的温度。解决方案：温度传感器100包括吸收从热源辐射的红外线以产生热的红外线吸收膜20;温度敏感元件10，其输出对应于热源的温度的电信号通过检测红外线吸收膜20的热量，用于输出来自温度敏感元件10的电信号的引线图案31和32以及热分布在红外线吸收上的热量的热收集图案40 膜20被收集在温度敏感元件10中。版权所有：（C）2012，JPO＆INPIT

8. 发明专利

JP2014115244A Infrared detector 有权
标题翻译：红外探测器
公开(公告)号：JP2014115244A
公开(公告)日：2014-06-26
申请号：JP2012271365
申请日：2012-12-12
申请人： Tdk Corp , Tdk株式会社
发明人： MATSUO YUTAKA , KOMURO EIJU , HIRABAYASHI JUN
IPC分类号： G01J1/02 , G01J1/06
摘要： PROBLEM TO BE SOLVED: To provide an infrared detector which has a structure capable of easily adjusting a view angle, reducing a noise component and reducing a manufacturing cost.SOLUTION: As a result of a view angle being limited by an infrared reflection layer 5 having a third aperture on an infrared incidence surface side of an optical filter 4, an infrared ray is efficiently radiated on an infrared detection element 2. In addition, internal reflection is suppressed by an infrared absorption layer 6 having a second aperture on the other surface so that a noise component is reduced.
摘要翻译：要解决的问题：提供一种具有能够容易地调节视角的结构的红外检测器，降低噪声分量并降低制造成本。解决方案：由于视角被具有红外线反射层5的结果所限制，所述红外线反射层5具有在滤光器4的红外入射面侧的第三孔，红外线被有效地照射在红外线检测元件2上。此外，通过在另一表面上具有第二孔的红外线吸收层6来抑制内部反射，因此噪音成分减少。

9. 发明专利

JP2013174627A Gas sensor 有权
标题翻译：气体传感器
公开(公告)号：JP2013174627A
公开(公告)日：2013-09-05
申请号：JP2013125421
申请日：2013-06-14
申请人： Tdk Corp , Tdk株式会社
发明人： KOMURO EIJU , SHIBUE AKIRA , MATSUO YUTAKA
IPC分类号： G01N27/406 , G01N27/416
摘要： PROBLEM TO BE SOLVED: To provide a gas sensor capable of making the temperature distribution of a detection element approximately uniform and stabilizing sensor output in a short period of time, and excellent in starting performance.SOLUTION: A gas sensor comprises: a detection element for outputting a detection signal corresponding to a concentration of detection object gas; and heaters for heating the detection element to an operation temperature and supporting the detection element in a lamination direction. The heater includes: a first portion overlapping with a projection area in the lamination direction of electrodes of the detection element; and a second portion not overlapping with the projection area in the lamination direction of the electrodes of the detection element. The gas sensor is configured in such a manner that it has a part in which the interval between the adjacent heaters is short in the first portion and a part in which the interval between the adjacent heaters is long in the second portion.
摘要翻译：要解决的问题：提供一种能够使检测元件的温度分布大致均匀并且在短时间内稳定传感器输出并且起动性能优异的气体传感器。解决方案：一种气体传感器，包括：用于输出与检测对象气体浓度对应的检测信号; 以及用于将检测元件加热到操作温度并且在层叠方向上支撑检测元件的加热器。加热器包括：与检测元件的电极的层叠方向上的投影区域重叠的第一部分; 以及与检测元件的电极的层叠方向上的投影区域不重叠的第二部分。气体传感器被构造成使得其具有第一部分中相邻加热器之间的间隔短的部分和相邻加热器之间的间隔在第二部分中长的部分。

10. 发明专利

JP2012237571A Non-contact temperature sensor 有权
标题翻译：非接触式温度传感器
公开(公告)号：JP2012237571A
公开(公告)日：2012-12-06
申请号：JP2011104995
申请日：2011-05-10
申请人： Tdk Corp , Tdk株式会社
发明人： SHIODA KENTARO , KOBAYASHI HIROSHI , MATSUO YUTAKA , SHIRAKI SATOSHI
IPC分类号： G01J5/06
摘要： PROBLEM TO BE SOLVED: To provide a non-contact temperature sensor which not only can prevent manufacturing man-hour and cost from increasing, productivity from reducing, and work environment from deteriorating, but also suppress sensitivity error and sensibility decrease of a sensor.SOLUTION: For example, a guiding barrel 30A of the non-contact temperature sensor has a trunk 31 composed of a long side walls 31L and 31L, short side walls 31S and 31S. The trunk 31 has non-light guide means including blades 41L1, 41L2, 41S1 and 41S2, and pores 51L1, 51L2, 51S1 and 51S2, which prevents the infrared component progressing towards an inner wall or reflected by the inner wall among radiated infrared rays IR entering the inside of the guiding barrel 30A through its opening P from reaching a reception range including a heat sensitive element for infrared detection.
摘要翻译：要解决的问题：提供一种非接触式温度传感器，其不仅可以防止制造工时和成本提高，生产率从减少和工作环境劣化，而且抑制灵敏度误差和敏感性降低传感器。解决方案：例如，非接触式温度传感器的引导筒30A具有由长侧壁31L和31L，短侧壁31S和31S构成的主体31。躯干31具有包括叶片41L1,41L2,41S1和41S2以及孔51L1,51L2,51S1和51S2的非光导装置，其防止红外成分向内壁前进或由辐射红外线IR中的内壁反射通过其开口P进入引导筒30A的内部，到达包括用于红外检测的热敏元件的接收范围。版权所有（C）2013，JPO＆INPIT

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