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1. 发明专利

JP2013114964A Field emission type x ray generator 有权
标题翻译：场发射型X射线发生器
公开(公告)号：JP2013114964A
公开(公告)日：2013-06-10
申请号：JP2011261523
申请日：2011-11-30
申请人： Takasago Thermal Eng Co Ltd , 高砂熱学工業株式会社 , Onizuka Glass:Kk , 株式会社鬼塚硝子
发明人： INABA HITOSHI , ONIZUKA YOSHIHIRO , NAKAMURA TOMONOBU , SADATSUKA ATSUO , KOIKE TAKAHISA
IPC分类号： H01J35/16 , H01J35/06 , H01J35/08
摘要： PROBLEM TO BE SOLVED: To prevent discharge between a glass tube housing a cold cathode element and a housing located at the outer side of the glass tube thereby extending lives of the cold cathode element and the X ray generator compared to conventional X ray generators and realizing the stable operations in the X ray generator using the field emission type cold cathode element.SOLUTION: A housing 2 is grounded. A cold cathode element 5, which is subject to a voltage applied from a direct current power source 7 to discharge electrons, is housed in a glass tube 4, and a lower end part 4a of the glass tube 4 is supported by an insulation material 3 in the housing 2. A target 8 and a window part 9 discharging X rays generated by the target 8 to the exterior part are provided at the upper end part side of the glass tube 4. A peripheral part 4b of the lower end part 4a in the glass tube 4 is covered by the insulation material 3 and a surface of the insulation material 3 is covered by a grounded conductor.
摘要翻译：要解决的问题：为了防止容纳冷阴极元件的玻璃管和位于玻璃管外侧的壳体之间的放电，从而延长了与常规X射线相比的冷阴极元件和X射线发生器的寿命使用场发射型冷阴极元件实现在X射线发生器中的稳定操作。
解决方案：外壳2接地。受到来自直流电源7施加的电压进行放电的冷阴极元件5容纳在玻璃管4中，玻璃管4的下端部4a被绝缘材料3支撑在玻璃管4的上端部侧设置有将目标物8产生的X射线向外部排出的靶8和窗口部分9.下端部4a的周边部4b 玻璃管4被绝缘材料3覆盖，绝缘材料3的表面被接地导体覆盖。版权所有（C）2013，JPO＆INPIT

2. 发明专利

JP2012142171A Field emission type x-ray generator 有权
标题翻译：场发射型X射线发生器
公开(公告)号：JP2012142171A
公开(公告)日：2012-07-26
申请号：JP2010293652
申请日：2010-12-28
申请人： Futex Co Ltd , Onizuka Glass:Kk , Takasago Thermal Eng Co Ltd , フューテックス株式会社 , 株式会社鬼塚硝子 , 高砂熱学工業株式会社
发明人： INABA HITOSHI , ONIZUKA YOSHIHIRO , NAKAMURA TOMONOBU , SADATSUKA ATSUO , KOIKE TAKAHISA , FUKUDA YASUNARI , KUMANO MITSUAKI , NOGUCHI YOSHIHIRO
IPC分类号： H05G1/08 , H01J1/304 , H01J35/06
摘要： PROBLEM TO BE SOLVED: To obtain a long life field emission type X-ray generator without using any special electron emission element.SOLUTION: A field emission type X-ray generator 10 includes a cold-electrode 12 which becomes an electron emission element. A negative voltage of several tens of kV is applied to the cold-electrode 12 from a DC power supply 21 via a high voltage cable 22. In addition to a first current control resistor 31 provided near the DC power supply 21, a second current control resistor 41 is provided near the cold-electrode 12. Even if an overcurrent due to the parasitic inductance L or capacitance C of the high voltage cable 22 is generated and begins to flow into the cold-electrode 12, the overcurrent can be prevented from flowing, as it is, into the cold-electrode 12 by the second current control resistor 41 and thereby long life of the cold-electrode 12 is ensured.
摘要翻译：要解决的问题：为了获得长寿命的发射型X射线发生器而不使用任何特殊的电子发射元件。解决方案：场发射型X射线发生器10包括成为电子发射元件的冷电极12。几十kV的负电压经由高压电缆22从直流电源21施加到冷电极12.除了设置在直流电源21附近的第一电流控制电阻器31外，还具有第二电流控制电阻器41设置在冷电极12附近。即使产生由高压电缆22的寄生电感L或电容C引起的过电流并开始流入冷电极12，也可以防止过电流流动因此，通过第二电流控制电阻41进入冷电极12，从而确保冷电极12的长寿命。版权所有（C）2012，JPO＆INPIT

3. 发明专利

JP2011181276A X-ray generating device and static eliminator 有权
标题翻译： X射线发生装置和静态消除器
公开(公告)号：JP2011181276A
公开(公告)日：2011-09-15
申请号：JP2010043131
申请日：2010-02-26
申请人： Futex Co Ltd , Onizuka Glass:Kk , Takasago Thermal Eng Co Ltd , フューテックス株式会社 , 株式会社鬼塚硝子 , 高砂熱学工業株式会社
发明人： INABA HITOSHI , ONIZUKA YOSHIHIRO , NAKAMURA TOMONOBU , SADATSUKA ATSUO , FUKUDA YASUNARI , KUMANO MITSUAKI
IPC分类号： H01J35/06 , H01J35/00
摘要： PROBLEM TO BE SOLVED: To provide a technology capable of improving life of a field emission type X-ray generator as compared with a conventional one.
SOLUTION: The X-ray generating device is provided with an X-ray tube including an electron emission part as a cold cathode emitting electrons, a target as a counter electrode generating X rays as electrons emitted from the electron emission part are irradiated, and a transmission window connected with the target and emitting X rays generated at the target outside. It is further provided with a power source part for impressing a predetermined voltage on the X-ray tube, a current detecting part for detecting a current value of the current flowing in the X-ray tube, and a control part for controlling the power source part based on the current value detected by the current detecting part so as to restrain deterioration of the emission capacity of the electrons of the electron emission part.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：与现有技术相比，提供能够提高场发射型X射线发生器寿命的技术。解决方案：X射线产生装置设置有包括作为发射电子的冷阴极的电子发射部分的X射线管，作为从电子发射部分发射的电子产生X射线的靶对象被照射以及与目标物连接的发射窗口，并且在目标外部产生X射线。还设置有用于在X射线管上施加预定电压的电源部分，用于检测在X射线管中流动的电流的电流值的电流检测部分，以及用于控制电源的控制部分基于由电流检测部检测到的电流值来抑制电子发射部的电子的发射容量的劣化。版权所有（C）2011，JPO＆INPIT

4. 发明专利

JP2013042580A High voltage generator 审中-公开
标题翻译：高压发电机
公开(公告)号：JP2013042580A
公开(公告)日：2013-02-28
申请号：JP2011176659
申请日：2011-08-12
申请人： Futex Co Ltd , フューテックス株式会社 , Onizuka Glass:Kk , 株式会社鬼塚硝子
发明人： FUKUDA YASUNARI , KUMANO MITSUAKI , NAKAMURA TOMONOBU
IPC分类号： H02M7/10
摘要： PROBLEM TO BE SOLVED: To provide a high voltage generator which does not cause electric discharge even when formed in a small size.SOLUTION: A high voltage generator 1 has: a high voltage generation part 11 formed by connecting multiple electronic components (a capacitor C, a diode D) and generating high voltage; a container 2 housing the high voltage generation part 11; and a silicon rubber 17 which is a discharge prevention material and fills the container 2 so as to cover the high voltage generation part 11. The container 2 is made of glass and is seamlessly formed as a single body. Since no gap is formed inside a wall of the glass container 2, even if the size of the container 2 is reduced, electric discharge does not occur in the high voltage generation part 11.
摘要翻译：要解决的问题：提供即使形成小尺寸也不引起放电的高压发生器。解决方案：高电压发生器1具有：通过连接多个电子部件（电容器C，二极管D）和产生高电压而形成的高电压产生部分11; 容纳高压发生部11的容器2; 以及作为防放电材料的硅橡胶17，填充容器2以覆盖高压产生部11.容器2由玻璃制成，并且作为单体无缝地形成。由于在玻璃容器2的壁内没有间隙形成，所以即使容器2的尺寸减小，高电压产生部11也不会发生放电。（C）2013，JPO＆INPIT

5. 发明专利

JP2010198970A Method of manufacturing field emission electron source 有权
标题翻译：制造场发射电子源的方法
公开(公告)号：JP2010198970A
公开(公告)日：2010-09-09
申请号：JP2009044098
申请日：2009-02-26
申请人： Onizuka Glass:Kk , Stanley Electric Co Ltd , スタンレー電気株式会社 , 株式会社鬼塚硝子
发明人： MATSUMOTO TAKAHIRO , ONIZUKA YOSHIHIRO , NAKAMURA TOMONOBU , SADATSUKA ATSUO
IPC分类号： H01J9/02
摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing a field emission electron source having an acicular structure on the surface. SOLUTION: The field emission electron source 1 is manufactured by plasma-treating a field emission electron source material 4 consisting of a graphite interlayer compound equipped with heavy metal atoms intercalated between layers. The field emission electron source 1 is manufactured by supporting a field emission electron source material 4 made of a graphite single body with a material holder 6 consisting of a graphite interlayer compound equipped with heavy metal atoms intercalated between layers, and subjecting it to plasma treatment. The heavy metal may be one or more heavy metal selected from antimony, copper, nickel, cobalt, iron, platinum, titanium, vanadium, chromium, manganese, yttrium, niobium, molybdenum, palladium, silver, gold, tin, tungsten, and rhenium. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种在表面上制造具有针状结构的场致发射电子源的方法。解决方案：场致发射电子源1通过等离子体处理由层间夹有重金属原子的石墨层间化合物构成的场致发射电子源材料4来制造。场致发射电子源1通过由石墨单体构成的场致发射电子源材料4与由层间夹有重金属原子的石墨层间化合物构成的材料保持体6进行支撑而进行等离子体处理而制造。重金属可以是选自锑，铜，镍，钴，铁，铂，钛，钒，铬，锰，钇，铌，钼，钯，银，金，锡，钨和铼中的一种或多种重金属。。版权所有（C）2010，JPO＆INPIT

6. 发明专利

JP2011154980A Field emission type electron source and method of manufacturing the same 有权
标题翻译：场发射型电子源及其制造方法
公开(公告)号：JP2011154980A
公开(公告)日：2011-08-11
申请号：JP2010017440
申请日：2010-01-28
申请人： Onizuka Glass:Kk , Stanley Electric Co Ltd , スタンレー電気株式会社 , 株式会社鬼塚硝子
发明人： MATSUMOTO TAKAHIRO , ONIZUKA YOSHIHIRO , NAKAMURA TOMONOBU , SADATSUKA ATSUO , MIMURA SHUSUKE
IPC分类号： H01J9/02 , H01J1/304
摘要： PROBLEM TO BE SOLVED: To sharpen a surface structure of a carbon material constituting a cold cathode of a field emission type electron source, and reduce production cost by performing the sharpening in a single step. SOLUTION: In a method of manufacturing the field emission type electron source equipped with the cold cathode which discharges electrons by being applied with an electric field, by exposing the carbon material 10 to be a material of the cold cathode to a combustion flame 11 of a mixture of hydrogen and oxygen, an etching treatment to form a nanometer structure of carbon on a surface of the carbon material 10 is performed, and the cold cathode is formed of the obtained carbon material 10. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：为了锐化构成场发射型电子源的冷阴极的碳材料的表面结构，并且通过在一个步骤中进行锐化来降低生产成本。解决方案：在制造具有通过施加电场而放电电子的冷阴极的场发射型电子源的制造方法中，通过将作为冷阴极的材料的碳材料10暴露于燃烧火焰 11的氢和氧的混合物，进行在碳材料10的表面上形成碳纳米结构的蚀刻处理，冷阴极由所得碳材料10形成。版权所有（C））2011，JPO＆INPIT

7. 发明专利

JP2013191682A Electrode substrate, circuit pattern inspection apparatus including the same 有权
标题翻译：电极基板，电路图案检查装置，包括它们
公开(公告)号：JP2013191682A
公开(公告)日：2013-09-26
申请号：JP2012056043
申请日：2012-03-13
申请人： Oht Inc , オー・エイチ・ティー株式会社 , Onizuka Glass:Kk , 株式会社鬼塚硝子
发明人： HAMORI HIROSHI , ONIZUKA YOSHIHIRO , NAKAMURA TOMONOBU
IPC分类号： H05K1/11 , G01R31/02 , G01R31/302 , H05K1/02 , H05K1/14 , H05K3/00
摘要： PROBLEM TO BE SOLVED: To solve such a problem of an electrode substrate on which a non-contact sensor electrode is formed, that the VIA wiring for connecting a sensor electrode on the front surface and an electrode pad on the back surface cannot be narrower than an interval determined by the drill diameter, when a hole is formed mechanically by means of a drill, and an inspection object has an inter-wiring distance of a conductive pattern which is equal to or smaller than the drill diameter.SOLUTION: In the sensor electrode substrate or a power supply electrode substrate used for inspection of a circuit pattern inspection apparatus, glass plates on which wiring is patterned are bonded, a glass piece is cut out from the glass plate, and bonded to other glass piece in the thickness direction, thus forming through wiring penetrating the front and back surfaces of the substrate.
摘要翻译：要解决的问题为了解决形成有非接触传感器电极的电极基板的问题，用于连接前表面的传感器电极的VIA布线和背面的电极焊盘不能比当通过钻头机械地形成孔时，由钻头直径确定的间隔，并且检查对象具有等于或小于钻头直径的导电图案的布线距离。解决方案：在传感器电极基板或用于电路图案检查装置的检查的电源电极基板，将布线图案化的玻璃板接合，从玻璃板切出玻璃片，并在厚度方向上与其他玻璃片接合，从而通过穿过基板的前表面和后表面的布线形成。

8. 发明专利

JP2012164597A Cold cathode device, and method of manufacturing the same 审中-公开
标题翻译：冷阴极设备及其制造方法
公开(公告)号：JP2012164597A
公开(公告)日：2012-08-30
申请号：JP2011025873
申请日：2011-02-09
申请人： Onizuka Glass:Kk , 株式会社鬼塚硝子
发明人： NAKAMURA TOMONOBU , ONIZUKA YOSHIHIRO , SADATSUKA ATSUO , KOIKE TAKAHISA
IPC分类号： H01J1/304 , H01J9/02 , H01J9/385 , H01J9/39 , H01J37/073
CPC分类号： H01J1/3044 , H01J9/025
摘要： PROBLEM TO BE SOLVED: To provide a cold cathode device arranged so that the temperature of a cold cathode can be increased to remove an adsorbed gas from the cold cathode at the time of evacuating a container for the purpose of increasing the degree of vacuum in a vacuum container of the cold cathode device.SOLUTION: A cold cathode device 1 comprises: a cold cathode 3 operable to emit electrons in response to application of a voltage; a filament 4 operable to heat the cold cathode 3; a conductive supporting shaft 6 operable to support the cold cathode 3; a glass tube 2 serving as a vacuum container in which the cold cathode 3, the heater 4, and the supporting shaft 6 are closed; heater terminals 7a and 7b led out of the glass tube 2, and connected to the filament 4; and a supporting member terminal 7c led out of the glass tube 2, and connected to the supporting shaft 6. The heater terminals 7a and 7b, and the supporting member terminal 7c are electrically independent of one another, and a desired voltage can be applied to the terminals independently and precisely.
摘要翻译：要解决的问题：提供一种冷阴极器件，其布置成使得可以增加冷阴极的温度以在抽空容器时从冷阴极除去吸附的气体，以增加其浓度在冷阴极装置的真空容器中真空。解决方案：冷阴极器件1包括：冷阴极3，其可操作以响应于施加电压而发射电子; 可操作以加热冷阴极3的灯丝4; 可操作以支撑冷阴极3的导电支撑轴6; 用作冷阴极3，加热器4和支撑轴6的真空容器的玻璃管2; 从玻璃管2引出的加热器端子7a和7b连接到灯丝4; 以及从玻璃管2引出的支撑构件端子7c，并且与支撑轴6连接。加热器端子7a和7b以及支撑构件端子7c彼此电独立，并且可以将期望的电压施加到终端独立精确。版权所有（C）2012，JPO＆INPIT

9. 发明专利

JP2009187684A Method for controlling electron flow of field emission type electron source 审中-公开
标题翻译：用于控制场发射型电子源的电子流的方法
公开(公告)号：JP2009187684A
公开(公告)日：2009-08-20
申请号：JP2008023388
申请日：2008-02-02
申请人： Onizuka Glass:Kk , Stanley Electric Co Ltd , スタンレー電気株式会社 , 株式会社鬼塚硝子
发明人： MATSUMOTO TAKAHIRO , ONIZUKA YOSHIHIRO , NAKAMURA TOMONOBU
IPC分类号： H01J37/04 , H01J1/304 , H01J37/073
摘要： PROBLEM TO BE SOLVED: To provide a method for controlling electron flow, which eliminates power loss in a field emission type electron source and enables power-saving and miniaturization of an apparatus using the field emission type electron source. SOLUTION: In the field emission type electron source which emits electrons by being applied with an electric field, a conductive material 12 is placed around an emitter 11 which emits an electron flow to a target 3, and the electron flow to be fed to the target is controlled by applying a voltage negative to the emitter 11 to the conductive material 12. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：解决的问题：提供一种控制电子流动的方法，其消除场致发射型电子源的功率损耗，并且能够使用场致发射型电子源的装置的功率节省和小型化。解决方案：在通过施加电场发射电子的场致发射型电子源中，导电材料12围绕发射到靶3的电子流的发射极11放置，并且要馈送的电子流通过向发射体11施加电压负极到导电材料12来控制靶。控制方法是：（C）2009，JPO＆INPIT

10. 发明专利

JP2013174483A X-ray inspection device and x-ray generation device 审中-公开
标题翻译： X射线检测装置和X射线发生装置
公开(公告)号：JP2013174483A
公开(公告)日：2013-09-05
申请号：JP2012038337
申请日：2012-02-24
申请人： Onizuka Glass:Kk , 株式会社鬼塚硝子
发明人： NAKAMURA TOMONOBU , ONIZUKA YOSHIHIRO
IPC分类号： G01N23/04
摘要： PROBLEM TO BE SOLVED: To provide an X-ray inspection device 1 which can form an electricity removal area Q2 in an area different from an inspection area Q1, is easily manufactured, is small-sized, can be manufactured at low cost and has low operation cost.SOLUTION: An X-ray inspection device 1 inspects an object to be inspected S by using an X-ray. The X-ray inspection device 1 has an X-ray source 8 for generating an X-ray, an inspection area Q1 in which the object to be inspected S receiving inspection is placed, an electricity removal area Q2 being an area in which an object (object to be inspected S) to be subjected to electricity removal is placed and being different from the inspection area Q1, a first X-ray emission outlet (opening 14a) for leading the X-ray outputted from the X-ray source 8 to the inspection area Q1, and a second X-ray emission outlet (opening 14b) being an X-ray emission outlet for leading the X-ray outputted from the X-ray source 8 to the electricity removal area Q2 and provided at a position different from the first X-ray emission outlet (opening 14a).
摘要翻译：要解决的问题：为了提供能够在与检查区域Q1不同的区域形成除电区域Q2的X射线检查装置1，容易制造，尺寸小，可以以低成本制造并且具有低操作费用。解决方案：X射线检查装置1使用X光检查检查对象S。 X射线检查装置1具有用于产生X射线的X射线源8，检查对象S接收检查的检查区域Q1，作为被检查体（检查对象S）被放置并且与检查区域Q1不同，第一X射线发射出口（开口14a），用于将从X射线源8输出的X射线引导到检查区域Q1和作为X射线排出口的第二X射线出射口（开口部14b），用于将从X射线源8输出的X射线导向除电区域Q2，并设置在不同的位置从第一X射线发射出口（开口14a）开始。

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