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    • 3. 发明专利
    • Printed wiring board and method of manufacturing the same
    • 印刷线路板及其制造方法
    • JP2011040530A
    • 2011-02-24
    • JP2009185685
    • 2009-08-10
    • Taiyo Holdings Co LtdYonezawa Dia Electronics Kk太陽ホールディングス株式会社米沢ダイヤエレクトロニクス株式会社
    • ITO KEIICHITAKEUCHI YOSHIFUMIARIMA MASAOIWAYAMA HARUTO
    • H05K3/18H05K3/26H05K3/38
    • H05K3/045H05K3/184H05K2203/1415
    • PROBLEM TO BE SOLVED: To provide a high-density printed wiring board including a precise and extremely fine copper circuit pattern formed on a substrate surface, and to provide a method of manufacturing the printed wiring board.
      SOLUTION: The method of manufacturing a printed wiring board includes: (a) a process for performing selective exposure and development to a photosensitive resist film formed on the substrate surface to form a resist pattern (5) that has a formed groove pattern of a portion for circuit formation and can be subjected to nonelectrolytic copper plating; (b) a process for performing nonelectrolytic copper plating to an exposure surface of a substrate of the groove pattern portion and to the entire surface of a patterned resist film and then performing electrolytic copper plating until the surface becomes nearly smooth to form a copper plating layer (7) covering the resist pattern; and (c) a process for uniformly reducing the copper plating layer by mechanical polishing and/or chemical polishing, or etching until the surface of the resist film is exposed to expose a copper circuit pattern (8) on the surface. Preferably, ultraviolet irradiation, heating treatment, and/or plasma treatment are performed to the resist film after pattern formation.
      COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:提供一种包括形成在基板表面上的精确且极细的铜电路图案的高密度印刷布线板,并提供制造印刷线路板的方法。 解决方案:制造印刷电路板的方法包括:(a)对形成在基板表面上的光敏抗蚀剂膜进行选择性曝光和显影的方法,以形成具有形成的凹槽图案的抗蚀剂图案(5) 电路形成的一部分,可以进行非电解镀铜; (b)对槽图形部分的基板的曝光表面和图案化抗蚀剂膜的整个表面进行非电解铜电镀,然后进行电解铜电镀直到表面几乎平滑以形成镀铜层的工艺 (7)覆盖抗蚀剂图案; 以及(c)通过机械抛光和/或化学抛光均匀地还原铜镀层的方法或蚀刻直到抗蚀剂膜的表面暴露以露出表面上的铜电路图案(8)。 优选地,在图案形成之后对抗蚀剂膜进行紫外线照射,加热处理和/或等离子体处理。 版权所有(C)2011,JPO&INPIT