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1. 发明专利

JP2001261481A SHEET FOR PROTECTING INNER SURFACE OF CARBONACEOUS CRUCIBLE 失效
公开(公告)号：JP2001261481A
公开(公告)日：2001-09-26
申请号：JP2000293916
申请日：2000-09-27
申请人： TOYO TANSO CO
发明人： OTA NAOTO , TOMITA YUJI , YAMAJI MASATOSHI , HIRAOKA TOSHIJI , NISHI HISANORI
IPC分类号： C30B15/10
摘要： PROBLEM TO BE SOLVED: To prepare inner surface-protecting sheet for protecting the inner surface of a carbonaceous crucible to which a quartz crucible is inserted, which protecting sheet is capable of suppressing the reaction of the carbonaceous crucible with gaseous SiO and is easy to take out the quartz crucible after pulling a single crystal. SOLUTION: A sheet-like carbon fiber processed good comprising a C/C material obtained by impregnating a resin into a sheet-like carbon fiber processed good composed of carbon fibers and carbonizing or a sheet-like carbon fiber processed good comprising a C/C material obtained by impregnating and/or coating pyrolytic carbon onto the sheet-like carbon fiber processed good composed of carbon fibers, having an ash content of

2. 发明专利

JPH10152391A CRUCIBLE FOR PULLING UP SINGLE CRYSTAL AND ITS PRODUCTION 失效
公开(公告)号：JPH10152391A
公开(公告)日：1998-06-09
申请号：JP17136597
申请日：1997-06-27
申请人： TOYO TANSO CO
发明人： YAMAJI MASATOSHI , NAGAOKA KATSUHIDE , HIRAOKA TOSHIJI , MATSUMOTO TSUYOSHI , ISHIKAWA TOMOJI
IPC分类号： C04B35/83 , C30B15/10 , C30B29/06 , H01L21/208
摘要： PROBLEM TO BE SOLVED: To provide a crucible for pulling up a single crystal having not only, a cylindrical body part but also a bowl-like bottom part composed of C/C composite material reinforced by filament-winding method. SOLUTION: This crucible for pulling up a single crystal composed of a fiber-reinforced carbon composite material is constituted of two or more suits of combinations obtained by combining filament windings of not only a circumferential direction reinforcing layer 23 but also axial direction reinforcing layers 22 and 26. The axial direction reinforcing layers 22 and 26 are formed by at least one of a level-winding 26 or a polar-winding 22 having 0 deg.-10 deg. winding angle against a center axis 16, and the circumferential direction reinforcing layer 23 is formed by at least one of a parallel winding 23 or a helical winding having 70 deg.-90 deg. winding angle against the center axis. The axial direction reinforcing layers 22 and 26 cover the center 17 of the bottom, and thereby the crucible having no hole and integrally composed of C/C composite material is obtained. A thermally decomposing carbon penetrates and also covers the surface of the C/C composite material.

3. 发明专利

JP2000247757A CARBON COMPOSITE MATERIAL REINFORCED WITH HIGHLY PURE CARBON FIBER AND ITS PRODUCTION 失效
公开(公告)号：JP2000247757A
公开(公告)日：2000-09-12
申请号：JP4628699
申请日：1999-02-24
申请人： TOYO TANSO CO
发明人： KONDO TERUHISA , SOGABE TOSHIAKI , HIRAOKA TOSHIJI , YAMAJI MASATOSHI , OTA NAOTO
IPC分类号： C04B35/52 , C04B35/524 , C04B35/83 , C30B15/10 , C30B29/06 , C30B35/00 , D01F9/12
摘要： PROBLEM TO BE SOLVED: To obtain the subject composite material which can give parts such as a crucible not causing the generation of a defective crystal on the formation of a semiconductor single crystal by controlling the total content of metal impurities and the contents of V and/or Fe among the metal impurities to specific values or less, respectively. SOLUTION: This carbon composite material reinforced with carbon fibers is produced by graphitizing a molded article comprising carbon fibers and a carbon material as a matrix. Therein, the total content of metal impurities is controlled to

4. 发明专利

JP2000086382A C/C CRUCIBLE FOR PULLING SINGLE CRYSTAL 失效
公开(公告)号：JP2000086382A
公开(公告)日：2000-03-28
申请号：JP26262898
申请日：1998-09-17
申请人： TOYO TANSO CO
发明人： TOMITA YUJI , YAMAJI MASATOSHI
IPC分类号： C30B15/10
摘要： PROBLEM TO BE SOLVED: To smooth the surface of a quartz crucible, to make the uniformly heating part of the quartz crucible wide and to improve qualities of single crystal ingot by making the crucible have an innermost face obtained by sticking a carbon fiber cloth having a high carbon fiber density to a mandrel in a multilayer and adjusting the gas permeability of the crucible to a specific value or lower than it. SOLUTION: This C/C crucible has =0.8 filaments/mm. The surface of the crucible is impregnated with pyrolytic carbon. The crucible is produced by laminating a carbon fiber cloth 11 impregnated with a matrix precursor such as a phenol resin, etc., to the surface of a mandrel attached to a filament winding apparatus. A projected part 13 is wound with carbon fibers and a level winding 14 (0-10 degrees from a central axis 16) reaching a cylindrical part 12 is carried out. A parallel winding 15 is performed. These operations are repeated several times to give a formed body. The formed body is carbonized, impregnated with a pitch, baked, reacted with a halogen gas and impregnated with pyrolytic carbon.

5. 发明专利

JP2000219592A CARBON FIBER REINFORCED CARBON COMPOSITE FOR SINGLE CRYSTAL PULLING UP APPARATUS 失效
公开(公告)号：JP2000219592A
公开(公告)日：2000-08-08
申请号：JP1924699
申请日：1999-01-28
申请人： TOYO TANSO CO
发明人： HIRAOKA TOSHIJI , SOGABE TOSHIAKI , YAMAJI MASATOSHI , OTA NAOTO
IPC分类号： C04B35/83 , C04B35/80 , C30B15/10
摘要： PROBLEM TO BE SOLVED: To make it possible to pull up a single crystal by cz-method high in thermal efficiency by selectively forming a pyrolyzed carbon coating film, which has an ISO- structure exhibiting high surface heat emissivity, on the whole or a portion of the surface of a crucible body formed from a carbon fiber reinforced carbon composite. SOLUTION: A crucible body 2 formed from a carbon fiber reinforced carbon composite, which is lightweight and has high mechanical strength, is obtained by impregnating pitch or a resin such as phenol resin into the carbon fiber in the form of plain fabric cloth or the like to be formed in matrix and applying carbonizing treatment and graphitizing treatment. Thereafter, a coating film 3 of pyrolytic carbon is formed on the surface of the crucible body 2 thus obtained. The coating film 3 is formed by pyrolyzing a hydrocarbon such as propane or the like using CVD-method, preferably while controlling the pyrolytic conditions so that the carbon coating film having the ISO-structure is formed. Thereby, the heat emissivity of the surface of the crucible body 2 becomes 0.45-0.75 when the heat emissivity of the virtual black body is set to 1. Single crystals can be pulled up with high heat efficiency by utilizing the obtained crucible 1 in the cz-process.

6. 发明专利

JPH10139581A HIGH-TEMPERATURE MEMBER FOR DEVICE FOR PULLING UP SINGLE CRYSTAL 失效
公开(公告)号：JPH10139581A
公开(公告)日：1998-05-26
申请号：JP21170497
申请日：1997-08-06
申请人： TOYO TANSO CO
发明人： YAMAJI MASATOSHI , HIRAOKA TOSHIJI , MIURA AKIHIRO
IPC分类号： C04B35/83 , C04B35/52 , C30B15/10 , C30B29/06
摘要： PROBLEM TO BE SOLVED: To suppress the formation of SiC by gaseous SiO2 and vapor deposition of Si as the micropores of the surface of a C/C material is filled by coating the surfaces of the high-temp. members made of the C/C material for a device for pulling up a single crystal with glassy carbon. SOLUTION: The C/C material having a light weight, high strength and heat resistance is used for the high-tap. members (quartz crucible supporting crucible, heat shields) installed in the device for pulling up the single crystal for silicon semiconductors, by which a contribution is made particularly to the operation performance to pull up the large-diameter single crystal. The C/C material is obtd. by graphitizing a molding formed by impregnating carbon fibers with pitch, etc., and the micropores exist at its surface. These micropores induce an SiC formation reaction with the gaseous SiO and constitute the condensation point of silicon vapor, thereby deteriorating the members. The surfaces of the members made of the C/C material are coated with the glassy carbon to a specific surface area of /g, by which the micropores are embedded and the defects described above are prevented. The C/C base material is immersed into the soln. of a polymer, such as phenolic resin and is subjected to a purity enhancing treatment, by which the dense glassy carbon is precipitated.

7. 发明专利

JPH03250032A BORON CARBIDE-CONTAINING CARBON FIBER-REINFORCED CARBON COMPOSITE MATERIAL, ITS PRODUCTION AND HOT-PRESSING MATERIAL CONTAINING THE SAME 失效
公开(公告)号：JPH03250032A
公开(公告)日：1991-11-07
申请号：JP4902290
申请日：1990-02-27
申请人： TOYO TANSO CO
发明人： YAMAJI MASATOSHI , NAGAOKA KATSUHIDE , HIRAOKA TOSHIJI
IPC分类号： C08J5/06 , B29C33/40 , B29C70/06 , B29K105/08 , C04B35/52 , C04B35/83 , C08J5/10 , C08J5/24
摘要： PURPOSE:To obtain the title material improved in oxidation resistance at high temperatures by uniformly dispersing boron carbide in a carbonaceous matrix comprising a carbon fiber-reinforced carbon composite material. CONSTITUTION:A nonwoven or woven fabric (A) of carbon fiber is impregnated with a mixture of a thermoplastic resin (B) with boron carbide (C), or component A is impregnated with component B and component C is uniformly sprinkled over the impregnated fabric to obtain a prepreg. This prepreg is molded under applied heat and pressure, fired at 1000 deg.C or below in a nonoxidizing atmosphere and heated to 2000 deg.C in a diminished pressure of 5 Torr or below to obtain the title material composed of the carbonaceous matrix of the carbon fiber-reinforced carbon composite material and component C uniformly dispersed therein.

8. 发明专利

JP2003201196A CRUCIBLE FOR PULLING SINGLE CRYSTAL 审中-公开
公开(公告)号：JP2003201196A
公开(公告)日：2003-07-15
申请号：JP2002306773
申请日：2002-10-22
申请人： TOYO TANSO CO
发明人： BITO SHINGO , MIYATANI TOSHIYUKI , TOMITA YUJI , YAMAJI MASATOSHI
IPC分类号： C04B35/83 , C30B15/10 , C30B29/06
摘要： PROBLEM TO BE SOLVED: To provide a crucible for pulling a single crystal, which is suppressed in the deformation and the detachment of carbon fibers during use by reducing machining of a bottom part of the crucible after being formed by a filament winding method or the like and which exhibits a long service life. SOLUTION: The crucible for pulling the single crystal comprises a side cylindrical part 2 and a bottom part 3. The crucible for pulling the single crystal is mainly made of a carbon fiber reinforced carbon composite and characterized in that in the central part of the bottom part 3, a nearly disk-shaped or columnar bottom central member 8 of a carbonaceous material is arranged, and the side peripheral face 16 of the bottom central member 8, a bottom part 3 adjacent to the bottom central member 8, and the side cylindrical part 2 are wound integrally by carbon fibers in multiple layers. COPYRIGHT: (C)2003,JPO

9. 发明专利

JP2000185995A CRUCIBLE FOR PULLING UP SINGLE CRYSTAL MADE OF CARBON- FIBER REINFORCED CARBON COMPOSITE MATERIAL 失效
公开(公告)号：JP2000185995A
公开(公告)日：2000-07-04
申请号：JP36372198
申请日：1998-12-22
申请人： TOYO TANSO CO
发明人： HIRAOKA TOSHIJI , YAMAJI MASATOSHI
IPC分类号： C04B35/83 , C30B15/10
摘要： PROBLEM TO BE SOLVED: To prevent the elimination of carbon fibers, prolong the life and stably install a crucible in a chamber by molding the crucible for pulling up a single crystal from a carbon-fiber reinforced carbon composite material and forming a connecting part of the bowl-shaped bottom in the central part to a device into a recessed state. SOLUTION: This crucible 41 for pulling up a single crystal made of a carbon-fiber reinforced carbon composite material is obtained by rotating a mandrel having a cylindrical part and a bulged part through a shaft part and winding carbon fibers impregnated with a resin which is a matrix precursor around the outer periphery thereof according to a filament winding method, heat-treating the resultant crucible- shaped molded product, carbonizing the resin, further carrying out graphitization and purity raising treatment, providing a molded product composed of the carbon-fiber reinforced carbon composite material, machining the molded product and forming the bottom in the central part into a recessed state. The recessed part 42 has a prescribed size and the wall thickness in the thinnest part is preferably >=50% based on the wall thickness of the lateral body section of the crucible. The crucible 41 is used for pulling up a single crystal such as silicon by the Czochralski process.

10. 发明专利

JPH11171683A HIGH-TEMPERATURE MEMBER FOR SINGLE CRYSTAL PULL-UP DEVICE, SINGLE CRYSTAL PULL-UP DEVICE EQUIPPED THEREWITH AND PRODUCTION OF THE HIGH-TEMPERATURE MEMBER 失效
公开(公告)号：JPH11171683A
公开(公告)日：1999-06-29
申请号：JP34742197
申请日：1997-12-17
申请人： TOYO TANSO CO
发明人： YAMAJI MASATOSHI , MITSUISHI MASAYUKI
IPC分类号： C30B15/10 , C30B15/14
摘要： PROBLEM TO BE SOLVED: To raise single crystal production efficiency by shortening the time-of- arrival to a vacuum for a silicon single crystal pull-up device. SOLUTION: The subject high-temperature member for a single crystal pull-up device is such one that a carbonaceous basal material 1 is coated with pyrolyzed carbon; wherein part of the pyrolyzed carbon coating layer is removed (so that the area corresponding to the removed part account for pref. 5-50% of the total surface area of this high-temperature member) so as to expose the carbonaceous basal material.

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