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1. 发明专利

JP2013079988A Optical waveguide device and method for manufacturing the same 有权
标题翻译：光波导装置及其制造方法
公开(公告)号：JP2013079988A
公开(公告)日：2013-05-02
申请号：JP2011218403
申请日：2011-09-30
申请人： Sumitomo Osaka Cement Co Ltd , 住友大阪セメント株式会社
发明人： FUJINO TETSUYA , KONDO KATSUTOSHI
IPC分类号： G02B6/122 , G02B6/12 , G02B6/13
CPC分类号： G02F1/035 , G02B2006/12116
摘要： PROBLEM TO BE SOLVED: To provide an optical waveguide device having excellent optical characteristics by suppressing oxidation of a metal film constituting a metal-loaded polarizer and etching due to a post step in a manufacturing process, and to provide a method for manufacturing the optical waveguide device.SOLUTION: This optical waveguide device has: a substrate 1 having an electrooptical effect; an optical waveguide 2 formed on the substrate; and a metal-loaded polarizer 3 formed so as to cover at least a part of the optical waveguide. The optical waveguide device is characterized in that a protecting film 33 is formed in the metal-loaded polarizer such that the protecting film covers the whole exposed portion of a metal film 30.
摘要翻译：解决问题：通过抑制构成负载金属的偏振片的金属膜的氧化和由于制造工序中的后置工序的蚀刻而提供具有优异的光学特性的光波导器件，并且提供一种制造方法光波导器件。该光波导装置具有：具有电光效应的基板1; 形成在基板上的光波导2; 以及形成为覆盖光波导的至少一部分的金属负载型偏振器3。光波导器件的特征在于，在金属负载的偏振器中形成保护膜33，使得保护膜覆盖金属膜30的整个暴露部分。（C）2013，JPO和INPIT

2. 发明专利

JP2012073328A Optical modulator 审中-公开
标题翻译：光学调制器
公开(公告)号：JP2012073328A
公开(公告)日：2012-04-12
申请号：JP2010216748
申请日：2010-09-28
申请人： Sumitomo Osaka Cement Co Ltd , 住友大阪セメント株式会社
发明人： ICHIOKA MASAYUKI , FUJINO TETSUYA
IPC分类号： G02F1/035
摘要： PROBLEM TO BE SOLVED: To provide an optical modulator that, even in use of a thin plate having an electro-optical effect and having a thickness of 10 μm or less, suppresses a warp or a crack of the thin plate and improves a product yield, and also suppresses the degradation of high-frequency characteristics.SOLUTION: An optical modulator includes a thin plate having an electro-optical effect and having a thickness of 10 μm or less, an optical waveguide formed on the thin plate, and modulation electrodes for modulating an optical wave transmitted in the optical waveguide. The thin plate is bonded through an adhesion layer to a reinforced substrate which has almost the same linear expansion coefficient as that of the thin plate and a dielectric constant lower than that thereof. In the reinforced substrate, grooves are formed on the surface of the adhesion layer side in parallel to the direction to which the optical waveguide extends.
摘要翻译：要解决的问题：提供一种光调制器，即使使用具有电光效应并且具有10μm以下的厚度的薄板，也可以抑制薄板的翘曲或裂纹，并提高产品产量，并且还抑制高频特性的劣化。解决方案：光调制器包括具有电光效应并且具有10μm或更小的厚度的薄板，形成在薄板上的光波导和用于调制在光波导中传输的光波的调制电极。薄板通过粘合层粘合到具有与薄板几乎相同的线性膨胀系数和比其低的介电常数的增强基板上。在增强基板中，在粘合层一侧的表面上平行于光波导延伸的方向形成槽。版权所有（C）2012，JPO＆INPIT

3. 发明专利

JP2013210484A Optical waveguide element 有权
标题翻译：光学元件
公开(公告)号：JP2013210484A
公开(公告)日：2013-10-10
申请号：JP2012080444
申请日：2012-03-30
申请人： Sumitomo Osaka Cement Co Ltd , 住友大阪セメント株式会社
发明人： TAKEMURA MOTOHIRO , KURIHARA MASANAO , FUJINO TETSUYA
IPC分类号： G02F1/035
CPC分类号： G02F1/035 , G02F1/0305 , G02F1/0356 , G02F2201/07 , G02F2202/22 , G02F2203/21
摘要： PROBLEM TO BE SOLVED: To provide an optical waveguide element in which electric charges accumulated in a substrate are effectively diffused to suppress DC drift and temperature drift.SOLUTION: The optical waveguide element includes: a substrate having electro-optic effects; an optical waveguide formed on the substrate; a buffer layer (BF layer) formed on the substrate; and a modulation electrode (a signal electrode and a ground electrode) which is formed on the buffer layer and modulates a light wave propagated in the optical waveguide. A charge diffusion layer for diffusing electric charges generated in the substrate is formed between the substrate and the buffer layer, and the charge diffusion layer is electrically connected to the ground electrode constituting the modulation electrode.
摘要翻译：要解决的问题：提供一种其中积累在基板中的电荷被有效扩散以抑制DC漂移和温度漂移的光波导元件。解决方案：光波导元件包括：具有电光效应的基板; 形成在基板上的光波导; 形成在基板上的缓冲层（BF层）; 以及形成在缓冲层上并调制在光波导中传播的光波的调制电极（信号电极和接地电极）。在衬底和缓冲层之间形成用于扩散在衬底中产生的电荷的电荷扩散层，并且电荷扩散层与构成调制电极的接地电极电连接。

4. 发明专利

JP2013079990A Optical waveguide element and method of manufacturing the same 有权
标题翻译：光波导元件及其制造方法
公开(公告)号：JP2013079990A
公开(公告)日：2013-05-02
申请号：JP2011218429
申请日：2011-09-30
申请人： Sumitomo Osaka Cement Co Ltd , 住友大阪セメント株式会社
发明人： JINRIKI TAKASHI , FUJINO TETSUYA , KURIHARA MASANAO
IPC分类号： G02F1/035
摘要： PROBLEM TO BE SOLVED: To provide an optical waveguide element which stabilizes DC drift, does not complicate a manufacturing process, and controls product characteristics accurately, and to provide a method of manufacturing the same.SOLUTION: An optical waveguide element comprises a substrate 1 having an electro-optical effect, an optical waveguide 2 formed on the substrate, a buffer layer 5 formed on the optical waveguide and having SiOas main material, and modulation electrodes 3,4 formed on the buffer layer and modulating light waves propagating through the optical waveguide. On the substrate side of the buffer layer, an area 6 is formed so that the content of Li becomes 1×10(atoms/cm) or more.
摘要翻译：要解决的问题：为了提供稳定DC漂移的光波导元件，不会使制造工艺复杂化，并且精确地控制产品特性，并提供其制造方法。解决方案：光波导元件包括具有电光效应的基板1，形成在基板上的光波导2，形成在光波导上并具有SiO 2的缓冲层5 作为主要材料，以及形成在缓冲层上的调制电极3,4，并且调制通过光波导传播的光波。在缓冲层的基板侧，形成区域6，使得Li的含量成为1×10（原子/ cm 2，SP POS =“POST”> 3 ）或更多。版权所有（C）2013，JPO＆INPIT

5. 发明专利

JP2013025283A Optical waveguide element 审中-公开
标题翻译：光学元件
公开(公告)号：JP2013025283A
公开(公告)日：2013-02-04
申请号：JP2011162904
申请日：2011-07-26
申请人： Sumitomo Osaka Cement Co Ltd , 住友大阪セメント株式会社
发明人： FUJINO TETSUYA , KURIHARA MASANAO , JINRIKI TAKASHI
IPC分类号： G02F1/035 , G02B6/12
CPC分类号： G02F1/035 , G02F2201/07
摘要： PROBLEM TO BE SOLVED: To provide an optical waveguide element which suppresses the dispersion of carriers such as Li ions into a buffer layer, and stabilizes driving voltage for a long term.SOLUTION: An optical waveguide element includes: a substrate 1 having electrooptical effect; an optical waveguide 2 formed on the substrate 1; a buffer layer 5 formed on the substrate 1; and modulation electrodes 3 and 4 formed on the buffer layer 5 and modulating light wave for transmitting the optical waveguide 2. Between the optical waveguide 2 and the buffer layer 5, an uneven distribution suppressing layer 6 for suppressing that metallic ions included in the substrate 1 are dispersed and unevenly distributed in the buffer layer 5 is provided.
摘要翻译：要解决的问题：提供抑制诸如Li离子的载流子分散到缓冲层中的光波导元件，并且长期稳定驱动电压。光波导元件包括：具有电光效应的基板1; 形成在基板1上的光波导2; 形成在基板1上的缓冲层5; 以及形成在缓冲层5上的调制电极3和4，并且调制用于透射光波导2的光波。在光波导2和缓冲层5之间，抑制包含在基板1中的金属离子的不均匀分布抑制层6 被分散并且不均匀地分布在缓冲层5中。版权所有（C）2013，JPO＆INPIT

6. 发明专利

JP2010256541A Wafer with inspection electrode and refractive index measuring method 有权
$Wafer with inspection electrode and refractive index measuring method$
标题翻译：带检查电极的波形和折射率测量方法
公开(公告)号：JP2010256541A
公开(公告)日：2010-11-11
申请号：JP2009105195
申请日：2009-04-23
申请人： Sumitomo Osaka Cement Co Ltd , 住友大阪セメント株式会社
发明人： MOTOTANI MASAYUKI , KONDO KATSUTOSHI , KANEHARA YUUKI , FUJINO TETSUYA , SUDO MASAAKI , ICHIKAWA JUNICHIRO
IPC分类号： G02F1/035 , G02B6/12
摘要： PROBLEM TO BE SOLVED: To simply and exactly measure refractive indexes of electrodes in a manufacturing process of an optical waveguide element on which optical waveguides and the electrodes are formed. SOLUTION: In the wafer 1 having an electrooptic effect, a plurality of optical waveguides 101; a travelling-wave type control electrode which is constituted by arranging hot electrodes and ground electrodes along the optical waveguides 101 for controlling light to be propagated on the optical waveguides by progressing electric signals between the electrodes; and at least two inspection electrodes 201, 202 which has the same cross-sectional shape and the same extending direction as those of the hot electrodes and has length different from each other are formed. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：简单且准确地测量在其上形成有光波导和电极的光波导元件的制造过程中的电极的折射率。解决方案：在具有电光效应的晶片1中，多个光波导101; 行波型控制电极，其通过沿着光波导101设置热电极和接地电极，通过在电极之间进行电信号来控制在光波导上传播的光; 并且形成具有与热电极相同的横截面形状和相同延伸方向并具有彼此长度不同的至少两个检查电极201,202。版权所有（C）2011，JPO＆INPIT

7. 发明专利

JP2003066392A Optical modulator 有权
标题翻译：光学调制器
公开(公告)号：JP2003066392A
公开(公告)日：2003-03-05
申请号：JP2001251308
申请日：2001-08-22
申请人： Sumitomo Osaka Cement Co Ltd , 住友大阪セメント株式会社
发明人： JINRIKI TAKASHI , FUJINO TETSUYA , SAKAMOTO TOSHIHIRO , KURIHARA MASANAO , SUGAMATA TORU
IPC分类号： G02F1/035
摘要： PROBLEM TO BE SOLVED: To provide an optical modulator which has a wider band width by lowering a microwave propagation loss.
SOLUTION: In this optical modulator having a substrate 1 having an electro- optical effect and electrode layers (4, 5 and 6) for modulating light that passes through a portion within the substrate and also formed on the substrate, a contact electrode is formed with at least two or more layers in the electrode layer, and electrical resistivity of a contact electrode layer 4 coming into contact with the substrate side is lower than those of the other layers.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：通过降低微波传播损耗来提供具有更宽带宽的光调制器。解决方案：在具有电光效应的基板1和用于调制通过基板内的部分并且还形成在基板上的光的电极层（4,5和6）的光调制器中，形成接触电极，电极层中的至少两层以上，与基板侧接触的接触电极层4的电阻率低于其他层的电阻率。

8. 发明专利

JP2014199339A 光導波路素子有权
标题翻译：光学元件
公开(公告)号：JP2014199339A
公开(公告)日：2014-10-23
申请号：JP2013074731
申请日：2013-03-29
申请人：住友大阪セメント株式会社 , Sumitomo Osaka Cement Co Ltd
发明人： FUJINO TETSUYA , KAZUAKI HIDEKI , TAKEMURA MOTOHIRO
IPC分类号： G02F1/035
CPC分类号： G02F1/2255 , G02F2201/12 , G02F2201/127
摘要：【課題】制御電極に電気的接続配線を接続する作業において当該基板の破損を抑制することが可能な光導波路素子を提供すること。【解決手段】電気光学効果を有する基板と、該基板に形成された光導波路と、該光導波路を伝搬する光波を制御するための制御電極(例えば、信号電極)とを有する光導波路素子において、該制御電極が直流電圧を印加する電極であり、該電極の厚みが10μm以下であって、該制御電極と外部の電気回路とを電気的に接続するため、該制御電極の一部に形成された接続用パッドを有し、該接続用パッドの平面上の面積が22000μm2以上であり、該接続用パッドの全体の厚さが10μmより厚いことを特徴とする。【選択図】図1
摘要翻译：要解决的问题：提供一种在将电连接布线与控制电极连接的工作中可抑制基板断裂的光波导元件。解决方案：光波导元件包括具有电光效应的基板，形成在基板上的光波导，以及用于控制在光波导中传播的光波的控制电极（例如，信号电极）。控制电极接收具有10μm以下的厚度的DC电压，并且包括形成在控制电极的一部分中的连接焊盘，以便电连接控制电极和外部电路。连接焊盘的面积为22000μm以上，总厚度大于10μm。

9. 发明专利

JP2013080007A Optical waveguide element 审中-公开
标题翻译：光学元件
公开(公告)号：JP2013080007A
公开(公告)日：2013-05-02
申请号：JP2011218558
申请日：2011-09-30
申请人： Sumitomo Osaka Cement Co Ltd , 住友大阪セメント株式会社
发明人： TAKEMURA MOTOHIRO , FUJINO TETSUYA , JINRIKI TAKASHI
IPC分类号： G02B6/122 , G02F1/035
CPC分类号： G02F1/035 , G02B6/10 , G02B6/122 , G02B6/30 , G02F1/011 , G02F1/0134 , G02F2201/38 , G02F2202/28
摘要： PROBLEM TO BE SOLVED: To provide an optical waveguide element which has an electrooptical effect and uses a thin plate with a thickness of 10 μm or less that removes slab propagation light reflected on the end face of the element and suppresses the deterioration of operation characteristics.SOLUTION: In an optical waveguide element which has an electrooptical effect, and has a thin plate that has a thickness of 10 μm or less and has an optical waveguide formed therein, and a reinforcing substrate adhered onto the thin plate through an adhesive layer, an antireflection film is formed on a part of the side faces of the optical waveguide element.

10. 发明专利

JP2013076753A Optical waveguide element and manufacturing method thereof 审中-公开
标题翻译：光学元件及其制造方法
公开(公告)号：JP2013076753A
公开(公告)日：2013-04-25
申请号：JP2011215328
申请日：2011-09-29
申请人： Sumitomo Osaka Cement Co Ltd , 住友大阪セメント株式会社
发明人： YAMANE YUJI , SAKUMA MITSURU , FUJINO TETSUYA , JINRIKI TAKASHI
IPC分类号： G02B6/13 , G02B6/12 , G02F1/035
CPC分类号： G02F1/035 , Y10T156/1002
摘要： PROBLEM TO BE SOLVED: To provide an optical waveguide element, in which, even when a thin plate having an electro-optic effect and having a thickness of 10 μm or less is utilized and is bonded to a reinforcing substrate, breakage of the thin plate and the reinforcing substrate is suppressed and performance degradation such as light loss due to minute cracks is suppressed.SOLUTION: The optical waveguide element includes: a thin plate 1 having an electro-optic effect and a thickness of 10 μm or less and having an optical waveguide 2 formed thereon; and a reinforcing substrate 6 bonded to the thin plate via an adhesive layer 5. A rugged structure is formed on a surface on the thin plate side of the reinforcing substrate 6, and the reinforcing substrate is subjected to heat treatment at a high temperature equal to or lower than the Curie temperature after formation of the rugged structure and before bonding to the thin plate.
摘要翻译：要解决的问题：提供一种光波导元件，其中即使当使用具有电光效应并且具有10μm或更小的厚度的薄板并且结合到增强基板时，断裂薄板和增强基板被抑制，并且抑制由于微小裂纹引起的光损失等性能劣化。光波导元件包括：具有电光效应和10μm以下的厚度且在其上形成有光波导2的薄板1; 以及经由粘合剂层5粘合到薄板上的加强基板6.在加强基板6的薄板侧的表面上形成凹凸结构，并且将加强基板在等于或者在形成凹凸结构之后并且在粘合到薄板之前低于居里温度。版权所有（C）2013，JPO＆INPIT

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