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    • 1. 发明专利
    • Wiring structure, its manufacturing method, and semiconductor device
    • 接线结构及其制造方法和半导体器件
    • JP2007220967A
    • 2007-08-30
    • JP2006041024
    • 2006-02-17
    • Sumitomo Bakelite Co Ltd住友ベークライト株式会社
    • SAITO HIDENORI
    • H01L23/52H01L21/3205H01L21/768H01L23/522
    • PROBLEM TO BE SOLVED: To provide a multilayer wiring structure which has a good Cu diffusiveness and is excellent in a heat resistance, an electrical property, especially a dielectric constant and an adhesive property or the like, and to provide a semiconductor device which is equipped with the multilayer wiring structure and is excellent in the electrical property.
      SOLUTION: A method of manufacturing a wiring structure comprises the steps of: (1) forming an alloy layer containing a copper layer or copper in a groove formed in an insulating film, and forming a barrier metal layer; (2) forming a cap layer constituted by a metallic layer containing Co, Ni or W on a front surface of the alloy layer containing the copper layer or copper; and (3) forming an organic system insulating material layer having a copper spread preventing ability. Wiring structure is disclosed having the alloy layer containing the copper layer or copper made by using the manufacturing method. The semiconductor device is also disclosed as equipped with the wiring structure.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 解决的问题:提供一种具有良好的Cu扩散性并且具有优异的耐热性,电性能,特别是介电常数和粘合性等的多层布线结构,并提供半导体器件 其具有多层布线结构,并且电性能优异。 解决方案:制造布线结构的方法包括以下步骤:(1)在形成在绝缘膜中的沟槽中形成含有铜层或铜的合金层,形成阻挡金属层; (2)在包含铜层或铜的合金层的表面上形成由含有Co,Ni或W的金属层构成的盖层; 和(3)形成具有铜扩散防止能力的有机系绝缘材料层。 公开了具有通过使用该制造方法制造的包含铜层或铜的合金层的布线结构。 还公开了配备有布线结构的半导体器件。 版权所有(C)2007,JPO&INPIT
    • 4. 发明专利
    • Semiconductor device and its manufacturing method
    • 半导体器件及其制造方法
    • JP2007081162A
    • 2007-03-29
    • JP2005267572
    • 2005-09-14
    • Sumitomo Bakelite Co Ltd住友ベークライト株式会社
    • MATSUTANI MIHOKOSAITO HIDENORI
    • H01L21/3205
    • PROBLEM TO BE SOLVED: To provide a multilayer interconnection structure excellent in a Cu diffusion, a heat resistance, an electrical performance, especially, a dielectric constant, and an adhesion; and to provide a semiconductor device having the structure and excellent in the electrical performance. SOLUTION: The semiconductor device comprises an insulating layer formed on a semiconductor substrate, an interconnection layer comprising a copper penetrating and buried in the insulating layer and an alloy including a copper, a nitrogenous layer having a function for preventing the diffusion of a copper for constituting an interconnection layer on at least the upper part of the interconnection layer and an alloy including a copper, and a layer comprising an organic insulating material having a function for preventing the diffusion of a copper constituting the interconnection layer and an alloy including a copper. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供Cu扩散,耐热性,电性能,特别是介电常数和粘合性优异的多层互连结构; 并且提供具有结构并且具有优异的电性能的半导体器件。 解决方案:半导体器件包括形成在半导体衬底上的绝缘层,包括穿透并埋在绝缘层中的铜的互连层和包含铜的合金,具有防止扩散的功能的含氮层 用于在互连层的至少上部构成互连层的铜和包含铜的合金,以及包含具有防止构成互连层的铜的扩散的功能的有机绝缘材料的层和包含 铜。 版权所有(C)2007,JPO&INPIT
    • 5. 发明专利
    • Optical component composition and optical component
    • 光学元件组成和光学元件
    • JP2009256613A
    • 2009-11-05
    • JP2009049514
    • 2009-03-03
    • Sumitomo Bakelite Co Ltd住友ベークライト株式会社
    • SAITO HIDENORIOKI HIROMIHORIMOTO AKIHIRO
    • C08F299/02C08G81/00C08L77/10G02B1/04G02B6/12
    • PROBLEM TO BE SOLVED: To provide an optical component composition having excellent optical properties, heat resistance properties, adhesiveness properties and workability, and to provide an optical component having excellent optical properties and heat resistance. SOLUTION: The optical component composition contains a specific hydroxy amide polymer having a hydroxy group in an aromatic nucleus, a specific polyamide polymer having an ethynyl group on a side chain, and a solvent. The optical component is obtained when a film is formed by using the optical component composition, the hydroxy amide moiety of the hydroxy amide polymer in the optical component composition is subjected to a condensation reaction, and the amide polymer is subjected to a crosslinking reaction. COPYRIGHT: (C)2010,JPO&INPIT
    • 解决的问题:提供具有优异的光学性能,耐热性,粘合性和加工性的光学组分组合物,并提供具有优异的光学性能和耐热性的光学组件。 光学组合物组合物含有在芳香核中具有羟基的特定羟基酰胺聚合物,侧链上具有乙炔基的特定聚酰胺聚合物和溶剂。 当通过使用光学组分组合物形成膜时获得光学组件,光学组件组合物中的羟基酰胺聚合物的羟基酰胺部分进行缩合反应,并且使酰胺聚合物进行交联反应。 版权所有(C)2010,JPO&INPIT
    • 6. 发明专利
    • Composition for optical component and optical component
    • 光学元件和光学元件的组成
    • JP2009235385A
    • 2009-10-15
    • JP2009029339
    • 2009-02-12
    • Sumitomo Bakelite Co Ltd住友ベークライト株式会社
    • SAITO HIDENORIOKI HIROMIHORIMOTO AKIHIRO
    • C08L79/04C08G73/22C08L83/04G02B1/04G02B6/12G02B6/13
    • PROBLEM TO BE SOLVED: To provide a composition for optical components, excellent in optical characteristics, heat resistance, adhesive characteristics, processability and the like, and to provide the optical components excellent in optical characteristics and heat resistance. SOLUTION: The composition for the optical components comprises a hydroxyamide polymer represented by formula (A) [in formula (A), X represents a group selected from groups represented by following formula (B) (not shown) and two X's in the formula may be the same or different; Y represents at least one group selected from groups represented by following formula (C) (not shown), formula (D) (not shown), formula (E) (not shown)or formula (F) (not shown); Z represents a group selected from groups represented by formula (G) (not shown); m and n are 0 or an integer of ≥1 and m+n is an integer of ≥4; and the sequence of the recurring units in formula (A) is either of block-like and random-like], an alkoxysilane polymer represented by formula (I) and a solvent, wherein the hydroxyamide polymer has ≥5,000 but ≤15,000 weight-average molecular weight expressed in terms of standard polystyrene. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供光学特性,耐热性,粘合特性,加工性等优异的光学部件用组合物,提供光学特性和耐热性优异的光学部件。 光学组分的组合物包含由式(A)表示的羟基酰胺聚合物[在式(A)中,X表示选自下式(B)表示的基团(未示出)和两个X' 该公式可以相同或不同; Y表示选自下列式(C)(未示出),式(D)(未示出),式(E)(未示出)或式(F)(未示出) Z表示选自式(G)表示的基团(未示出)的基团。 m和n为0或≥1的整数,m + n为≥4的整数; 式(A)中的重复单元的序列是块状和无规则的单体,式(I)表示的烷氧基硅烷聚合物和溶剂,其中羟基酰胺聚合物的重均分子量≥5,000,但≤15,000 分子量用标准聚苯乙烯表示。 版权所有(C)2010,JPO&INPIT
    • 7. 发明专利
    • Composition for optical component, optical component and optical device manufactured therefrom
    • 光学元件,光学元件和光学器件的组成
    • JP2009127045A
    • 2009-06-11
    • JP2007307453
    • 2007-11-28
    • Sumitomo Bakelite Co Ltd住友ベークライト株式会社
    • SAITO HIDENORIOKI HIROMIHORIMOTO AKIHIRO
    • C08G69/26
    • PROBLEM TO BE SOLVED: To provide a composition for optical components, which is excellent in optical characteristics and heat resistance. SOLUTION: The composition for optical components comprises a solvent and the hydroxyamide polymer which has an unsaturated hydrocarbon group to be cross-linked by heat and/or active energy rays and is shown by formula (A) (wherein two Xs are selected from the groups shown by formula (B) and may be the same or different from each other; Y is selected from the groups shown by formula (C), formula (D), formula (E) and formula (F); Z is selected from the groups shown by formula (G); m is an integer of ≥1, n is an integer of ≥0 and (m+n) is an integer of ≥4, but the formulae (B) to (G) are not shown here). COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供光学特性和耐热性优异的光学部件用组合物。 光学组分的组合物包括溶剂和具有通过加热和/或活性能量射线交联的不饱和烃基的羟基酰胺聚合物,并且由式(A)表示(其中选择两个X 从式(B)所示的基团可以相同或不同; Y选自式(C),式(D),式(E)和式(F)所示的基团; Z是 选自由式(G)表示的基团; m为≥1的整数,n为≥0的整数,(m + n)为≥4的整数,式(B)〜(G)为 这里未示出)。 版权所有(C)2009,JPO&INPIT