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1. 发明专利

JP2009246192A Collection jig, and polluting-matter collection apparatus having same jig 有权
标题翻译：收藏夹及其相关收藏品收藏品
公开(公告)号：JP2009246192A
公开(公告)日：2009-10-22
申请号：JP2008092178
申请日：2008-03-31
申请人： Sumika Chemical Analysis Service Ltd , 株式会社住化分析センター
发明人： UKISHIMA SHIRO , HOSHINO HIDEKI , AIHARA HIROYUKI , HASEGAWA MIKIO , MACHIDA AKIRA
IPC分类号： H01L21/66
摘要： PROBLEM TO BE SOLVED: To provide a collection jig which allows a liquid to contact only the outer peripheral portion of a wafer accurately, and also to provide a polluting-matter collection apparatus which collects the polluting matter staying on the outer peripheral portion of the wafer simply and efficiently with the collection jig provided thereto.
SOLUTION: The collection jig 30 provided to the polluting-matter collection apparatus has a collection body 31 and a controlling means 32. The controlling portion 32 can seal a storing portion 34 of the collection body 31 with stores a liquid by fitting to the upper portion of the collection body 31 with screws. The liquid is thereby brought into contact only with the end surface of the outer peripheral portion of the wafer when the wafer is inserted into a penetration portion 35 of the collection body 31 for exposing the liquid stored in the storing portion 34 to the outside.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种允许液体仅精确地接触晶片的外周部分的收集夹具，并且还提供一种收集留在外周部分上的污染物质的污染物质收集装置的晶片简单有效地提供了收集夹具。提供给污染物收集装置的收集夹具30具有收集体31和控制装置32.控制部分32可以通过装配液体来密封收集体31的存储部分34，收集体31的上部用螺丝。因此，当晶片插入收集体31的穿透部分35中时，使液体仅与晶片的外周部分的端面接触，以将存储在存储部分34中的液体暴露于外部。版权所有（C）2010，JPO＆INPIT

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