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1. 发明专利

JP2009014522A Column and pollution state evaluating method of gas 审中-公开
标题翻译：气相色谱和污染状态评估方法
公开(公告)号：JP2009014522A
公开(公告)日：2009-01-22
申请号：JP2007177013
申请日：2007-07-05
申请人： Sumika Chemical Analysis Service Ltd , 株式会社住化分析センター
发明人： IIKAWA REIKO , MORIYA TATSU , UMEHARA KAZUHIRO , NISHIOKA RYOTA
IPC分类号： G01N30/88 , G01N30/00 , G01N30/04 , G01N30/06 , G01N30/08
摘要： PROBLEM TO BE SOLVED: To provide a method for simply and precisely evaluating a pollution state in a gas without using an absorbing solution when a pollutant in the gas is sampled.
SOLUTION: A gas adsorbing column comprises a column which is filled with a filler prepared by holding an adsorbent on a base material with an average particle size or cross-sectional average diameter of 500-1,000 μm and keeps a void volume of 5-100 μl. The gas to be evaluated is passed through the column to adsorb the acid substance or base substance contained in the gas by the filler in the column and the adsorbed acid substance or base substance is extracted on-line by a solvent to evaluate the pollution state of the gas.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种在对气体中的污染物进行取样时，不使用吸收溶液简单且精确地评价气体中的污染状态的方法。气体吸附柱包括填充有通过在平均粒径或截面平均直径为500-1,000μm的基材上保持吸附剂而制备的填料的柱，并保持空隙体积为5 -100μl。待评价的气体通过塔，通过塔中的填料吸附气体中所含的酸性物质或碱性物质，并通过溶剂在线提取吸附的酸物质或碱物质，以评价污染状态气体。版权所有（C）2009，JPO＆INPIT

2. 发明专利

JP2004317142A Method for determining quantitatively impurities of substance surface 有权
公开(公告)号：JP2004317142A
公开(公告)日：2004-11-11
申请号：JP2003107499
申请日：2003-04-11
申请人： Sumika Chemical Analysis Service Ltd , 株式会社住化分析センター
发明人： MOMOCHI KANA , SEKIMIZU RYOKO , IIKAWA REIKO , IMAI MAKOTO
IPC分类号： G01N27/62 , G01N1/10 , G01N1/28 , G01N1/36 , G01N27/447 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To provide a method for determining quantitatively impurities of a substance surface by high sensitivity. SOLUTION: This method for determining quantitatively the impurities of the substance surface comprises a step dripping or spraying extract on the substance surface (the first step), a step recovering the extract dripped or sprayed (the second step), a step adding a base or an acid to the extract recovered (the third step), a step obtaining a concentrated residue by concentrating the extract to which the base or the acid is added (the fourth step), a step redissolving the concentrated residue and obtaining an aqueous solution by adding water to it (the fifth step), and a step analyzing quantitatively the aqueous solution using a separation analysis device (the sixth step). COPYRIGHT: (C)2005,JPO&NCIPI

3. 发明专利

JP2011242401A Column 审中-公开
标题翻译：柱
公开(公告)号：JP2011242401A
公开(公告)日：2011-12-01
申请号：JP2011168065
申请日：2011-08-01
申请人： Sumika Chemical Analysis Service Ltd , 株式会社住化分析センター
发明人： IIKAWA REIKO , MORIYA TATSU , UMEHARA KAZUHIRO , NISHIOKA RYOTA
IPC分类号： G01N30/88 , G01N30/00 , G01N30/06
摘要： PROBLEM TO BE SOLVED: To provide a method for simply and precisely evaluating a pollution state in a gas without using an absorbing solution when a pollutant in the gas is sampled.SOLUTION: A gas adsorbing column includes a column which is filled with a filler prepared by holding an adsorbent on a base material with an average particle size or cross-sectional average diameter of 500-1000 μm and keeps a void volume of 5-100 μl. The adsorbent is preferably a base substance or an acid substance.
摘要翻译：要解决的问题：提供一种在对气体中的污染物进行取样时，不使用吸收溶液简单且精确地评价气体中的污染状态的方法。气体吸附柱包括填充有填料的柱，该填料通过将平均粒径或截面平均直径为500-1000μm的基材上的吸附剂保持，并保持空隙体积为5 -100μl。吸附剂优选为碱性物质或酸性物质。版权所有（C）2012，JPO＆INPIT

4. 发明专利

JP2008185503A Evaluating method of contamination state of substrate manufacturing space 审中-公开
标题翻译：衬底制造空间污染状态评估方法
公开(公告)号：JP2008185503A
公开(公告)日：2008-08-14
申请号：JP2007020541
申请日：2007-01-31
申请人： Sumika Chemical Analysis Service Ltd , 株式会社住化分析センター
发明人： HASEGAWA MIKIO , IIKAWA REIKO , MORIYA TATSU , HARADA AI
IPC分类号： G01N1/22 , G01N33/00
摘要： PROBLEM TO BE SOLVED: To provide a method of evaluating the amount of acid/base of space using a passive sampler capable of easily and efficiently adsorbing an acid matter or base matter without operation such as suction by a pump.
SOLUTION: This evaluating method of a contamination state of space is used in a substrate manufacturing process. In the substrate manufacturing process, the passive sampler having at least one kind of compound selected from a compound group consisting of carbonate of alkali metal and hydroxide of alkali metal is arranged as an absorbent in a space via which the substrate passes, the acid matter in the space is adsorbed by the adsorbent in the passive sampler, then the adsorbed acid matter is desorbed from the adsorbent, and the desorbed acid matter is analyzed.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种使用能够容易且有效地吸附酸性物质或基础物质的无源采样器来评估空间的酸/碱量的方法，而无需泵的抽吸等操作。解决方案：在基板制造工艺中使用这种空间污染状态的评估方法。在基板制造工序中，具有选自碱金属碳酸盐和碱金属氢氧化物的化合物组中的至少一种化合物的被动取样器作为吸收剂配置在基板通过的空间中，酸性物质空间被被动取样器中的吸附剂吸附，然后吸附的酸物质从吸附剂中脱附，分析了解吸的酸物质。版权所有（C）2008，JPO＆INPIT

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