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    • 2. 发明专利
    • Manufacture of high-density trenched dmos using sidewall spacer
    • 使用平台间隔件制造高密度高温DMOS
    • JP2008199048A
    • 2008-08-28
    • JP2008091980
    • 2008-03-31
    • Siliconix Incシリコニックス・インコーポレイテッドSiliconix Incorporated
    • HSHIEH FWU-IUANHO YUEH-SELAN BOSCODUN JOWEI
    • H01L29/78
    • PROBLEM TO BE SOLVED: To provide a trenched DMOS transistor having a deep diffusion region which minimizes a region required to provide the deep body diffusion region having a sufficient depth.
      SOLUTION: A first oxide layer is formed on an epitaxial layer, and is patterned to define a deep body area under which the deep body region is formed. Before a second oxide layer is formed, first conductive type diffusion preventive regions are formed in each of the deep body areas. A part of the second oxide layer is removed to expose a central portion of the diffusion preventive region, and it leaves the first oxide layer and an oxide sidewall spacer to cover a periphery of the diffusion preventive region. Second conductive type deep body diffusion is performed, by which the deep body region is formed in an epitaxial region between the sidewall spacers. The periphery of the diffusion preventive region suppresses lateral diffusion of a deep body diffusion portion, without suppressing a diffusion depth remarkably.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供具有深度扩散区域的沟槽DMOS晶体管,其使得提供具有足够深度的深体扩散区域所需的区域最小化。 解决方案:第一氧化物层形成在外延层上,并被图案化以限定形成深体区域的深体区域。 在形成第二氧化物层之前,在每个深体区域中形成第一导电型扩散防止区域。 去除第二氧化物层的一部分以暴露扩散防止区域的中心部分,并且其离开第一氧化物层和氧化物侧壁间隔物以覆盖扩散防止区域的周边。 进行第二导电类型的深体扩散,通过该第二导电型深体扩散,在侧壁间隔件之间的外延区域中形成深体区。 扩散防止区域的周边抑制深体扩散部分的横向扩散,而不显着抑制扩散深度。 版权所有(C)2008,JPO&INPIT