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    • 2. 发明专利
    • Filling device
    • 填充设备
    • JP2009083882A
    • 2009-04-23
    • JP2007254315
    • 2007-09-28
    • Shibuya Kogyo Co LtdTokyo Ohka Kogyo Co Ltd東京応化工業株式会社澁谷工業株式会社
    • NAKAGAWA KOJIMUROI MASAAKITORIGOE SHINICHINAGAIKE FUMIHIRONAKAMURA RYOHEIAZUMA KENICHIAIDA TSUYOSHI
    • B67C3/28B67D7/36G03F7/26H01L21/027
    • B01D37/00
    • PROBLEM TO BE SOLVED: To decrease pressure variation between the front and the back of a filter 14 for filtering a resist liquid.
      SOLUTION: This filling device includes a solution filling tank 2 where a resist liquid is stored, a filling solution passage 4 for feeding the resist liquid sent out form the tank 2 by a supply pump 10 to a filling nozzle 8, a recovery passage 16 communicating with the tank 2 branched from a branch part 18 in the middle of the passage 4, a filling valve 12 provided on the downstream side (at the downstream part 4B of the passage 4) of the part 18 of the passage 4, a recovery valve 20 provided on the passage 16, a filter 14 provided between the pump 10 and the part 18, a servomotor for driving each of the valve 12 and the valve 20 and a controller 24 for controlling the open degree of the valve 12 and the valve 20 by controlling the servomotor. The opening of the valve 20 is controlled not to fluctuate the pressure on the upstream side and the downstream side of the filter 14.
      COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:减少用于过滤抗蚀剂液体的过滤器14的前后的压力变化。 解决方案:该填充装置包括储存有抗蚀剂液体的溶液填充槽2,用于将由供给泵10从罐2排出的抗蚀剂液体供给到填充喷嘴8的填充溶液通道4,回收 通道16与从通道4中部的分支部分18分支的罐2连通,设置在通道4的部分18的下游侧(通道4的下游部分4B)处的灌装阀12, 设置在通道16上的回收阀20,设置在泵10和部件18之间的过滤器14,用于驱动阀12和阀20中的每一个的伺服电机和用于控制阀12的开度的控制器24和 阀门20通过控制伺服电动机。 控制阀20的开度不会使过滤器14的上游侧和下游侧的压力波动。(C)2009,JPO&INPIT