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1. 发明专利

JP2013152207A Inspection device and inspection method 审中-公开
标题翻译：检查装置和检查方法
公开(公告)号：JP2013152207A
公开(公告)日：2013-08-08
申请号：JP2012052755
申请日：2012-03-09
申请人： Shibaura Mechatronics Corp , 芝浦メカトロニクス株式会社
发明人： HAYASHI YOSHINORI , IZUTSU TADASHI , WAKABA HIROYUKI , ONO YOKO , SEKI KATSUTOSHI , GONDO TAKANORI , TAKIZAWA AKIHIKO
IPC分类号： G01N21/88
CPC分类号： H04N7/18 , G01N21/896
摘要： PROBLEM TO BE SOLVED: To perform an inspection with better accuracy than before even when the inspection is started before illumination of an illumination device reaches a target light quantity, by using the illumination device which needs long time before an illumination light quantity reaches the target light quantity when a setting light quantity is switched to the target light quantity.SOLUTION: An inspection device performs inspection processing to an image of a body to be inspected indicated by image data obtained by photographing the body to be inspected illuminated by the illumination device, includes processing information determination means (S26, S29) for determining processing information used in the inspection processing to be changed accompanying temporal change from the initial light quantity to the target light quantity of the illumination light quantity from the illumination device when the setting light quantity of the illumination device is switched from the initial light quantity to the target light quantity, and performs the inspection processing (S27) using the processing information determined in the processing information determination means according to elapsed time from the time of switching the setting light quantity of the illumination device to the target light quantity.
摘要翻译：要解决的问题：即使在照明装置的照明达到目标光量之前开始检查时，通过使用在照明光量达到目标光线之前需要长时间的照明装置，进行比以前更好的精度的检查将设定光量切换为目标光量时的数量。解决方案：检查装置对通过拍摄照明装置照明的被检体所获得的图像数据所指示的被检体的图像进行检查处理，包括处理信息确定装置（S26，S29），用于确定随着从照明装置的照明光量的初始光量到目标光量的随时间变化而在检查处理中使用的处理信息，当照明装置的设定光量照明装置从初始切换并且根据从将照明装置的设定光量切换到目标光量的时间的经过时间，使用在处理信息确定装置中确定的处理信息来执行检查处理（S27）。

2. 发明专利

JP2013083628A Apparatus and method for inspecting pasted panel-like body 有权
标题翻译：用于检查PASTED面板体的装置和方法
公开(公告)号：JP2013083628A
公开(公告)日：2013-05-09
申请号：JP2012175895
申请日：2012-08-08
申请人： Shibaura Mechatronics Corp , 芝浦メカトロニクス株式会社
发明人： HAYASHI YOSHINORI , WAKABA HIROYUKI , IZUTSU TADASHI , GONDO TAKANORI , ONO YOKO , SEKI KATSUTOSHI
IPC分类号： G01B11/02 , G01B11/14 , G01N21/88
摘要： PROBLEM TO BE SOLVED: To provide a pasted panel-like body inspection apparatus capable of comparatively easily inspecting an interval between an edge end of a panel-like body and an edge end of adhesive in a pasted panel-like body.SOLUTION: The pasted panel-like body inspection apparatus includes: a line sensor camera 50; illumination means 51; and a processing unit for processing a video signal outputted from the line sensor camera 50 for scanning a pasted panel-like body 10 illuminated by the illumination means 51. The processing unit includes: inspection image information generation means for generating inspection image information composed of shade values in each pixel based on the video signal; and an inter-edge end distance information generation means for generating inter-edge end distance information expressing an interval between the edge end of a first panel-like body 11 and the edge end of adhesive 13 on an inspection line, based on a shade value profile on the inspection line crossing the edge end of the first panel-like body 11 which is obtained from the inspection image information, to provide an inspection result based on the inter-edge end distance information.
摘要翻译：要解决的问题：提供一种能够相对容易地检查板状体的边缘端部和粘贴的面板状体中的粘合剂的端部之间的间隔的粘贴的面板状体检查装置。粘贴的面板状身体检查装置包括：线传感器照相机50; 照明装置51; 以及处理单元，用于处理从行传感器照相机50输出的视频信号，用于扫描由照明装置51照亮的粘贴的面板状主体10.处理单元包括：检查图像信息产生装置，用于产生由阴影组成的检查图像信息基于视频信号的每个像素的值; 以及边缘结束距离信息生成单元，其基于阴影值，生成表示第一面板状体11的边缘端部与检查线路上的粘合剂13的边缘端部之间的间隔的边缘间距离信息在从检查图像信息获得的与第一面板状体11的边缘端交叉的检查线上形成轮廓，以提供基于边缘端部距离信息的检查结果。版权所有（C）2013，JPO＆INPIT

3. 发明专利

JP2012233880A Substrate inspection device, substrate inspection method, and adjusting method of substrate inspection device 有权
标题翻译：基板检查装置，基板检查方法和基板检查装置的调整方法
公开(公告)号：JP2012233880A
公开(公告)日：2012-11-29
申请号：JP2012082640
申请日：2012-03-30
申请人： Shibaura Mechatronics Corp , 芝浦メカトロニクス株式会社
发明人： MATSUSHIMA DAISUKE , MUTO MAKOTO , HAYASHI YOSHINORI , WAKABA HIROYUKI , ONO YOKO , MORI HIDEKI
IPC分类号： G01N21/956 , G01B11/00 , G01B11/24
摘要： PROBLEM TO BE SOLVED: To provide a substrate inspection device for inspecting a minute cavity occurring in a joining interface of joined two substrate layers even if there is a portion not transmitting inspection light in either of the two joined substrate layers.SOLUTION: A substrate inspection device 100 includes a light source unit 30 for radiating the inspection light in a belt like manner so as to be obliquely incident to a surface of the substrate 100, and a line sensor camera 20 arranged at a prescribed position opposite to the light source unit 30 across the belt like irradiated region formed on the surface of the substrate by the inspection light. Substrate image information is generated on the basis of a video signal output from the line sensor camera 20 while the light source unit 30 and the line sensor camera 20 are moved relatively to the substrate 100. Inspection result information for a minute cavity occurring in a joining interface of a first substrate layer 101 and a second substrate layer 102 of the substrate 100 is generated on the basis of the substrate image information.
摘要翻译：要解决的问题：即使在两个接合的基板层中的任一个中存在不传输检查光的部分，也提供用于检查在接合的两个基板层的接合界面中出现的微小空腔的基板检查装置。＆lt; P＆gt;解决方案：基板检查装置100包括：光源单元30，用于以类似方式辐射检查光以倾斜地入射到基板100的表面;以及线传感器相机20，布置在规定的通过检查光穿过形成在基板的表面上的带状照射区域与光源单元30相对的位置。在光源单元30和线传感器摄像机20相对于基板100移动的同时，基于从线传感器摄像机20输出的视频信号生成基板图像信息。接合中发生的微小空洞的检查结果信息基于基板图像信息生成基板100的第一基板层101和第二基板层102的界面。版权所有（C）2013，JPO＆INPIT

4. 发明专利

JP2012208129A Edge inspection device for tabular substrate 有权
标题翻译：用于矩形基板的边缘检查装置
公开(公告)号：JP2012208129A
公开(公告)日：2012-10-25
申请号：JP2012156791
申请日：2012-07-12
申请人： Shibaura Mechatronics Corp , 芝浦メカトロニクス株式会社
发明人： HAYASHI YOSHINORI , WAKABA HIROYUKI , MIYAZONO KOICHI , ONO YOKO , SEKI KATSUTOSHI , MORI HIDEKI
IPC分类号： G01N21/956 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To provide an edge inspection device for a tabular substrate capable of easily locating the position of a point, on an image obtained by photographing the outer peripheral part of the tabular substrate, in the direction across the circumferential direction of the tabular substrate.SOLUTION: An edge inspection device for a tabular substrate comprises a photographing part 130b (131b) that has a photographing axis Axb extending toward an origin fixed in advance, that includes, in a photographing visual field range, a prescribed surface 12A in an outer peripheral part 10E of a tabular substrate 10, and that photographs the prescribed surface sequentially in the circumferential direction with respect to the tabular substrate 10, and outputs an image signal. Based on a point on a photographed image expressed by photographed image data generated from the image signal and a position tA, in the direction across the circumferential direction, of each reference point corresponding to the photographing axis Axb, the edge inspection device generates pseudo photographing angle information indicating a pseudo photographing angle αA corresponding to the point on the photographed image, and displays, on a display unit, user interface information on a photographing angle based on the photographed image and the pseudo photographing angle information.
摘要翻译：要解决的问题：为了提供一种用于能够容易地定位点的位置的平板状基板的边缘检查装置，在通过拍摄平板状基板的外周部分而获得的图像上，沿着圆周方向的片状基材。解决方案：用于平板状基板的边缘检查装置包括拍摄部分130b（131b），其具有朝向预先固定的原点延伸的拍摄轴线Axb，其包括在拍摄视野范围内的规定表面12A 板状基板10的外周部10E，并且相对于平板状基板10在圆周方向上顺序地拍摄规定表面，并输出图像信号。基于由图像信号产生的拍摄图像数据表示的拍摄图像上的点，以及在与拍摄轴线Axb对应的每个基准点的圆周方向上的位置tA，边缘检查装置生成伪拍摄角度指示与拍摄图像上的点相对应的伪拍摄角度αA的信息，并且在显示单元上显示基于拍摄图像和伪拍摄角度信息的关于拍摄角度的用户界面信息。版权所有（C）2013，JPO＆INPIT

5. 发明专利

JP2009105202A Device of inspecting edge of semiconductor wafer 有权
标题翻译：检测半导体波形边缘的器件
公开(公告)号：JP2009105202A
公开(公告)日：2009-05-14
申请号：JP2007275174
申请日：2007-10-23
申请人： Shibaura Mechatronics Corp , 芝浦メカトロニクス株式会社
发明人： HAYASHI YOSHINORI , WAKABA HIROYUKI , ONO YOKO , MIYAZONO KOICHI , MORI HIDEKI
IPC分类号： H01L21/66
摘要： PROBLEM TO BE SOLVED: To provide an inspecting device for a disc substrate which can accrately and quantitatively inspect the formation position of a film layer formed on the surface of a disc substrate. SOLUTION: The inspecting device is used to inspect a disc substrate wherein a film layer is formed. It generates a photograph image data showing a photograph image corresponding to a photograph viewing range on the basis of an image signal that is output in sequence from an image pickup section for photographing a specified face in the outer periphery of the disc substrate, and, among the photographed image data, a vertical-direction position Y E15aL (θ) at each position (θ) in the circumferential direction of a border line E 15a between a face image section I Sa corresponding to the specified face on the photographed image data and its outside image section I BKL is used as a reference. Thus, a film layer edge position information Y 4E24 (θ) which indicates the vertical-direction position at the position (θ) corresponding to the circumferential direction of an edge line E 24 of the film layer image section I Sa (24) corresponding to the film layer 24 on the face image I Sa is generated. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于盘式基板的检查装置，其可以积极和定量地检查形成在盘基板的表面上的膜层的形成位置。
解决方案：检查装置用于检查其中形成有膜层的盘基片。基于从用于拍摄盘基片的外周中的指定面的图像拾取部分输出的图像信号，生成与照片观看范围相对应的照片图像的照片图像数据，并且拍摄图像数据，在面部图像部分之间的边界线E 15a 的圆周方向上的每个位置（θ）处的垂直方向位置Y E15aL 对应于拍摄的图像数据上的指定面部和其外部图像部分I BKL 的I Sa 被用作参考。因此，表示在与边缘线E 24 生成对应于面部图像I Sa 上的胶片层24的胶片层图像部分I Sa（24）。版权所有（C）2009，JPO＆INPIT

6. 发明专利

JP2013033028A Bonded plate-like body inspection device and method 有权
标题翻译：粘结板状体检检测装置及方法
公开(公告)号：JP2013033028A
公开(公告)日：2013-02-14
申请号：JP2012129946
申请日：2012-06-07
申请人： Shibaura Mechatronics Corp , 芝浦メカトロニクス株式会社
发明人： HAYASHI YOSHINORI , WAKABA HIROYUKI , IZUTSU TADASHI , SEKI KATSUTOSHI , ONO YOKO , GONDO TAKANORI
IPC分类号： G01N21/958
摘要： PROBLEM TO BE SOLVED: To provide a bonded plate-like body inspection device capable of obtaining information that can accurately show each size of many bubbles scattered in an adhesive agent.SOLUTION: A bonded plate-like body inspection device comprises: a line sensor camera 50; illumination means 51 and 52 for illuminating the line sensor camera 50 through a bonded plate-like body 10; and a processing unit for, when the line sensor camera scans the bonded plate-like body in a state of being illuminated by the illumination means, processing a picture signal to be output from the line sensor camera. The processing unit, from a gray value profile in a direction crossing a dark ring that is obtained from inspection image information consisting of a pixel-by-pixel gray value which is generated on the basis of the picture signal from the line sensor camera, generates bubble size information on the basis of distance between two dark parts corresponding to the dark ring on an inspection image.
摘要翻译：要解决的问题：提供一种能够获得能够准确地显示在粘合剂中散布的许多气泡的每个尺寸的信息的粘合板状体检查装置。粘合板状体检查装置包括：线传感器照相机50; 照明装置51和52，用于通过粘合板状体10照射线传感器照相机50; 以及处理单元，用于当线传感器照相机在被照明装置照亮的状态下扫描接合的板状体时，处理从线传感器相机输出的图像信号。该处理单元根据由基于来自线传感器摄像机的图像信号生成的逐像素灰度值的检查图像信息获得的与暗环交叉的方向上的灰度值分布，生成处理单元，基于在检查图像上对应于暗环的两个暗部分之间的距离的气泡尺寸信息。版权所有（C）2013，JPO＆INPIT

7. 发明专利

JP2012242142A Device and method of inspecting bonded plate-like body 有权
标题翻译：检查粘结板状体的装置和方法
公开(公告)号：JP2012242142A
公开(公告)日：2012-12-10
申请号：JP2011109951
申请日：2011-05-16
申请人： Shibaura Mechatronics Corp , 芝浦メカトロニクス株式会社
发明人： HAYASHI YOSHINORI , WAKABA HIROYUKI , IZUTSU TADASHI , SEKI KATSUTOSHI , ONO YOKO , GONDO TAKANORI
IPC分类号： G01N21/95
摘要： PROBLEM TO BE SOLVED: To provide a bonded plate-like body inspection device capable of obtaining an inspection image that can show bubbles and foreign matters in adhesive and the state of adhesive in the surrounding area even if there is a light non-transmitting area around the bonded plate-like body.SOLUTION: A bonded plate-like body inspection device comprises a line sensor camera 50, first illumination means 51 that illuminates the surface of a bonded plate-like body 10 from a first plate-like body 11 side of the bonded plate-like body 10, and second illumination means 52 that illuminates from a second plate-like body 12 side of the bonded plate-like body 10 toward the line sensor camera 50. The first illumination means 51 obliquely illuminates, from above the bonded plate-like body 10, a predetermined area Eextending in a direction along a photographing line Lfrom a point at a predetermined distance from the photographing line Lon the surface of the bonded plate-like body 10. In the state illuminated by the first illumination means 51 and the second illumination means 52, an inspection image is produced as the line sensor camera 50 scans the bonded plate-like body 10.
摘要翻译：解决问题的方案为了提供一种能够获得能够显示粘合剂中的气泡和异物的检查图像以及周围区域中的粘合剂的状态的粘合板状体检查装置，在粘合板状体周围的透光区域。解决方案：粘合板状体检查装置包括线传感器照相机50，第一照明装置51，其从接合板状体10的第一板状体11侧照射接合板状体10的表面，以及从接合板状体10的第二板状体12侧向线传感器摄像机50照射的第二照明单元52.第一照明单元51从接合板状体的上方倾斜地照射主体10，从沿着拍摄线L C 的方向延伸的预定区域E L 在接合板状体10的表面上的拍摄线L C 。在由第一照明装置51和第二照明装置52照射的状态下，检查图像作为线传感器相机50产生的扫描结合的板状主体10.版权所有（C）2013，JPO＆INPIT

8. 发明专利

JP2009115668A Edge inspection device for plate-like substrate 有权
标题翻译：用于板状基板的边缘检查装置
公开(公告)号：JP2009115668A
公开(公告)日：2009-05-28
申请号：JP2007290232
申请日：2007-11-07
申请人： Shibaura Mechatronics Corp , 芝浦メカトロニクス株式会社
发明人： HAYASHI YOSHINORI , WAKABA HIROYUKI , MIYAZONO KOICHI , ONO YOKO , SEKI KATSUTOSHI , MORI HIDEKI
IPC分类号： G01N21/956 , G01B11/24 , G01B11/30 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To provide an edge inspection device for a plate-like substrate capable of acquiring easily a position of crossing a circumferential direction of the plate-like substrate in a point on a photographed image obtained by photographing an outer circumferential portion of the plate-like substrate.
SOLUTION: This edge inspection device for the plate-like substrate is provided with a photographing part 130b (131b) having a photographing axis Axb extended toward a preset origin, including a prescribed face 12A in the outer circumferential portion 10E of the plate-like substrate 10 within a photographing view field range, and for photographing the prescribed face sequentially along the circumferential direction of the plate-like substrate 10 to output an image signal, generates pseudo-photographing angle information expressing a pseudo-photographing angle α
A corresponding to the point on the photographed image, based on a position t
A in a direction of crossing respective circumferential directions of the point on the photographed image expressed by a photographed image data generated from the image signal, and of a reference point corresponding to the photographing axis Axb, and displays user interface information as to a photographing angle, based on the photographed image and the pseudo-photographing angle information, on a display unit.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于板状基板的边缘检查装置，其能够容易地获取在通过拍摄外周获得的拍摄图像上的点上与板状基板的周向交叉的位置板状基板的一部分。
解决方案：该板状基板的边缘检查装置设置有拍摄部130b（131b），拍摄部130b（131b）具有朝向预设原点延伸的拍摄轴Axb，包括在该板的外周部10E中的规定面12A 并且用于沿着板状基板10的圆周方向顺序地拍摄规定面以输出图像信号，生成表示伪拍摄角度α A ，基于在由拍摄的图像数据生成的拍摄图像上的点的相对圆周方向交叉的方向上的位置t SB> A ，对应于拍摄图像上的点从图像信号和与拍摄轴Axb相对应的参考点，并且基于photogr显示关于拍摄角度的用户界面信息并且在显示单元上显示伪摄像角度信息。版权所有（C）2009，JPO＆INPIT

9. 发明专利

JP2015008223A ウェーハ収納カセットの検査装置及び検査方法有权
标题翻译：检查装置和检查储存罐的方法
公开(公告)号：JP2015008223A
公开(公告)日：2015-01-15
申请号：JP2013132912
申请日：2013-06-25
申请人：芝浦メカトロニクス株式会社 , Shibaura Mechatronics Corp
发明人： ONO YOKO , IZUTSU TADASHI , HAYASHI YOSHINORI , SEKI KATSUTOSHI
IPC分类号： H01L21/67 , H01L21/66
摘要：【課題】ウェーハ収納カセットについて、実際にウェーハを収納しなくても、ウェーハの収納状態に基づいた検査を行うことのできるウェーハ収納カセットの検査装置を提供することである。【解決手段】前記各ウェーハを支持する前記複数の支持部を撮影して画像信号を出力する撮影装置41〜44と、撮影装置41〜44からの画像信号にて表される画像についての処理を行う処理ユニット11とを有し、前記処理ユニット11は、前記画像に基づいて、前記複数の支持部のそれぞれの位置を表す支持部位置情報を生成する支持部位置情報生成手段(S24)と、該支持部位置情報生成手段にて生成された前記支持部位置情報に基づいて、前記複数の支持部にて支持されると見込まれるウェーハの当該ウェーハ収納カセットの高さ方向の位置を表す見込み位置情報を生成する見込み位置情報生成手段(S25〜S28)とを有する構成となる。【選択図】図8
摘要翻译：要解决的问题：提供一种晶片存储盒的检查装置，即使当晶片未被实际存储时也可以基于晶片存储状态检查晶片存储盒。解决方案：检查装置包括：成像装置41 -44，用于对支撑每个晶片的多个支撑部件进行成像以输出图像信号; 以及处理单元11，用于对由来自成像装置41-44的图像信号表示的图像执行处理。处理单元11包括：支撑部位位置信息创建装置（S24），用于基于图像创建表示多个支撑部分的各个位置的支撑部位置信息; 和预期位置信息创建装置（S25-S28），用于基于由支撑部位置信息创建装置创建的支撑部位置信息来创建预期位置信息，该预期位置信息表示晶片预期的晶片存储盒的高度方向上的位置由多个支撑部支撑。

10. 发明专利

JP2009105203A Device of inspecting edge of semiconductor wafer 有权
标题翻译：检测半导体波形边缘的器件
公开(公告)号：JP2009105203A
公开(公告)日：2009-05-14
申请号：JP2007275175
申请日：2007-10-23
申请人： Shibaura Mechatronics Corp , 芝浦メカトロニクス株式会社
发明人： HAYASHI YOSHINORI , WAKABA HIROYUKI , ONO YOKO , MIYAZONO KOICHI , MORI HIDEKI
IPC分类号： H01L21/66
摘要： PROBLEM TO BE SOLVED: To provide an inspecting device for a disc substrate which can accurately inspect (evaluate) the conditions of a plurality of continuous faces of the disc substrate. SOLUTION: On the basis of image signals which are output in sequence from an image pickup section for photographing a plurality of faces in the outer periphery of a disc substrate, a photograph image data showing an photograph image corresponding to respective photograph viewing ranges is generated, and the photograph image data are used to generate a composite image data showing a composite image which is joined by matching a plurality of face image sections I Sa , I 12U , I 12A , I 12L , and I Sb corresponding to the faces with their corresponding borders E 15a , E 15b , E 15c and E 15d , and the composite image is indicated on a display unit on the basis of the composite image data. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种可以精确地检查（评估）盘基片的多个连续面的状况的盘基片的检查装置。解决方案：基于从用于拍摄盘基片的外周中的多个面的图像拾取部分依次输出的图像信号，示出与各个照片观看范围对应的照片图像的照片图像数据并且照片图像数据用于生成表示通过使多个面部图像部分I SB SB 12U / SB SB匹配的合成图像的合成图像数据，，对应于其对应边界E 15a 的面，I 12A ，I SB> 12L 和I SB SB 15b ，E 15c 和E 15d ，并且根据合成图像数据在显示单元上指示合成图像。版权所有（C）2009，JPO＆INPIT

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