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    • 3. 发明专利
    • Method and apparatus for plasma enhanced chemical vapor deposition
    • 用于等离子体增强化学蒸气沉积的方法和装置
    • JP2012062579A
    • 2012-03-29
    • JP2012000402
    • 2012-01-05
    • Schott Agショット アクチエンゲゼルシャフトSchott AG
    • KUEPPER THOMASBEWIG LARSMOELLE CHRISTOPHBRANDT LARSNIKLOS THOMAS
    • C23C16/515
    • C23C16/405C23C16/402C23C16/505C23C16/511C23C16/52H01J37/32266
    • PROBLEM TO BE SOLVED: To reduce the heating of substrates during plasma enhanced chemical vapor deposition.SOLUTION: A method and an apparatus for coating substrates by means of plasma enhanced vapor deposition are provided, in which at least a part of the surroundings of the substrate surface of a substrate to be coated is evacuated and a process gas with a starting substance for the coating is admitted, wherein the coating is deposited by a plasma being ignited by radiating in electromagnetic energy in the surroundings of the substrate surface filled with the process gas. The electromagnetic energy is radiated in the form of a multiplicity of pulse sequences, preferably microwave or radiofrequency pulses, with a multiplicity of pulses spaced apart temporally by first intermissions, wherein the electromagnetic energy radiated in the form is turned off in the intermissions, and wherein the intermissions between the pulse sequences are at least a factor of 3, preferably at least a factor of 5, longer than the first intermissions between the pulses within a pulse sequence.
    • 要解决的问题:为了减少等离子体增强化学气相沉积期间的衬底的加热。 提供了一种通过等离子体增强气相沉积来涂覆衬底的方法和装置,其中待涂覆的衬底的衬底表面的至少一部分周围环境被抽真空,并且处理气体具有 允许用于涂层的起始物质,其中通过在填充有工艺气体的基底表面的周围的电磁能中辐射的等离子体来沉积涂层。 电磁能以多种脉冲序列的形式辐射,优选为微波或射频脉冲,其中多个脉冲通过第一次间歇在时间上间隔开,其中以间隔辐射的形式的电磁能被截止,其中 脉冲序列之间的间隔比脉冲序列内的脉冲之间的第一次间隔长度至少为3倍,优选至少5倍。 版权所有(C)2012,JPO&INPIT
    • 4. 发明专利
    • Method and apparatus for plasma enhanced chemical vapor deposition
    • 用于等离子体增强化学蒸气沉积的方法和装置
    • JP2008121116A
    • 2008-05-29
    • JP2007291900
    • 2007-11-09
    • Schott Agショット アクチエンゲゼルシャフトSchott AG
    • KUEPPER THOMASBEWIG LARSMOELLE CHRISTOPHBRANDT LARSNIKLOS THOMAS
    • C23C16/511C23C16/515
    • C23C16/405C23C16/402C23C16/505C23C16/511C23C16/52H01J37/32266
    • PROBLEM TO BE SOLVED: To reduce the heating of substrates during plasma enhanced chemical vapor deposition.
      SOLUTION: For this purpose, a method and an apparatus for coating substrates by means of plasma enhanced vapor deposition are provided, in which at least part of the surroundings of the surface of a substrate to be coated is evacuated and a process gas with a starting substance for the coating is admitted, wherein the coating is deposited by a plasma being ignited by radiating in electromagnetic energy in the surroundings of the substrate surface filled with the process gas. The electromagnetic energy is radiated in the form of a multiplicity of pulse sequences, preferably microwave or radio frequency pulses, with a multiplicity of pulses spaced apart temporally by first intermissions, wherein the electromagnetic energy radiated in is turned off in the intermissions, and wherein the intermissions between the pulse sequences are at least a factor of 3, preferably at least a factor of 5, longer than the first intermissions between the pulses within a pulse sequence.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:为了减少等离子体增强化学气相沉积期间的衬底的加热。 解决方案:为了这个目的,提供了一种通过等离子体增强气相沉积来涂覆衬底的方法和装置,其中待涂覆的衬底表面的至少部分周围环境被抽真空,并且处理气体 允许用于涂层的起始物质,其中通过在填充有工艺气体的基底表面的周围的电磁能量中辐射的等离子体来沉积涂层。 电磁能以多种脉冲序列的形式被辐射,优选地是微波或射频脉冲,其中多个脉冲通过第一次间歇在时间上间隔开,其中辐射的电磁能在中断期间被关闭,并且其中 脉冲序列之间的间隔至少比脉冲序列内脉冲之间的第一次间隔长3倍,优选至少5倍。 版权所有(C)2008,JPO&INPIT
    • 5. 发明专利
    • Container with internal color decoration
    • 集装箱内部装饰
    • JP2005193986A
    • 2005-07-21
    • JP2005003538
    • 2005-01-11
    • Schott Agショット アーゲーSchott Ag
    • GEISLER STEFANBAIN DAVIDBEWIG LARSMOELLE CHRISTOPHKUEPPER THOMAS
    • A45D33/18A45D34/00B65D23/00B65D23/02B65D25/14
    • A45D33/18A45D34/00A45D2034/007A45D2200/053B65D23/02B65D2203/00
    • PROBLEM TO BE SOLVED: To extend the moldability of a container, especially of a perfume bottle and to practically exclude the reaction of the component of color decoration with the component of a product in the container with the decoration, especially in the perfume bottle. SOLUTION: This relates to a container (1) including a hollow body (2) which is at least partially transparent and color decoration (3). The decoration (3) includes at least the internal lining (35) of the hollow body (2). The container includes, particularly, the hollow body (2), includes the first area (20) in which the body (2) is at least partially transparent, color decoration (3) at least in the second area (30) on the inside (22) of the body (2), and the third area (40) connected with the area (20) and/or the second area (30). COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:为了延长容器,特别是香水瓶的成型性,并且实际上排除了颜色装饰的组分与容器中的产品的组分与装饰物的反应,特别是在香料中 瓶子。 解决方案:本发明涉及包括至少部分透明的中空体(2)和颜色装饰(3)的容器(1)。 装饰物(3)至少包括中空体(2)的内衬(35)。 容器特别地包括中空体(2),包括其中主体(2)至少部分透明的第一区域(20),至少在内部的第二区域(30)中的颜色装饰(3) (22)和与区域(20)和/或第二区域(30)连接的第三区域(40)。 版权所有(C)2005,JPO&NCIPI