会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 10. 发明专利
    • Piezoelectric mems switch and manufacturing method therefor
    • 压电MEMS开关及其制造方法
    • JP2007273451A
    • 2007-10-18
    • JP2007001638
    • 2007-01-09
    • Samsung Electronics Co Ltd三星電子株式会社Samsung Electronics Co.,Ltd.
    • KIM JONG-SEOKSO INSOLEE SANG HOONKWON SANG-WOOKLEE CHANG-SEUNGHONG YOUNG-TACKKIM CHE-HEUNG
    • H01H57/00B81B3/00B81C1/00H01H49/00H01L41/09H01L41/18H01L41/22H01L41/29H02N2/00
    • H01H57/00H01H2057/006Y10T403/7026
    • PROBLEM TO BE SOLVED: To provide a piezoelectric MEMS switch eliminating the process of enforcing the etching of the back side of a substrate as conventionally performed, and also eliminating process constraints, by improving the structure as a piezoelectric actuator is formed, before an RF signal line is formed. SOLUTION: The piezoelectric MEMS switch includes a substrate 101, a first fixed signal line 103 and a second fixed signal line 105, formed symmetrically on the upper plane of the substrate 101 by holding a predetermined space G; a vertically actuating piezo-electric actuator 130, which is arranged in line with the first fixed signal line 103 and the second fixed signal line 105 in space, and in which one edge is held by the substrate; and a movable signal line 150, in which at least one side is connected to the upper plane of the piezoelectric actuator 130, one edge is connected to one of the first fixed signal line 103 or the second fixed signal line 105, and other lines are connected to or disconnected from either of the first fixed signal line 103 or the second fixed signal line 105. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:为了提供一种压电MEMS开关,消除了如常规执行的对基板背面的蚀刻的过程,并且还消除了工艺限制,在形成压电致动器的结构之前,形成了 形成RF信号线。 解决方案:压电MEMS开关包括通过保持预定空间G对称地形成在基板101的上平面上的基板101,第一固定信号线103和第二固定信号线105; 垂直致动的压电致动器130,其在空间中与第一固定信号线103和第二固定信号线105成一直线,并且其中一个边缘被基板保持; 以及可动信号线150,其中至少一侧连接到压电致动器130的上平面,一个边缘连接到第一固定信号线103或第二固定信号线105中的一个,其他线是 连接到第一固定信号线103或第二固定信号线105中的任何一个或与其断开。版权所有:(C)2008,JPO&INPIT