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    • 1. 发明专利
    • POLISHING DEVICE FOR SUBSTRATE OF MAGNETIC DISK
    • JPH01306174A
    • 1989-12-11
    • JP13447788
    • 1988-06-02
    • SONY CORP
    • NAKAMURA ZENKICHIWATANABE HIDEKISHIMURA HIDEYUKI
    • B24B37/00B24B37/04G11B5/84
    • PURPOSE:To use by circulating the polishing liquid fed from the following tank and to reduce the consumption of the polishing liquid necessary for polishing a drain passage for recovering a used polishing liquid and a feeding pump for feeding this recovered polishing liquid to a polishing liquid feeding tank. CONSTITUTION:A polishing liquid 16 is fed to a magnetic disk substrate from a feeding tank 3 and both faces of the substrate between upper and lower surface plates 1, 2 are subjected to polishing by a polishing liquid 16. The polishing liquid 16 of after this work is recovered to a 1st drain passage 6 and recovered further to a 2nd drain passage 8 via a switching valve 7. The polishing liquid 16 recovered by the 2nd drain passage 8 is reutilized by its circulation by being fed to a feeding tank 3 by a feeding pump 10. As a result, the consumption of the polishing liquid 16 can drastically be reduced. On the other hand, the stain of the upper and lower surface plates 1, 2 is cleaned by a pure water 20 and the pure water 20 of after cleaning is discharged out of the device through a 1st drain passage 6, the switching valve 7 and a 3rd drain passage 9.