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    • 1. 发明专利
    • Refractive index meter
    • 折射指数表
    • JP2009092569A
    • 2009-04-30
    • JP2007264799
    • 2007-10-10
    • Shimadzu Corp株式会社島津製作所
    • SATO AKIRAIWAI NOBUYUKI
    • G01N21/27G01N21/41
    • PROBLEM TO BE SOLVED: To measure complex refractive indexes (real parts and imaginary parts) of samples of various forms and sizes with high accuracy.
      SOLUTION: A medium layer covering a grating layer 4 of a wave guide mode resonance grating 1 is used as a sample S, and the lower face of a substrate 2 is irradiated with light. The reflected light is detected by a spectral optical system 23 and a detector 24, and a reflection spectrum is created in a data processing part 25. A resonance peak showing a high reflectance appears on the reflection spectrum, but the wavelength of the resonance peak depends on the real part of the complex transmittance of the sample S, and the intensity of the resonance peak depends on the imaginary part of the complex transmittance of the sample S. The real part and imaginary part of the complex transmittance of the sample S are computed from the wavelength and intensity of the detected resonance peak respectively. The measuring accuracy of the refractive index can be improved by appropriately setting parameters of the wave guide mode resonance grating such as a grating cycle and groove depth to narrow a band.
      COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:以高精度测量各种形式和尺寸样品的复折射率(实部和虚部)。 解决方案:将覆盖波导模式共振光栅1的光栅层4的介质层用作样品S,并且用光照射基板2的下表面。 反射光由光谱光学系统23和检测器24检测,在数据处理部分25中产生反射光谱。反射光谱上出现高反射率的共振峰,共振峰的波长依赖于 在样品S的复透射率的实部上,谐振峰的强度取决于样品S的复透射率的虚部。计算样品S的复透射率的实部和虚部 分别从检测到的共振峰的波长和强度。 可以通过适当地设定诸如光栅周期和凹槽深度之类的波导模式共振光栅的参数来使带宽变窄来提高折射率的测量精度。 版权所有(C)2009,JPO&INPIT
    • 2. 发明专利
    • Optical chopper and spectroscopic device with same
    • 具有相同光学切割器和光谱器件
    • JP2006292422A
    • 2006-10-26
    • JP2005109911
    • 2005-04-06
    • Shimadzu Corp株式会社島津製作所
    • IWAI NOBUYUKI
    • G01J3/18G01J3/02
    • PROBLEM TO BE SOLVED: To provide an optical chopper capable of acquiring a high S/N ratio even to an electric noise by suppressing high-order light, stray light or the like even in a short wavelength band such as a far ultraviolet region or a vacuum ultraviolet region, and a spectroscopic device with the same.
      SOLUTION: This optical chopper is provided with the first domain for transmitting light in a wide wavelength band with high transmittance, and the second domain for transmitting light having a wavelength other than a measuring object wavelength with low transmittance. A light flux entering a detector is allowed to pass each domain alternately, and thereby the electric noise can be removed by amplitude modulation, and an effect of stray light can be removed by a transmission band characteristic.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:为了提供即使在诸如远紫外线的短波长带中也能够抑制高阶光,杂散光等,即使对于电噪声也能够获得高S / N比的光斩波器 区域或真空紫外区域,以及具有该区域的分光装置。 解决方案:该光斩波器设置有用于以高透射率透射宽波长带的光的第一域,以及用于传输具有低透射率的测量对象波长以外的波长的光的第二域。 允许进入检测器的光束交替地通过每个域,从而可以通过幅度调制去除电噪声,并且可以通过传输带特性去除杂散光的影响。 版权所有(C)2007,JPO&INPIT
    • 3. 发明专利
    • Diffraction grating
    • 衍射光栅
    • JP2006259041A
    • 2006-09-28
    • JP2005074419
    • 2005-03-16
    • Shimadzu Corp株式会社島津製作所
    • IWAI NOBUYUKI
    • G02B5/18
    • PROBLEM TO BE SOLVED: To provide a diffraction optical element which has both of an ideal imaging characteristic and an ideal efficiency characteristic, and is independent of a surface profile of a substrate.
      SOLUTION: In an approximate surface profile consisting of an elliptic plane group, a concept of the surface profile of the substrate does not exist in principle, but in manufacture, a substrate with an approximate surface profile is processed. A luminous flux made incident from an incident point S1 goes to an exit point S2 via each elliptic planes. If an inclination factor in an arbitrary place of each spheroidal surface is the same, and if a solid angle of each luminous flux projected on each elliptic surface from the incident point S1 is the same, an amplitude of each luminous flux becomes the same at the exit point S2 of each flux. When the amplitudes of the luminous fluxes via 8 pieces of spheroidal surfaces 1 to 8 are expressed by complex numbers at the exit point S2, and if they are in phase, they strengthen each other, but if they are out of phase, they weaken each other. Since the strength is the square of an amplitude, the strength becomes very high if the wavelengths are in phase, but the strength becomes small if the wavelengths are out of phase, and a function as a dispersive element is high.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供具有理想成像特性和理想效率特性两者的衍射光学元件,并且与基板的表面轮廓无关。 解决方案:在由椭圆平面组成的近似表面轮廓中,原理上不存在基底的表面轮廓的概念,但是在制造中,处理具有近似表面轮廓的基底。 从入射点S1入射的光束经由每个椭圆面到达出射点S2。 如果每个球形表面的任意位置的倾斜系数相同,并且如果从入射点S1投射到每个椭圆面上的每个光束的立体角相同,则每个光通量的振幅在 每个通量的出口点S2。 当通过8个球形表面1至8的光通量的振幅在出口点S2处由复数表示时,并且如果它们处于同相状态,则它们彼此相互增强,但是如果它们不同相,则它们各自变弱 其他。 由于强度是振幅的平方,所以如果波长是同相的,则强度变得非常高,但是如果波长不同相,则强度变小,并且作为色散元件的功能高。 版权所有(C)2006,JPO&NCIPI
    • 6. 发明专利
    • 発光装置
    • 发光装置
    • JP2015060763A
    • 2015-03-30
    • JP2013194620
    • 2013-09-19
    • 株式会社島津製作所Shimadzu Corp
    • TAMURA ATSUKOIWAI NOBUYUKI
    • F21S2/00F21V8/00F21V9/08
    • 【課題】XY色度図上の全ての色を得ることを可能とした発光装置を提供する。【解決手段】光源11から、スリット12a、ミラー13a、回折格子14、ミラー13b、スリット12bを介して第1波長の単色光を取り出し、光ファイバ15、レンズ16により混色部30に照射する。さらに、光源21から、スリット22a、ミラー23a、回折格子24、ミラー23b、スリット22bを介して第2波長の単色光を取り出し、光ファイバ25、レンズ26により混色部30に照射し、第1及び第2波長の単色光を加算混合する。駆動手段18、28により回折格子14、24を回動させて第1波長及び第2波長を設定し、可変電源17、27により光源11、21に供給する電力を制御して光量を制御することで、混色部30においてXY色度図上の全ての色を得る。【選択図】図3
    • 要解决的问题:提供可以在XY色度图上获得所有颜色的发光装置。解决方案:通过狭缝12a,反射镜13a,衍射光栅14从光源11提取具有第一波长的单色光 镜子13b和狭缝12b,并且通过光纤15和透镜16施加到混色部分30.另外,通过狭缝22a从光源21提取具有第二波长的单色光, 镜子23a,衍射光栅24,反射镜23b和狭缝22b,并通过光纤25和透镜26施加到混色部分30,并且添加具有第一和第二波长的单色光, 混合 衍射光栅14和24由驱​​动装置18和28旋转以设定第一波长和第二波长,供给光源11和21的功率由可变电源17和27控制以控制光量 。 由此,在色彩混合部分30中获得XY色度图上的所有颜色。
    • 7. 发明专利
    • Transmission wavelength adjusting method of interference filter and transmission wavelength adjusting device
    • 干扰滤波器和传输波长调整装置的传输波长调整方法
    • JP2005321199A
    • 2005-11-17
    • JP2004137026
    • 2004-05-06
    • Shimadzu Corp株式会社島津製作所
    • IWASAKI EMIKOIWAI NOBUYUKI
    • G01J3/26G01J3/02G02B5/28
    • PROBLEM TO BE SOLVED: To perform easily a work for adjusting a transmission wavelength by adjusting a tilt angle of an interference filter to incident light, and to heighten wavelength precision.
      SOLUTION: When adjusting the transmission wavelength of the interference filter having a characteristic transmitting a wavelength near a bright line spectrum of a prescribed element, an optical filter 2 which is a measuring object is irradiated with measuring light from a discharge light source 1 using isotope gas of the element, and transmitted light is subjected to wavelength dispersion by a diffraction grating 33 and detected almost simultaneously by a photodetector 34. A signal processing part 4 displays a light intensity distribution based on the detection signal on a screen of a monitor 5. A bright line spectrum by the light source and a transmission peak of the optical filter appear on the light intensity distribution, and the interval between them can be converted into a wavelength based on a preliminary measuring result. Since the wavelength of the bright line spectrum is known, the wavelength of the transmission peak can be determined easily.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:通过调整干涉滤光器对入射光的倾斜角度,并且提高波长精度,可以容易地进行调整透射波长的工作。 解决方案:在调整具有透射规定元件的亮线光谱附近的波长的特性的干涉滤光器的透射波长的情况下,将来自放电光源1的测量光照射作为测量对象的滤光器2 使用元素的同位素气体,透射光通过衍射光栅33进行波长色散,并且几乎由光电检测器34同时检测。信号处理部分4在监视器的屏幕上显示基于检测信号的光强度分布 在光强分布上出现光源的亮线谱和光滤波器的透射峰,并且可以基于初步测量结果将它们之间的间隔转换为波长。 由于亮线谱的波长是已知的,因此可以容易地确定透射峰的波长。 版权所有(C)2006,JPO&NCIPI
    • 8. 发明专利
    • CALIBRATION OR INSPECTION METHOD FOR SPECTROSCOPE
    • JPH11326045A
    • 1999-11-26
    • JP15379898
    • 1998-05-19
    • SHIMADZU CORP
    • IWAI NOBUYUKI
    • G01J3/02
    • PROBLEM TO BE SOLVED: To detect an error without a deviation by selecting a plurality of kinds of calibration wave lengths against a periodical error generated by a cause of a mechanism so as to be approximately uniformly distributed in phase on an error period. SOLUTION: Since a period of an error caused by a mechanism is ascertained from the mechanism, a calibration wave length is selected so as to be a phase point uniformly distributed on an error period. The wave length is plotted on a swirl line of which one winding indicates one rotation of a feed screw and a phase of the respective calibration points is indicated by an angle (h) from a base line H of a straight line tightening a center of the swirl line with the respective calibration wave length points. At this time, a found error at P point of a wave length of 585.2 nm appears and the same found error appears at respective wave lengths of 485.2, 385.2, 285.2 nm of the same error phase. Since it can be presumed that errors are approximate the same at other found wave length points, it may be judged that approximately all of errors capable of appearing at whole wave length area can be detected. As a result, the errors can be detected without a deviation. Accordingly, if a quality of a spectroscope is judged by whether a measured error by an inspection at these wave length points is within an accuracy range or not, correct accuracy can be ensured.
    • 9. 发明专利
    • INSTRUMENT FOR MEASURING SPECTROSCOPIC CHARACTERISTIC
    • JPH09145601A
    • 1997-06-06
    • JP31076695
    • 1995-11-29
    • SHIMADZU CORP
    • IWAI NOBUYUKI
    • G01J3/28G01N21/01G01N21/84
    • PROBLEM TO BE SOLVED: To provide the apparatus for measuring spectroscopic characteristics, which has the stable distribution of spectroscopic radiant intensity and can obtain the output intensity of a spectroscopic device at each wavelength for the constant optical input in high reproducibility. SOLUTION: In the vicinity or incident-side optical systems 1, 3 and 4 of a spectroscopic-characteristic device 6, a detector 2 for monitoring a light source, wherein the bandwidth is limited to the vicinity of the using frequency of the spectroscopic-device main body 6, is arranged. At the same timer a control means 7, which regulates the amount or the light of a light source 1 so that the output of the detector 2 for monitoring the light source becomes constant, is provided. Then, only the light in the vicinity of the wavelength band in use of the spectroscopic device is monitored, and the amount of the light of the light source is regulated. Thus, the conditions of the wavelength-intensity distribution of the incident-side optical systems 1, 3 and 4 are made constant.