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    • 9. 发明专利
    • ORGANIC EL DISPLAY PANEL AND MANUFACTURE THEREOF
    • JP2000331784A
    • 2000-11-30
    • JP14273499
    • 1999-05-24
    • PIONEER TOHOKU CORP
    • NAGAYAMA KENICHINAKADA HITOSHI
    • H05B33/22H01L51/50H05B33/10H05B33/12H05B33/14
    • PROBLEM TO BE SOLVED: To reduce resistance of a metal electrode by forming a bulkhead having overhang parts protruding from both sides in the direction substantially parallel to a transparent substrate on an insulating film formed on the transparent substrate, including the bulkhead forming area, and forming an auxiliary conductive wire which extends along the extending direction of the bulkhead and exposed from only one side part side in the root part of the bulkhead. SOLUTION: The side surface of a bulkhead 6 is inclined at an angle θ1 with respect to the perpendicular line of a transparent substrate 1, and in the formation of a metal electrode 4, the evaporation is performed, so that the evaporating direction angle of a metal electrode material θ3 is θ1>θ3. In the formation of an organic EL material layer 3, the evaporation is performed so that the evaporating direction angle θ2 of the organic EL material is θ2 θ3>θ2, whereby the organic EL material layer 3 is evaporated between and on the ends of insulating films 5, but is not evaporated on an auxiliary conductive line 7. The metal electrode 4 is evaporated at the angle θ3 and makes the resistance of the metal electrode 4 reduced.