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1. 发明专利

JP2006259769A Optical waveguide device, manufacturing method thereof and optical communication apparatus 审中-公开
标题翻译：光波器件及其制造方法及光通讯设备
公开(公告)号：JP2006259769A
公开(公告)日：2006-09-28
申请号：JP2006143195
申请日：2006-05-23
申请人： Omron Corp , オムロン株式会社
发明人： FURUMURA YOSHIYUKI , HAYAMIZU KAZUYUKI , TERAKAWA YUKARI , HOSOKAWA HAYAMI , TAKAHASHI TOSHIYUKI , HIGUCHI MASAYOSHI , TATARA YOSHITAKA , YASUDA NARU , NOZAWA HIROTO
IPC分类号： G02B6/122 , G02B6/42 , H01L31/0232 , H01S5/022
摘要： PROBLEM TO BE SOLVED: To provide an optical waveguide device which simplifies the manufacturing porcess of the optical waveguide device and manufacturing the optical waveguide device with high accuracy and a manufacturing method thereof. SOLUTION: When a base substrate and an optical waveguide mother board are integrally bonded, ultraviolet-curing resin 20a is supplied between a lower surface of a lower cladding layer 18 and an upper surface of the silicon substrate 21b and a spacer 32 provided on the upper surface of the silicon substrate 21b of the base substrate is brought into contact with the lower surface of the lower cladding layer 18. An upper cladding layer 20 is formed by curing the ultraviolet-curing resin 20a in an optical waveguide region of the optical waveguide mother board by covering an unnecessary part of the optical waveguide mother board with a mask 36a and irradiating the ultraviolet-curing resin 20a with ultraviolet rays. Next, a boundary between the unnecessary part of the optical waveguide mother board and an optical wageguide formation region is cut with a dicing blade and the unnecessary part of the optical waveguide mother board is removed. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种光波导装置，其制造方法简单化，光波导装置的制造精度高，制造方法。解决方案：当基底基板和光波导母板一体接合时，在下包层18的下表面和硅基板21b的上表面之间提供紫外线固化树脂20a和设置有间隔件32 在基底基板的硅基板21b的上表面与下包层18的下表面接触。通过在紫外线固化树脂20a的光波导区域中固化紫外线固化树脂20a，通过用掩模36a覆盖光波导母板的不必要部分并用紫外线照射紫外线固化树脂20a来形成光波导母板。接下来，用切割刀切割光波导母板的不必要部分与光学工薪指导形成区域之间的边界，并去除光波导母板的不必要部分。版权所有（C）2006，JPO＆NCIPI

2. 发明专利

JP2006171173A Optical module and its manufacturing method 审中-公开
标题翻译：光学模块及其制造方法
公开(公告)号：JP2006171173A
公开(公告)日：2006-06-29
申请号：JP2004361109
申请日：2004-12-14
申请人： Omron Corp , オムロン株式会社
发明人： HIGUCHI MASAYOSHI , HAYAMIZU KAZUYUKI
IPC分类号： G02B6/122 , G02B6/13 , G02B6/42 , H01L31/0232 , H01S5/022
CPC分类号： G02B6/42 , G02B6/4246
摘要： PROBLEM TO BE SOLVED: To provide an optical module in which leaking of electric signals from a light emitting element or the like and cross talk between the light emitting element and a light receiving element are hardly generated even though the light emitting element and the light receiving element are arranged close to an optical waveguide and an optical fiber. SOLUTION: An optical waveguide 24 is packaged onto the top surface of a silicon substrate 22 in an overlapped manner. The end face of the optical waveguide 24 is cut and smoothly processed by a dicing blade and laser light beams and at that time, a cut groove 39 is formed on the silicon substrate 22. An inclined surface 44 is formed on the edges of the cut groove 39 between the cut groove 39 and an electrode pad 42 and the top surface of the silicon substrate 22 and the inclined surface 44 are covered by an insulating film 23. A light emitting element 25 is joined onto the electrode pad 42 by a brazing filler metal 43. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种光学模块，其中即使发光元件和发光元件等也难以产生来自发光元件等的电信号泄漏和发光元件与光接收元件之间的串扰光接收元件靠近光波导和光纤布置。解决方案：将光波导24以重叠的方式封装在硅衬底22的顶表面上。光波导24的端面被切割刀片和激光束切割并平滑地加工，此时在硅衬底22上形成有切割槽39.在切割的边缘上形成倾斜表面44 切槽39与电极焊盘42之间的凹槽39以及硅衬底22的顶表面和倾斜表面44被绝缘膜23覆盖。发光元件25通过钎料填充到电极焊盘42上金属43.版权所有（C）2006，JPO＆NCIPI

3. 发明专利

JP2005266179A Optical waveguide device, manufacturing method thereof, and intermediate body of optical waveguide device 审中-公开
标题翻译：光波器件及其制造方法及光波导器件的中间体
公开(公告)号：JP2005266179A
公开(公告)日：2005-09-29
申请号：JP2004077278
申请日：2004-03-17
申请人： Omron Corp , オムロン株式会社
发明人： FURUMURA YOSHIYUKI , HAYAMIZU KAZUYUKI , HIGUCHI MASAYOSHI , TANIGUCHI HISASHI , TERAKAWA YUKARI , HOSOKAWA HAYAMI
IPC分类号： G02B6/10 , G02B6/12 , G02B6/122 , G02B6/13 , G02B6/30 , G02B6/36 , G02B6/42
CPC分类号： G02B6/42 , G02B6/1221 , G02B6/30 , G02B6/3636 , G02B6/3652 , G02B6/3692 , G02B6/423
摘要： PROBLEM TO BE SOLVED: To prevent wrinkles, air bubbles, etc. from being caused in a clad layer due to contraction resulting from hardening of the clad layer. SOLUTION: Spacers 3 and 4 having a prescribed height for supporting an upper clad layer 7 are projectingly provided on an upper surface of a support substrate 2. Intermediate surfaces 22 and 23 placed in positions lower than upper surfaces of spacers 3 and 4 are provided on the upper surface of the support substrate 2 so as to continue to spacers 3 and 4. As a result, the heights of spacers 3 and 4 are divided to heights of steps between spacers 3 and 4 and intermediate surfaces 22 and 23 and a height of a step between intermediate surfaces 22 and 23, and a step part is distributed to small steps. As a result, stress caused by contraction resulting from hardening of resin for the clad is dispersed, and defects such as wrinkles and air bubbles hardly occur in a lower clad layer. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了防止由于包覆层硬化引起的收缩而在包覆层中引起褶皱，气泡等。解决方案：具有用于支撑上包覆层7的规定高度的间隔件3和4突出地设置在支撑基板2的上表面上。中间表面22和23位于比间隔件3和4的上表面低的位置设置在支撑基板2的上表面上，以便继续到间隔件3和4.结果，间隔件3和4的高度被划分成间隔件3和4与中间表面22和23之间的台阶高度，中间表面22和23之间的台阶的高度以及阶梯部分被分配到小步骤。结果，由于包层树脂的硬化引起的收缩引起的应力分散，并且在下包层中几乎不发生诸如皱纹和气泡的缺陷。版权所有（C）2005，JPO＆NCIPI

4. 发明专利

JP2004334057A Optical waveguide and its manufacturing method 有权
标题翻译：光波及其制造方法
公开(公告)号：JP2004334057A
公开(公告)日：2004-11-25
申请号：JP2003132449
申请日：2003-05-12
申请人： Omron Corp , オムロン株式会社
发明人： TERAKAWA YUKARI , SUZUKI KEIJIRO , TOTANI HIROMI , HIGUCHI MASAYOSHI , NOZAWA HIROTO , MORI TOSHIYA
IPC分类号： G02B6/122 , G02B6/13
摘要： PROBLEM TO BE SOLVED: To provide an optical waveguide such that the formation state of a coupling end surface 6 of the optical waveguide 1 can be inspected without detaching the optical waveguide 1 from a fixing tool 70, and to provide a method for manufacturing the optical waveguide. SOLUTION: This optical waveguide 1 has a core 4 and a clad 3 and is constituted by providing a mark 5 for confirming formation angles θ1 and θ2 of the coupling end surface 6 and a formation position L from a direction wherein the coupling end surface 6 can be viewed on the coupling end surface 6 where an end part 40 of the core 4 is present. The mark 5 consists of a plurality of parallel linear mark elements 50, whose exposure-side end parts 51 are sequentially shifted in position toward the inner side. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了提供光波导，使得可以检查光波导1的耦合端面6的形成状态，而不将光波导1从固定工具70分离，并且提供一种用于制造光波导。解决方案：该光波导1具有芯4和包层3，并且通过提供用于确认耦合端面6的形成角度θ1和θ2的标记5和形成位置L由从连接端表面6可以在存在核心4的端部40的联接端面6上观察。标记5由多个平行线形标记元件50组成，其曝光侧端部51顺序地向内侧移位。版权所有（C）2005，JPO＆NCIPI

5. 发明专利

JP2007313594A Laminated device, and its manufacturing method 有权
标题翻译：层压器件及其制造方法
公开(公告)号：JP2007313594A
公开(公告)日：2007-12-06
申请号：JP2006144689
申请日：2006-05-24
申请人： Omron Corp , オムロン株式会社
发明人： SASAKI AKIRA , NISHIO HIDETOSHI , MORIGUCHI MAKOTO , SATO MASATAKE , HIGUCHI MASAYOSHI
IPC分类号： B81B7/02 , B81B3/00 , H01L25/065 , H01L25/07 , H01L25/18
CPC分类号： H01L2224/16
摘要： PROBLEM TO BE SOLVED: To provide a laminated device which can easily protect structures formed on respective substrates. SOLUTION: In the physical quantity detecting device 1, a sensor control layer 4 having a sensor control portion 40 and an RF layer 2 having an RF portion 20 are formed such that forming surfaces of the sensor control portion 40 and the RF portion 20 are arranged so as to come into contact with an MEMS layer 3. As a result, the MEMS layer 3 having a micro-machine portion 30 formed therein is sandwiched between the sensor control layer 4 and the RF layer 2. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种可以容易地保护在各个基板上形成的结构的层压装置。解决方案：在物理量检测装置1中，形成具有传感器控制部分40和具有RF部分20的RF层2的传感器控制层4，使得传感器控制部分40和RF部分 20被布置成与MEMS层3接触。结果，其中形成有微机部分30的MEMS层3夹在传感器控制层4和RF层2之间。版权所有（C）2008，JPO＆INPIT

6. 发明专利

JP2004264877A Optical waveguide and manufacturing method therefor 有权
公开(公告)号：JP2004264877A
公开(公告)日：2004-09-24
申请号：JP2004182699
申请日：2004-06-21
申请人： Omron Corp , オムロン株式会社
发明人： HIGUCHI MASAYOSHI , TAKAHASHI TOSHIYUKI , TOTANI HIROMI , YASUDA SHIGERU , HOSOKAWA HAYAMI , SATO FUMIHIKO
IPC分类号： G02B6/122 , G02B6/13
摘要： PROBLEM TO BE SOLVED: To provide an optical waveguide which can easily be manufactured by a duplication method, and moreover has a structure resistant to leaking of an internal optical signal from the core, and to provide a manufacturing method therefor. SOLUTION: A clad substrate 2 is provided with a recessed groove 3 for forming a core on the upper surface. Also, on both sides of the recessed groove 3, recession parts 6 are formed via flat parts 5. After applying an ultraviolet curing transparent resin 8 onto this clad substrate 2, the transparent resin 8 is pressed by a stamper 13. Then, since the core 4 is formed in the recessed groove 3 and also excessive amount of the transparent resin 8 pressed between the stamper 13 and the flat part 5 can flow and escape into the recession 6 sides, the transparent resin 8 can be thinned in a short period of time. Thus, the transparent resin 8 remaining on the flat parts 5 has thickness of 3μm or less and has a width of 5μm to 5mm. COPYRIGHT: (C)2004,JPO&NCIPI

7. 发明专利

JP2006301669A Optical waveguide and manufacturing method therefor 有权
标题翻译：光波导及其制造方法
公开(公告)号：JP2006301669A
公开(公告)日：2006-11-02
申请号：JP2006214948
申请日：2006-08-07
申请人： Omron Corp , オムロン株式会社
发明人： HIGUCHI MASAYOSHI , TAKAHASHI TOSHIYUKI , TOTANI HIROMI , YASUDA NARU , HOSOKAWA HAYAMI , SATO FUMIHIKO
IPC分类号： G02B6/122 , G02B6/13
摘要： PROBLEM TO BE SOLVED: To provide an optical waveguide which can easily be manufactured by a duplication method, and moreover has a structure resistant to leaking of an internal optical signal from the core, and to provide a manufacturing method therefor. SOLUTION: A concave slot 3 for forming a core is formed on the upper surface of a cladding substrate 21. And on both sides of the concave slot 3, hollows 6 are formed via flat portions 5. An ultraviolet ray hardening type transparent resin 8 is applied onto the surface of the cladding substrate 2, thereafter the transparent resin 8 is pressed by a stamper 13. At this moment, a core 4 is formed in the concave slot 3 and excessive transparent resin 8 pressed between the stamper 13 and the flat portions 5 flows and escapes into the hollows 6, as a result, the transparent resin 8 can be made thin in a short time. The capacity of the hollows 6 is larger than that of the concave slot 3, and moreover the depth of the hollows 6 is deeper than that of the concave slot, and is 10μm or deeper. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种可以通过复制方法容易地制造的光波导，并且还具有抵抗来自芯的内部光信号泄漏的结构，并提供其制造方法。解决方案：在包层基板21的上表面上形成用于形成芯的凹槽3.在凹槽3的两侧，通过平坦部分5形成中空部6.透明的紫外线硬化型透明树脂8被施加到包覆基板2的表面上，然后透明树脂8被压模13按压。此时，在凹槽3中形成芯体4，并且在压模13和压模13之间挤压过量的透明树脂8 平坦部分5流入并逸出到中空部分6中，结果可以在短时间内使透明树脂8变薄。中空部6的容积大于凹槽3的容积，此外，中空部6的深度比凹槽的深度为10μm以下。版权所有（C）2007，JPO＆INPIT

8. 发明专利

JP2006227655A Method of manufacturing optical waveguide device 审中-公开
标题翻译：制造光波导装置的方法
公开(公告)号：JP2006227655A
公开(公告)日：2006-08-31
申请号：JP2006143201
申请日：2006-05-23
申请人： Omron Corp , オムロン株式会社
发明人： FURUMURA YOSHIYUKI , HAYAMIZU KAZUYUKI , TERAKAWA YUKARI , HOSOKAWA HAYAMI , TAKAHASHI TOSHIYUKI , HIGUCHI MASAYOSHI , TATARA YOSHITAKA , YASUDA NARU , NOZAWA HIROTO
IPC分类号： G02B6/13 , G02B6/12 , G02B6/122
摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing a thin optical waveguide. SOLUTION: On a glass substrate 17a, there are formed a plurality of optical waveguide regions composed of a light transmitting/propagating core and a lower clad layer 18 surrounding the core to manufacture an optical waveguide master substrate 15a. On a silicon substrate 21a, a base substrate 16a is prepared by machining a waveguide fixing region 30 and the like. A ultraviolet setting resin 20a is applied to the surface opposite from the glass substrate 17a of the optical waveguide master substrate 15a, with the master substrate 15a laminated on the base substrate 16a. Then, the ultraviolet setting resin 20a is cured by irradiation with ultraviolet rays to form an upper clad layer 20. Thereafter, the glass substrate 17a is separated and removed from the lower clad layer 18. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种制造薄光波导的方法。解决方案：在玻璃基板17a上形成多个由透光芯和传播芯组成的光波导区域和围绕芯的下包层18，以制造光波导母板15a。在硅基板21a上，通过加工波导固定区域30等来制备基底基板16a。将母基板15a层叠在基板16a上的与光波导母版基板15a的玻璃基板17a相反的面上涂布紫外线固化树脂20a。然后，通过紫外线照射使紫外线固化树脂20a固化，形成上部包覆层20.然后，从下部包覆层18剥离玻璃基板17a。（C）2006，JPO＆NCIPI

9. 发明专利

JP2005049821A Optical multiplexer/demultiplexer, optical integrated circuit and optical transmitter-receiver using them 审中-公开
标题翻译：光学多路复用器/解复用器，光学集成电路和使用它们的光发射机接收器
公开(公告)号：JP2005049821A
公开(公告)日：2005-02-24
申请号：JP2004147034
申请日：2004-05-17
申请人： Omron Corp , オムロン株式会社
发明人： HIGUCHI MASAYOSHI , HOSOKAWA HAYAMI , FUJIWARA HIROYUKI , HAYAMIZU KAZUYUKI , FURUMURA YOSHIYUKI , ENAMI AKIRA
IPC分类号： G02B6/30 , G02B6/12 , G02B6/125 , G02B6/28 , G02B6/293 , G02B6/42 , H01L31/0232 , H01S5/022
CPC分类号： G02B6/2938 , G02B6/12007 , G02B6/125 , G02B6/29361 , G02B6/4246 , G02B2006/12109 , G02B2006/12116
摘要： PROBLEM TO BE SOLVED: To provide an optical multiplexer/demultiplexer which has high isolation, small polarization dependency and can be miniaturized. SOLUTION: The end part of a core 15 and the end part of a core 16 are facing to each other interposing a thin film filter 19. The end part of the core 15 which is located at a remote side from the filter and the end part of the core 16 which is located at a remote side from the filter are substantially in parallel. A core 17 is arranged to be optically connected to and branched from the core 15 at the side end part of the filter of the core 15. The side end part of the filter of the core 15 and the side end part of the filter of the core 16 are bent and the side end part of the filter of the core 15 is bent so as to be projected in a curve toward the side at which the core 17 is arranged. The end parts of the core 15 and the core 16 which are located at a remote side from the respective filters reach the end side of an optical waveguide and the end part of the core 17 which is located at a remote side from the filter reaches the side of the optical waveguide. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种具有高隔离度，小偏振依赖性并且可以小型化的光复用器/解复用器。解决方案：芯15的端部和芯16的端部面对彼此，插入薄膜过滤器19.芯15的位于离过滤器远侧的端部和位于离过滤器远侧的芯16的端部基本上是平行的。芯部17布置成在芯子15的过滤器的侧端部处与芯子15光学连接和分支。芯子15的过滤器的侧端部分和过滤器的侧端部分芯16弯曲，并且芯15的过滤器的侧端部被弯曲成朝向设置有芯17的一侧的曲线突出。位于距过滤器远端的芯部15和芯部16的端部到达光波导的端侧，位于离滤光片远侧的芯部17的端部到达一侧的光波导。版权所有（C）2005，JPO＆NCIPI

10. 发明专利

JP2004086129A Optical waveguide device, manufacture method of optical waveguide device and device for optical communication 有权
标题翻译：光波导装置，光波导装置的制造方法和用于光通信的装置
公开(公告)号：JP2004086129A
公开(公告)日：2004-03-18
申请号：JP2003011709
申请日：2003-01-20
申请人： Omron Corp , オムロン株式会社
发明人： FURUMURA YOSHIYUKI , HAYAMIZU KAZUYUKI , TERAKAWA YUKARI , HOSOKAWA HAYAMI , TAKAHASHI TOSHIYUKI , HIGUCHI MASAYOSHI , TATARA YOSHITAKA , YASUDA SHIGERU , NOZAWA HIROTO
IPC分类号： G02B6/12 , G02B6/122 , G02B6/125 , G02B6/13 , G02B6/138 , G02B6/30
CPC分类号： G02B6/4246 , G02B6/12007 , G02B6/125 , G02B6/138 , G02B6/30 , H01L31/14
摘要： PROBLEM TO BE SOLVED: To provide a manufacture method of an optical waveguide device suitable for mass production by simplifying the manufacture stage of the optical waveguide device. SOLUTION: The optical waveguide device is provided with an optical fiber guide 23a for fixing an optical fiber and optical element installation parts 24a and 24b for installing element mounting benches 33a and 33b on the outside of the waveguide fixed area 30 of a silicon substrate 21a. A metallic thin film 22 is formed on the outside of the area 30 of the substrate 21a. After a waveguide substrate 15 is attached to the entire upper surface of the substrate 21a through adhesive resin being an upper clad layer, it is diced along the edge of the area 30. The substrate 15 on the outside of the area 30 is removed so as to expose the guide 23a and the installation parts 24a and 24b. COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：通过简化光波导器件的制造阶段，提供适合于批量生产的光波导器件的制造方法。解决方案：光波导装置设置有用于固定光纤的光纤引导件23a和用于将元件安装台33a和33b安装在硅的波导固定区域30的外侧上的光学元件安装部分24a和24b 基板21a。金属薄膜22形成在基板21a的区域30的外侧。在通过作为上包层的粘合树脂将波导基板15附接到基板21a的整个上表面之后，沿着区域30的边缘切割。将区域30的外侧的基板15移除，露出引导件23a和安装部分24a和24b。版权所有（C）2004，JPO

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