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1. 发明专利

JPH11271346A Scanning type probe microscope 失效
标题翻译：扫描型探针显微镜
公开(公告)号：JPH11271346A
公开(公告)日：1999-10-08
申请号：JP7450698
申请日：1998-03-23
申请人： Olympus Optical Co Ltd , オリンパス光学工業株式会社
发明人： SAKAI NOBUAKI
IPC分类号： G01B11/30 , G01N37/00 , G01Q20/02 , G01Q60/24 , G01Q60/38
摘要： PROBLEM TO BE SOLVED: To provide a scanning type probe microscope that can accurately detect the displacement of a cantilever by stably reading reflection light from the cantilever without being optically affected by light that stays off the cantilever.
SOLUTION: A scanning type probe microscope is provided with a displacement sensor with a cantilever 12 where a probe 13 is formed at a free end, a laser diode 14 that can emit laser beams 17 toward the cantilever 12 so that the displacement state of the cantilever 12 can be optical detected, and a two- division photo detector 18 that can receive reflection light from the cantilever, and a lever structure body 12a that regulates, in a fixed direction, the reflection direction of light being spread in a region other than the cantilever out of laser beams being emitted from the laser diode.
COPYRIGHT: (C)1999,JPO
摘要翻译：要解决的问题：提供一种扫描型探针显微镜，其可以通过稳定地读取来自悬臂的反射光而不受静止在悬臂上的光的光学影响而精确地检测悬臂的位移。解决方案：扫描型探针显微镜具有位移传感器，其具有悬臂12，探针13在自由端形成，激光二极管14能够朝向悬臂12发射激光束17，使得悬臂的位移状态 12可以是光学检测的，并且可以接收来自悬臂的反射光的二分光电检测器18和杆结构体12a，其在固定的方向上调节光的反射方向在除了从激光二极管发射的激光束悬臂。

2. 发明专利

JP2003299368A Piezoelectric element control device 审中-公开
标题翻译：压电元件控制装置
公开(公告)号：JP2003299368A
公开(公告)日：2003-10-17
申请号：JP2002097591
申请日：2002-03-29
申请人： Olympus Optical Co Ltd , オリンパス光学工業株式会社
发明人： SAKAI NOBUAKI
IPC分类号： B81B3/00 , G01Q10/00 , G01Q10/04 , G01Q70/04 , H01L41/09 , H02N2/00 , G01N13/10 , G12B21/20
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric element control device which can accurately drive a piezoelectric element without bringing about creeping even in a low-frequency range substantially near a DC. SOLUTION: The piezoelectric element control device comprises: a corresponding circuit 40 for correcting a drive voltage signal Vin supplied from a controller (not shown); and a piezo driver 10 for amplifying a corrected drive voltage signal Vh inputted from the circuit 40 via an amplification factor K1 to apply a voltage to the piezoelectric element 20. The circuit 40 has input/output characteristics substantially equal to frequency characteristics of an 'applied voltage to the element 20' with respect to the 'displacing amount of the element 20' preferably in substantially all frequency ranges in the lower frequency range than a boundary frequency in which at least the relation between the 'change amount of the element' and the 'applied voltage of the element' is changed. COPYRIGHT: (C)2004,JPO
摘要翻译：解决的问题：提供即使在基本上接近DC的低频范围内也能够精确地驱动压电元件而不引起蠕变的压电元件控制装置。解决方案：压电元件控制装置包括：对应的电路40，用于校正从控制器（未示出）提供的驱动电压信号Vin; 以及压电驱动器10，用于经由放大系数K1放大从电路40输入的经校正的驱动电压信号Vh，以向压电元件20施加电压。电路40的输入/输出特性基本上等于施加的相对于元件20的移位量的元件20'的电压优选地在比在边界频率更低的频率范围内的基本上所有的频率范围内，其中至少“元件的变化量”和 '元件的施加电压'改变。版权所有（C）2004，JPO

3. 发明专利

JP2003043402A Optical scanner driving circuit 审中-公开
标题翻译：光学扫描仪驱动电路
公开(公告)号：JP2003043402A
公开(公告)日：2003-02-13
申请号：JP2001228113
申请日：2001-07-27
申请人： Olympus Optical Co Ltd , オリンパス光学工業株式会社
发明人： SAKAI NOBUAKI
IPC分类号： B41J2/44 , G02B26/10
摘要： PROBLEM TO BE SOLVED: To provide an optical scanner driving circuit capable of performing highly accurate vibration control by eliminating the oscillation of the center of the vibration of the optical scanner.
SOLUTION: This optical scanner driving circuit has a vibration driving means angularly vibrating a movable plate by supplying a current including an AC component to a driving coil, a vibration detecting means which is provided with a electromotive force detecting means detecting induced electromotive force generated in a sensor coil, a vibration frequency control means 401 controlling the frequency of the angular vibration, first vibration amplitude control means 403, 404, 405, 406, 407, 402, 412 controlling the amplitude of the angular vibration based on the detected signal to be outputted by the vibration detecting means and second vibration amplitude control means 403, 410, 411, 412 controlling vibration states having frequency components other then the angular vibration based on the detected signal to be outputted by the vibration detecting means.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：提供一种能够通过消除光学扫描器的振动中心的振荡来执行高精度振动控制的光学扫描器驱动电路。解决方案：该光扫描器驱动电路具有振动驱动装置，通过向驱动线圈提供包括交流分量的电流来对可动板进行角度振动，振动检测装置设有检测感应电动势的感应电动势的电动势检测装置传感器线圈，控制角振动频率的振动频率控制装置401，基于要输出的检测信号来控制角振动幅度的第一振幅控制装置403,404,405,406,407,402,412 通过振动检测装置和第二振动幅度控制装置403,410,411,412基于由振动检测装置输出的检测信号来控制具有除了角振动之外的频率分量的振动状态。

4. 发明专利

JP2003029193A Optical scanner drive circuit 有权
标题翻译：光学扫描仪驱动电路
公开(公告)号：JP2003029193A
公开(公告)日：2003-01-29
申请号：JP2001214178
申请日：2001-07-13
申请人： Olympus Optical Co Ltd , オリンパス光学工業株式会社
发明人： SAKAI NOBUAKI
IPC分类号： G02B26/10 , H04N1/036 , H04N1/113
摘要： PROBLEM TO BE SOLVED: To provide an optical scanner which controls the amplitude with high precision, without being affected by change of the drive frequency of an optical scanner.
SOLUTION: The optical scanner having a drive coil and a sensor coil formed on a mobile plate is provide with a current supply means for the drive coil, a detection means which outputs a detection signal, corresponding to an induced electromotive force generated in the sensor coil, and a control circuit 4a which controls electricity supply of the current supply means, on the basis of the detection signal, and the control circuit 4a is provided with oscillation frequency control means 403, 404, 408, and 402 which control the frequency of torsional oscillation of the mobile plate, an integral circuit 409 which gives a gain inversely proportional to the frequency to the detection signal in a frequency band in the vicinity of the torsional oscillation frequency of the mobile plate, and amplitude control means 405, 406, 407 and 408 which control the amplitude of torsional oscillation of the mobile plate, on the basis of the output of the integration circuit 409.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：提供一种高精度地控制振幅的光学扫描仪，而不受光学扫描器的驱动频率的变化的影响。解决方案：具有驱动线圈和形成在移动板上的传感器线圈的光学扫描器为驱动线圈提供电流供应装置，检测装置输出对应于在传感器线圈中产生的感应电动势的检测信号以及控制电路4a，其根据检测信号控制电流供给装置的电力供应，控制电路4a设置有控制扭转频率的振荡频率控制装置403,404,408和402 在移动板的扭转振荡频率附近的频带中给出与频率成反比的增益的积分电路409以及振幅控制装置405,406,407和 408，其基于积分电路409的输出控制移动板的扭转振荡的幅度。

5. 发明专利

JP2003315679A Microscope system 审中-公开
标题翻译：微观系统
公开(公告)号：JP2003315679A
公开(公告)日：2003-11-06
申请号：JP2002117948
申请日：2002-04-19
申请人： Olympus Optical Co Ltd , オリンパス光学工業株式会社
发明人： SAKAI NOBUAKI , YONEYAMA TAKASHI
IPC分类号： G02B21/00
摘要： PROBLEM TO BE SOLVED: To provide a microscope system having an overcontact preventive function capable of detecting the contact of a viewing object and an objective lens with high accuracy and preventing damaging of either or both by the overcontact of both.
SOLUTION: The microscope system makes at least either of a stage 2 to be placed on with a specimen 4 and the objective lens 6 relatively in an optical axis direction movable. When the contact of the specimen 4 and the objective lens 6 is detected by a contact detecting sensor 11, a DC component is removed in a contact deciding section 12 for the output according to the contact detection and the contact decision of the specimen 4 and the objective lens 6 is performed in accordance with the output removed of the DC component and at least either of the stage 2 and the objective lens 6 is controlled by the result of the decision.
COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：提供一种具有过度接触预防功能的显微镜系统，其能够以高精度检测观察对象和物镜的接触，并且通过两者的过度接触来防止任一者或两者的损害。解决方案：显微镜系统使得可以在可移动的光轴方向上相对地将样品4和物镜6放置在载物台2上。当通过接触检测传感器11检测到样本4和物镜6的接触时，在接触判定部12中根据接触检测和样本4的接触判定和物镜6根据直流分量的输出而被执行，并且由判定结果控制台2和物镜6的至少任一个。版权所有（C）2004，JPO

6. 发明专利

JP2003043401A Optical scanner driving circuit 审中-公开
标题翻译：光学扫描仪驱动电路
公开(公告)号：JP2003043401A
公开(公告)日：2003-02-13
申请号：JP2001228112
申请日：2001-07-27
申请人： Olympus Optical Co Ltd , オリンパス光学工業株式会社
发明人： SAKAI NOBUAKI
IPC分类号： B41J2/44 , G02B26/10
摘要： PROBLEM TO BE SOLVED: To provide an optical scanner driving circuit which can be operated with a prescribed amplitude and a prescribed frequency with high accuracy while eliminating mutual induced electromagnetic force to be generated in a sensor coil.
SOLUTION: An optical scanner 1 having the magnet arranged in the vicinity of a movable plate and the driving coil 102 and the sensor coil 103 formed on the movable plate, is provided with a current supplying means 2 supplying a current including at least an AC component to the driving coil 102, a detecting means 3 detecting an induced electromotive force to be generated in the sensor coil 103, mutual induced electromotive force generating means 502, 503 generating separately and artificially the mutual induced electromotive force to be generated in the sensor coil 103 by making the current including at least the AC component flow through the driving coil 102, a subtracting means 8 subtracting outputs of the mutual induced electromotive force generating means 502, 503 from the output of the detecting means 3 and a control means 4 controlling the twisting oscillation of the movable plate based on the output of the subtracting means 8.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：提供一种光学扫描器驱动电路，其可以在消除在传感器线圈中产生的相互感应的电磁力的情况下以高精度以规定的振幅和规定的频率进行操作。解决方案：具有布置在可移动板附近的磁体和形成在可移动板上的驱动线圈102和传感器线圈103的光学扫描器1设置有电流供应装置2，电流提供装置2提供至少包括AC分量驱动线圈102，检测在传感器线圈103中产生的感应电动势的检测装置3，分别产生在传感器线圈103中产生的相互感应的电动势的相互感应电动势产生装置502,503 通过使至少包含AC分量的电流流过驱动线圈102，减法装置8从检测装置3的输出中减去互感感应电动势产生装置502,503的输出，以及控制装置4控制扭转基于减法装置8的输出，可动板的摆动。

7. 发明专利

JP2003043403A Optical scanner driving circuit 审中-公开
标题翻译：光学扫描仪驱动电路
公开(公告)号：JP2003043403A
公开(公告)日：2003-02-13
申请号：JP2001228114
申请日：2001-07-27
申请人： Olympus Optical Co Ltd , オリンパス光学工業株式会社
发明人： SAKAI NOBUAKI
IPC分类号： B41J2/44 , G02B26/10
摘要： PROBLEM TO BE SOLVED: To provide an optical scanner driving circuit capable of performing highly accurate amplitude control by detecting the vibration states of the optical scanner without being affected by the change of the resistance value of a sensor coil. SOLUTION: This driving circuit is provided with a vibration driving means vibrating a movable plate, a vibration detecting means detecting the vibration states of the movable plate, an amplitude control means controlling the vibration amplitude of the movable plate and a frequency control means controlling the vibration frequency of the movable plate, and the vibration detecting means has a constant voltage power source 331 which is connected in series with a sensor coil 103, a voltage detecting means 330 which detects a voltage to be generated at both ends of the sensor coil 103 and the constant voltage power source 331 which are connected in series with each other to output a signal corresponding to the generated voltage, a constant voltage eliminating means 332 which eliminates a constant voltage component from the output of the voltage detecting means 330 to output a signal corresponding to the eliminated component and a constant voltage extracting means 333 which extracts a constant voltage component from the voltage detecting means 330 to output a signal corresponding to the extracted component.
摘要翻译：要解决的问题：提供一种能够通过检测光学扫描仪的振动状态而不受传感器线圈的电阻值的变化的影响而进行高精度幅度控制的光学扫描器驱动电路。解决方案：该驱动电路设置有振动可动板的振动驱动装置，检测可动板的振动状态的振动检测装置，控制可动板的振动幅度的振幅控制装置和控制振动的频率控制装置可动板的频率和振动检测装置具有与传感器线圈103串联连接的恒压电源331，检测传感器线圈103的两端产生的电压的电压检测单元330以及恒压电源331彼此串联连接以输出对应于所产生的电压的信号;恒定电压消除装置332，从电压检测装置330的输出消除恒定电压分量，以输出对应的信号到消除的部件和提取常数的恒压提取装置333 nt电压分量，以输出与所提取的分量对应的信号。

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