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    • 8. 发明专利
    • Tool and method for manufacturing semiconductor device
    • 制造半导体器件的工具和方法
    • JP2007095780A
    • 2007-04-12
    • JP2005279968
    • 2005-09-27
    • Oki Electric Ind Co Ltd沖電気工業株式会社
    • SAEKI YOSHIHIRO
    • H01L21/301
    • H01L21/6838
    • PROBLEM TO BE SOLVED: To provide a tool for manufacturing a semiconductor device that enables stable dicing and easy pickup. SOLUTION: The tool can form closed cavities C at a portion to a semiconductor wafer mounted on the upper section by a lattice section 11 and a bottom section 13 for supporting a cut-off region for dividing the semiconductor wafer into semiconductor chips. A plurality of cavities C are connected by a connecting hole 11a provided at the lattice section 11 and takes in and out inner air by an air supply and exhaust port 12a provided at an enclosure section 12, thus storing irregularities in the cavities C, even if there are the irregularities, such a bump, on the back of the semiconductor wafer, and hence fixing the semiconductor wafer to the tool reliably. The cut semiconductor chip can be taken out easily, by opening the air supply and exhaust port 12a to return the inside of the cavity to normal pressure. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种用于制造半导体器件的工具,其能够进行稳定的切割和容易拾取。 解决方案:工具可以通过晶格部分11和用于支撑用于将半导体晶片分成半导体芯片的截止区域的底部13在安装在上部的半导体晶片的一部分处形成闭合腔C. 多个空腔C通过设置在网格部分11处的连接孔11a连接,并且通过设置在封闭部分12处的空气供给和排出端口12a来进出内部空气,从而在空腔C中存储不规则性,即使 在半导体晶片的背面存在不规则的凹凸,因此可靠地将半导体晶片固定到工具上。 可以通过打开供气和排气口12a来将空腔内部返回到正常压力,从而容易地取出切割的半导体芯片。 版权所有(C)2007,JPO&INPIT