专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明专利

JP2009073730A Film formation method and film formation apparatus for thin film of lead zirconate titanate polymer 审中-公开
标题翻译：铅锌酸铅聚合物薄膜成膜方法及膜形成装置
公开(公告)号：JP2009073730A
公开(公告)日：2009-04-09
申请号：JP2008221967
申请日：2008-08-29
申请人： Okayama Univ , 国立大学法人岡山大学
发明人： KANDA TAKEFUMI , SUZUMORI KOICHI , KO MASAO
IPC分类号： C01G25/00 , C04B35/49 , C04B35/491 , H01L41/187 , H01L41/317 , H01L41/39
摘要： PROBLEM TO BE SOLVED: To make it possible to use a PZT thin film formation method using a hydrothermal synthesis method even in the case where a complicatedly shaped or large substrate is used. SOLUTION: The film formation method for the thin film of lead zirconate titanate polymer is one for synthesizing a lead zirconate titanate polymer by a hydrothermal synthesis thin film formation reaction comprising placing an aqueous solution 4 containing raw material ions and a base material 5 in a pressure vessel 1, heating the pressure vessel under vibration by means of an ultrasonic vibrator 3 integrally coupled with the vessel to thereby form a thin film of a lead zirconate titanate polymer on the surface of the base material by a hydrothermal synthesis thin film formation reaction between the base material and the aqueous solution. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：即使在使用复杂形状或大的基板的情况下，也可以使用使用水热合成方法的PZT薄膜形成方法。解决方案：锆钛酸铅聚合物薄膜的成膜方法是通过水热合成薄膜形成反应合成锆钛酸铅聚合物的成膜方法，包括放置含有原料离子的水溶液4和基材5 在压力容器1中，通过与容器一体耦合的超声波振动器3在振动下加热压力容器，从而通过水热合成薄膜形成在基材表面上形成锆钛酸铅聚合物的薄膜基材与水溶液之间的反应。版权所有（C）2009，JPO＆INPIT

IPRDB

热门服务

关于我们

友情链接

联系方式