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    • 1. 发明专利
    • OPTICAL ELEMENT AND ITS PRODUCTION
    • JPH1164629A
    • 1999-03-05
    • JP21617997
    • 1997-08-11
    • OYO KODEN KENKIYUUSHITSU KKNTT ADVANCED TECH KK
    • SUZUKI EIJIYAMADA NORIYOSHI
    • G02B5/28B29D11/00B29K79/00
    • PROBLEM TO BE SOLVED: To improve long-term reliability of an optical element by forming an intermediate film between a polyimlde film and a dielectric multilayered film so as to improve adhesion property of these layers. SOLUTION: A temporary base body 11 consists of a glass substrate 11a as a temporary substrate and a fluorinated polyimide film 11b formed thereon. A multilayered film 13 comprising alternately deposited SiO2 films and TiO2 films as a dielectric multilayered film is formed to total 20 to 30 μm thickness on the surface of the temporary base body 11 by sputtering. A specified coupling agent (OPI coupler) as an adhesion improving agent is applied on the dielectric multilayered film 13 by spin coating. Then the coupling agent is heat treated in air to form an intermediate film 15 to improve adhesion property between the dielectric multilayered film 13 and a polyimide film to be formed in the succeeding process. Then a polyimide film 17 as a substrate is formed on the obtd. sample. Further, a dicing tape 19 as a supporting body in the succeeding dividing process is fixed on the polyimide film 17. Then the sample is diced.