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1. 发明专利

JPS6464811A CUTTING OF SAPPHIRE WAFER 失效
公开(公告)号：JPS6464811A
公开(公告)日：1989-03-10
申请号：JP22339887
申请日：1987-09-07
申请人： OSAKA GAS CO LTD , TOSHIBA CORP
发明人： IPPONMATSU MASAMICHI , MATSUMOTO TAKESHI , MATSUZAKA TAKASHI
IPC分类号： B28D5/00 , C30B33/00
摘要： PURPOSE:To make it possible to carry out easily cutting of a sapphire wafer without spoiling the surface physical properties of a gas snsor element, by cutting the sapphire wafer of a specific thickness on the surface of which many gas sensor elements are formed by means of scribing. CONSTITUTION:A pair of electrodes consisting of electrodes 6 and 8 is e.g. thin membranes comprised of platinum, which is formed on each divided area of a sapphire wafter 2 by means of sputtering process. Dimensions of the electrodes 6 and 8 are 1.6X0.6mm and these electrodes are formed face to face each other in the distance of 0.4mm. The membrane thickness is e.g. 0.3mm. As the materials constituting the electrodes, not only platinum, but also those having high electric conductivity such as gold, silver, aluminum can be used. On the sapphire wafer 2, one of the surface on which many gas sensor elements 4 are formed, scratched cuts 12 are drawn in parallel to each other lengthwise and crosswise by means of a well known scriber, a diamond needle. Moreover, crosswise scratched cuts 12 are drawn perpendicular thereto.

2. 发明专利

JPS63205554A GAS SENSOR 失效
公开(公告)号：JPS63205554A
公开(公告)日：1988-08-25
申请号：JP3862787
申请日：1987-02-20
申请人： OSAKA GAS CO LTD , TOSHIBA CORP
发明人： IPPONMATSU MASAMICHI , MATSUMOTO TAKESHI , MITAMURA HARUO , KUROKI KATSUYUKI , MATSUZAKA TAKASHI
IPC分类号： G01N27/12
摘要： PURPOSE:To reduce the power consumption of a gas sensor by providing a sensing part having a thin film which senses gas to vary in resistivity on one surface of a surface heater which is supplied with power and bringing a heat insulator into contact with the other surface. CONSTITUTION:A sapphire substrate 4, electrodes 6 and 8, and the thin film are arranged on the top surface of the ceramic heater 2 which spreads in a plane, and the electrodes 6 and 8 and thin film 10 constitute the sensing part 12. Further, the heater 2 is fixed to the heat insulator 14. Then the heater 2 is supplied with constant currents through heater input terminals 40 and 42 and the sensing part 12 is held at constant high operating temperature above about 100 deg.C. At this time, the reverse surface and entire flank of the heater 2 abut on the heat insulator 14, so the heat radiation from this heater 2 is suppressed. The temperature of the sensing part is therefore held constant only by supplying small electric power to the heater 2. When the thin film 10 senses gas at this operating temperature, its resistivity decreases, so the resistance value of the sensing part 12 decreases, thereby sending data indicating that the gas is detected.

3. 发明专利

JPH04289447A MANUFACTURE OF GAS SENSOR 失效
公开(公告)号：JPH04289447A
公开(公告)日：1992-10-14
申请号：JP210691
申请日：1991-01-11
申请人： OSAKA GAS CO LTD , TOSHIBA CORP
发明人： TSUJIMURA TOSHIYUKI , SHIRATORI MASAYUKI , MATSUMOTO TAKESHI , TSURUYA TAKESHI
IPC分类号： G01N27/12
摘要： PURPOSE:To keep the amount of a catalyst layer uniform, to avoid the occurrence of cracks in the catalyst layer and to make it possible to maintain stabilized sensitivity all the time. CONSTITUTION:A glass substrate 10 is fixed to the approximately central part of the surface of an insulating substrate 4 having a heater 7. A gas sensitive body 11 is provided on the surface of the glass substrate 10. The gas sensitive body 11 responds to the concentration of gas in surrounding atmosphere under the state wherein the gas sensitive body 11 is heated by the heater 7. Catalyst slurry is applied so as to cover the gas sensitive body 11, and a catalyst layer 14 is formed. The catalyst slurry is formed by adding ethylene glycol which is dihydric alcohol as an adjusting binder into catalyst powder supported with Pd-based alumina.

4. 发明专利

JPS63229354A MANUFACTURE OF GAS SENSOR 失效
公开(公告)号：JPS63229354A
公开(公告)日：1988-09-26
申请号：JP6483487
申请日：1987-03-18
申请人： OSAKA GAS CO LTD , TOSHIBA CORP
发明人： IPPONMATSU MASAMICHI , MATSUMOTO TAKESHI , YAKUSHIJI SHINGO , MATSUZAKA TAKASHI
IPC分类号： G01N27/12
摘要： PURPOSE:To enhance a sensitivity ratio by forming an insulating metal membrane having high adhesive strength, by arranging the edge of the hole of a mask in a state spaced apart from the side edge of an electrode by a predetermined distance to perform sputtering. CONSTITUTION:Membrane like electrodes 6, 8 are formed on an N-type semiconductive membrane 4 changing in resistivity upon the response to gas and a mask 14 having a hole 16 is arranged thereon so that the edges 18, 20 thereof are spaced apart from the side edges of the electrodes by the distance 1.5 times or more the thickness of the mask 14 and, in this state, an insulating metal oxide membrane 22 is formed by sputtering. Therefore, the irregular structures reflected by the edge parts are limited to the electrodes and, since the regular membrane 22 having high adhesive strength can be formed on the membrane 4, a required sensitivity ratio can be obtained.

5. 发明专利

JPH04299245A PRODUCTION SYSTEM FOR GAS SENSOR 失效
公开(公告)号：JPH04299245A
公开(公告)日：1992-10-22
申请号：JP6500891
申请日：1991-03-28
申请人： OSAKA GAS CO LTD , TOSHIBA CORP
发明人： MATSUMOTO TAKESHI , TSUJIMURA TOSHIYUKI
IPC分类号： G01N27/04 , G01N27/12 , G01N27/16
摘要： PURPOSE:To enable stable outputting of a sensor without variations free from effects of a thickness distribution in the formation of a thin film. CONSTITUTION:This system is provided with an insulation base plate sectioned in plurality, an electric heater 7 provided on the section elements of the insulation base plate, a pair of electrodes 8 and 8 provided on respective surfaces of the separation elements of the insulation substrate, gas sensing bodies which are formed by a thin film formation method over the entire area of the surface of the insulation base plate and left on both the electrodes 8 and 8 of the individual section elements by masking and a catalyst layer provided on the gas sensing bodies. The insulation base plate is divided for each of the division elements to produce a plurality of gas sensors. The distance (k) between both the electrodes 8 and 8 provided on the respective section elements is changed according to the position of the insulation base plate at which the individual section elements are located.

6. 发明专利

JPH04289446A GAS SENSOR 失效
公开(公告)号：JPH04289446A
公开(公告)日：1992-10-14
申请号：JP210591
申请日：1991-01-11
申请人： OSAKA GAS CO LTD , TOSHIBA CORP
发明人： OKAZAKI HIROKI , MATSUMOTO TAKESHI , YAKUSHIJI SHINGO
IPC分类号： G01N27/12
摘要： PURPOSE:To make it possible to perform proper detection without errors by removing the effect of H2O. CONSTITUTION:Electrodes 11 and 12 are provided at the approximately central position of the surface of a heater substrate 4 having a heater 7. A gas sensitive body 13 is provided on the electrodes 11 and 12. The gas sensitive body is a metal oxide semiconductor film comprising SnO2, ZnO, Fe2O3 or the like or a metal oxide catalyst layer comprising Al2O3. or the like. The gas sensitive body is heated by the heating of the heater 7 and more sensitively responds to the gas in surrounding atmosphere. Thus the resistance value is changed. A hygroscopic body 14 is provided so as to cover the gas sensitive body 13 at the surface of the heater substrate 4. As the hygroscopic layer 14, porous ceramic such as MgCr2O4, hydroxyapatite or the like is used.

7. 发明专利

JPH04104052A GAS SENSOR 失效
公开(公告)号：JPH04104052A
公开(公告)日：1992-04-06
申请号：JP22129690
申请日：1990-08-24
申请人： OSAKA GAS CO LTD , TOSHIBA CORP
发明人： TSUJIMURA TOSHIYUKI , NAKAMURA YUJI , MATSUMOTO TAKESHI
IPC分类号： G01N27/12 , G01N27/16
摘要： PURPOSE:To eliminate the unevenness of the applied surface of a catalyst and the nonuniformity of the applied amount among products and to make the detecting characteristics for every product uniform by containing a second substrate having a gas sensitive body on the surface into the recess part of a first substrate, and applying the catalyst on the position covering the recess part. CONSTITUTION:A glass substrate 10 on which a gas sensitive body 11 is provided is contained in a recess part 4a of a heater substrate 4. Under this state, a catalyst layer 13 is applied so as to cover the recess part 4a. The catalyst layer 13 is formed by screen printing so as to cover both the substrate 10 and the substrate 4 under the state wherein a part of each of electrodes 12 and 12 is exposed. The substrate 10 is bonded to the substrate 4 by the application of the catalyst layer 13. In this constitution, the surface of the substrate 4 and the surface of the substrate 10 form the approximately same plane. Therefore, the catalyst layer 13 can be uniformly applied. The amount of the application becomes uniform regardless of products. The 'dispersion' in detecting characteristics for every product can be eliminated.

8. 发明专利

JPH0540102A GAS SENSOR 失效
公开(公告)号：JPH0540102A
公开(公告)日：1993-02-19
申请号：JP19800391
申请日：1991-08-07
申请人： OSAKA GAS CO LTD , TOSHIBA CORP
发明人： OKAZAKI HIROKI , MATSUMOTO TAKESHI
IPC分类号： G01N27/12
摘要： PURPOSE:To ensure excellent selectivity for a specified kind of gas and to enable execution of proper detection being free from error, by a construction wherein a plurality of catalyst layers having different compositions from each other are formed in lamination on a gas-sensitive body. CONSTITUTION:When a voltage is impressed between lead pins 2b and 2d, a current flows through a heater 7 and the heater 7 generates a heat. Thereby the temperature of a heater board 4 is raised and a gas-sensitive body 13 is heated. When a gas exists in an ambient atmosphere, in this state, the gas reaches the gas-sensitive body 13 through catalyst layers 15 and 14. A resistance value of the gas-sensitive body 13 is reduced by sensing of the gas. The amount of reduction of this resistance value is determined in accordance with the concentration of the gas and taken out as a sensor output from lead pins 2a and 2c. By connecting a detecting circuit to the pins 2a and 2c, accordingly, the concentration of the gas can be known.

9. 发明专利

JPH05332970A 失效
公开(公告)号：JPH05332970A
公开(公告)日：1993-12-17
申请号：JP13943992
申请日：1992-05-29
申请人： OSAKA GAS CO LTD
发明人： KUDO SHUZO , ONISHI HISAO , MATSUMOTO TAKESHI , IPPONMATSU MASAMICHI
IPC分类号： G01N27/12
摘要： PURPOSE:To obtain a nitrogen oxide detecting sensor having a relatively simple and inexpensive structure, excellent selectivity for NOX and durability, by providing a gas detecting part of which the main constituent is a specific composite oxide and electrodes which are connected electrically with this detecting part. CONSTITUTION:A nitrogen oxide detecting sensor includes a gas detecting part 3 of which the main constituent is a composite oxide having electric conductivity or semiconductivity and expressed by a formula A1-XCaXB2M4O8+delta and of electrodes 4 and 5 which are connected electrically with the detecting part 3. In the formula, A is a group IIIa element, B is Sr, Ba or Ra; M is a transition metal element; (x) is 0 to 1; and delta is 0 to 0.4. This composite oxide has a layer- shaped oxygen lattice defect structure in a crystal structure and a nitrogen oxide molecule is made to coordinate with and eliminated from a portion of an oxygen defect reversibly. When this reaction occurs, the detecting part 3 itself shows a change in an electric resistance value in accordance with the concentration of a nitrogen oxide in a vapor phase. This change is detected by using the electrodes 4 and 5 and thereby the concentration of a nitrogen oxide gas contained in the air or a combustion exhaust gas can be detected with excellent selectivity.

10. 发明专利

JPH05332969A 失效
公开(公告)号：JPH05332969A
公开(公告)日：1993-12-17
申请号：JP13943892
申请日：1992-05-29
申请人： OSAKA GAS CO LTD
发明人： ONISHI HISAO , KUDO SHUZO , MATSUMOTO TAKESHI , IPPONMATSU MASAMICHI
IPC分类号： G01N27/12
摘要： PURPOSE:To obtain a nitrogen oxide detecting sensor having a relatively simple and inexpensive structure and durability, by providing a gas detecting part of which the main constituent is a specific composite oxide and electrodes which are connected electrically with the gas detecting part. CONSTITUTION:A nitrogen oxide detecting sensor includes a gas detecting part of which the main constituent is a composite oxide having electric conductivity or semiconductivity and expressed by a formula A2-XA'XMO4-delta and electrodes 4 and 5 which are connected electrically with the detecting part 3. In the formula, A is a group IIIa element, A' is a group IIa element, M is a transition metal element which can be bivalent, (x) is a number smaller than 2, and delta is 0 to 0.2. In this composite oxide, a nitrogen oxide gas reacts reversibly with M of the surface thereof by a vapor-solid phase reaction. When this adsorptive reaction occurs, the detecting part 3 shows a change in an electric resistance value in accordance with the concentration of a nitrogen oxide in a vapor phase. This change in the electric resistance value is detected by using the electrodes 4 and 5 provided for the sensor and thereby the concentration of the nitrogen oxide gas contained in the air, a combustion exhaust gas or the like can be detected easily.

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